8/10/2011	6:36:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	6:36:35 AM	Recipe started at 6:36 AM
8/10/2011	6:36:35 AM	Helium valve closed
8/10/2011	6:36:35 AM	H2 valve closed
8/10/2011	6:36:35 AM	BCl3 valve closed
8/10/2011	6:36:35 AM	PH3 valve closed
8/10/2011	6:36:35 AM	SiCl4 pre valve closed
8/10/2011	6:36:35 AM	SiCl4 post valve closed
8/10/2011	6:36:35 AM	Main Vac valve closed
8/10/2011	6:36:35 AM	Bypass valve closed
8/10/2011	6:36:35 AM	Bubbler valve closed
8/10/2011	6:36:35 AM	Helium MFC set to  0.000000
8/10/2011	6:36:35 AM	H2 MFC set to  0.000000
8/10/2011	6:36:35 AM	BCl3 MFC set to  0.000000
8/10/2011	6:36:35 AM	PHl3 MFC set to  0.000000
8/10/2011	6:36:35 AM	SiCl4 MFC set to  0.000000
8/10/2011	6:36:35 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:36:35 AM	Tube furnace set to 0
8/10/2011	6:36:38 AM	H2 valve closed
8/10/2011	6:36:38 AM	BCl3 valve closed
8/10/2011	6:36:38 AM	PH3 valve closed
8/10/2011	6:36:38 AM	SiCl4 pre valve closed
8/10/2011	6:36:38 AM	SiCl4 post valve closed
8/10/2011	6:36:38 AM	Main Vac valve closed
8/10/2011	6:36:38 AM	Bypass valve closed
8/10/2011	6:36:38 AM	Bubbler valve closed
8/10/2011	6:36:38 AM	Helium valve opened
8/10/2011	6:36:38 AM	Helium MFC set to  500.000000
8/10/2011	6:36:38 AM	H2 MFC set to  0.000000
8/10/2011	6:36:38 AM	BCl3 MFC set to  0.000000
8/10/2011	6:36:38 AM	PHl3 MFC set to  0.000000
8/10/2011	6:36:38 AM	SiCl4 MFC set to  0.000000
8/10/2011	6:36:38 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:36:38 AM	Tube furnace set to 0
8/10/2011	6:37:44 AM	Helium valve closed
8/10/2011	6:37:44 AM	H2 valve closed
8/10/2011	6:37:44 AM	BCl3 valve closed
8/10/2011	6:37:44 AM	PH3 valve closed
8/10/2011	6:37:44 AM	SiCl4 pre valve closed
8/10/2011	6:37:44 AM	SiCl4 post valve closed
8/10/2011	6:37:44 AM	Main Vac valve closed
8/10/2011	6:37:44 AM	Bypass valve closed
8/10/2011	6:37:44 AM	Bubbler valve closed
8/10/2011	6:37:44 AM	Helium MFC set to  0.000000
8/10/2011	6:37:44 AM	H2 MFC set to  0.000000
8/10/2011	6:37:44 AM	BCl3 MFC set to  0.000000
8/10/2011	6:37:44 AM	PHl3 MFC set to  0.000000
8/10/2011	6:37:44 AM	SiCl4 MFC set to  0.000000
8/10/2011	6:37:44 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:37:44 AM	Tube furnace set to 0
8/10/2011	6:37:45 AM	Run finished at 6:37 AM
8/10/2011	6:37:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	6:50:36 AM	Recipe started at 6:50 AM
8/10/2011	6:50:36 AM	Helium valve closed
8/10/2011	6:50:36 AM	H2 valve closed
8/10/2011	6:50:36 AM	BCl3 valve closed
8/10/2011	6:50:36 AM	PH3 valve closed
8/10/2011	6:50:36 AM	SiCl4 pre valve closed
8/10/2011	6:50:36 AM	SiCl4 post valve closed
8/10/2011	6:50:36 AM	Main Vac valve closed
8/10/2011	6:50:36 AM	Bubbler valve closed
8/10/2011	6:50:36 AM	Bypass valve opened
8/10/2011	6:50:36 AM	Helium MFC set to  0.000000
8/10/2011	6:50:36 AM	H2 MFC set to  0.000000
8/10/2011	6:50:36 AM	BCl3 MFC set to  0.000000
8/10/2011	6:50:36 AM	PHl3 MFC set to  0.000000
8/10/2011	6:50:36 AM	SiCl4 MFC set to  0.000000
8/10/2011	6:50:36 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:50:36 AM	Tube furnace set to 0
8/10/2011	6:51:48 AM	Helium valve closed
8/10/2011	6:51:48 AM	H2 valve closed
8/10/2011	6:51:48 AM	BCl3 valve closed
8/10/2011	6:51:48 AM	PH3 valve closed
8/10/2011	6:51:48 AM	SiCl4 pre valve closed
8/10/2011	6:51:48 AM	SiCl4 post valve closed
8/10/2011	6:51:48 AM	Main Vac valve closed
8/10/2011	6:51:48 AM	Bubbler valve closed
8/10/2011	6:51:48 AM	Bypass valve opened
8/10/2011	6:51:48 AM	Helium MFC set to  0.000000
8/10/2011	6:51:48 AM	H2 MFC set to  0.000000
8/10/2011	6:51:48 AM	BCl3 MFC set to  0.000000
8/10/2011	6:51:48 AM	PHl3 MFC set to  0.000000
8/10/2011	6:51:48 AM	SiCl4 MFC set to  0.000000
8/10/2011	6:51:48 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:51:48 AM	Tube furnace set to 0
8/10/2011	6:52:18 AM	Helium valve closed
8/10/2011	6:52:18 AM	H2 valve closed
8/10/2011	6:52:18 AM	BCl3 valve closed
8/10/2011	6:52:18 AM	PH3 valve closed
8/10/2011	6:52:18 AM	SiCl4 pre valve closed
8/10/2011	6:52:18 AM	SiCl4 post valve closed
8/10/2011	6:52:18 AM	Bypass valve closed
8/10/2011	6:52:18 AM	Bubbler valve closed
8/10/2011	6:52:18 AM	Main Vac valve opened
8/10/2011	6:52:18 AM	Helium MFC set to  0.000000
8/10/2011	6:52:18 AM	H2 MFC set to  0.000000
8/10/2011	6:52:18 AM	BCl3 MFC set to  0.000000
8/10/2011	6:52:18 AM	PHl3 MFC set to  0.000000
8/10/2011	6:52:18 AM	SiCl4 MFC set to  0.000000
8/10/2011	6:52:18 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:52:18 AM	Tube furnace set to 0
8/10/2011	7:22:18 AM	H2 valve closed
8/10/2011	7:22:18 AM	BCl3 valve closed
8/10/2011	7:22:18 AM	PH3 valve closed
8/10/2011	7:22:18 AM	SiCl4 pre valve closed
8/10/2011	7:22:18 AM	SiCl4 post valve closed
8/10/2011	7:22:18 AM	Bypass valve closed
8/10/2011	7:22:18 AM	Bubbler valve closed
8/10/2011	7:22:18 AM	Helium valve opened
8/10/2011	7:22:18 AM	Main Vac valve opened
8/10/2011	7:22:18 AM	Helium MFC set to  20.000000
8/10/2011	7:22:18 AM	H2 MFC set to  0.000000
8/10/2011	7:22:18 AM	BCl3 MFC set to  0.000000
8/10/2011	7:22:18 AM	PHl3 MFC set to  0.000000
8/10/2011	7:22:18 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:22:18 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:22:18 AM	Tube furnace set to 0
8/10/2011	7:22:48 AM	Helium valve closed
8/10/2011	7:22:48 AM	H2 valve closed
8/10/2011	7:22:48 AM	BCl3 valve closed
8/10/2011	7:22:48 AM	PH3 valve closed
8/10/2011	7:22:48 AM	SiCl4 pre valve closed
8/10/2011	7:22:48 AM	SiCl4 post valve closed
8/10/2011	7:22:48 AM	Bypass valve closed
8/10/2011	7:22:48 AM	Bubbler valve closed
8/10/2011	7:22:48 AM	Main Vac valve opened
8/10/2011	7:22:48 AM	Helium MFC set to  0.000000
8/10/2011	7:22:48 AM	H2 MFC set to  0.000000
8/10/2011	7:22:48 AM	BCl3 MFC set to  0.000000
8/10/2011	7:22:48 AM	PHl3 MFC set to  0.000000
8/10/2011	7:22:48 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:22:48 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:22:48 AM	Tube furnace set to 0
8/10/2011	7:23:18 AM	H2 valve closed
8/10/2011	7:23:18 AM	BCl3 valve closed
8/10/2011	7:23:18 AM	PH3 valve closed
8/10/2011	7:23:18 AM	SiCl4 pre valve closed
8/10/2011	7:23:18 AM	SiCl4 post valve closed
8/10/2011	7:23:18 AM	Bypass valve closed
8/10/2011	7:23:18 AM	Bubbler valve closed
8/10/2011	7:23:18 AM	Helium valve opened
8/10/2011	7:23:18 AM	Main Vac valve opened
8/10/2011	7:23:18 AM	Helium MFC set to  20.000000
8/10/2011	7:23:18 AM	H2 MFC set to  0.000000
8/10/2011	7:23:18 AM	BCl3 MFC set to  0.000000
8/10/2011	7:23:18 AM	PHl3 MFC set to  0.000000
8/10/2011	7:23:18 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:23:18 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:23:18 AM	Tube furnace set to 0
8/10/2011	7:23:48 AM	Helium valve closed
8/10/2011	7:23:48 AM	H2 valve closed
8/10/2011	7:23:48 AM	BCl3 valve closed
8/10/2011	7:23:48 AM	PH3 valve closed
8/10/2011	7:23:48 AM	SiCl4 pre valve closed
8/10/2011	7:23:48 AM	SiCl4 post valve closed
8/10/2011	7:23:48 AM	Bypass valve closed
8/10/2011	7:23:48 AM	Bubbler valve closed
8/10/2011	7:23:48 AM	Main Vac valve opened
8/10/2011	7:23:48 AM	Helium MFC set to  0.000000
8/10/2011	7:23:48 AM	H2 MFC set to  0.000000
8/10/2011	7:23:48 AM	BCl3 MFC set to  0.000000
8/10/2011	7:23:48 AM	PHl3 MFC set to  0.000000
8/10/2011	7:23:48 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:23:48 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:23:49 AM	Tube furnace set to 0
8/10/2011	7:24:19 AM	H2 valve closed
8/10/2011	7:24:19 AM	BCl3 valve closed
8/10/2011	7:24:19 AM	PH3 valve closed
8/10/2011	7:24:19 AM	SiCl4 pre valve closed
8/10/2011	7:24:19 AM	SiCl4 post valve closed
8/10/2011	7:24:19 AM	Bypass valve closed
8/10/2011	7:24:19 AM	Bubbler valve closed
8/10/2011	7:24:19 AM	Helium valve opened
8/10/2011	7:24:19 AM	Main Vac valve opened
8/10/2011	7:24:19 AM	Helium MFC set to  20.000000
8/10/2011	7:24:19 AM	H2 MFC set to  0.000000
8/10/2011	7:24:19 AM	BCl3 MFC set to  0.000000
8/10/2011	7:24:19 AM	PHl3 MFC set to  0.000000
8/10/2011	7:24:19 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:24:19 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:24:19 AM	Tube furnace set to 0
8/10/2011	7:24:49 AM	Helium valve closed
8/10/2011	7:24:49 AM	H2 valve closed
8/10/2011	7:24:49 AM	BCl3 valve closed
8/10/2011	7:24:49 AM	PH3 valve closed
8/10/2011	7:24:49 AM	SiCl4 pre valve closed
8/10/2011	7:24:49 AM	SiCl4 post valve closed
8/10/2011	7:24:49 AM	Bypass valve closed
8/10/2011	7:24:49 AM	Bubbler valve closed
8/10/2011	7:24:49 AM	Main Vac valve opened
8/10/2011	7:24:49 AM	Helium MFC set to  0.000000
8/10/2011	7:24:49 AM	H2 MFC set to  0.000000
8/10/2011	7:24:49 AM	BCl3 MFC set to  0.000000
8/10/2011	7:24:49 AM	PHl3 MFC set to  0.000000
8/10/2011	7:24:49 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:24:49 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:24:49 AM	Tube furnace set to 0
8/10/2011	7:25:19 AM	H2 valve closed
8/10/2011	7:25:19 AM	BCl3 valve closed
8/10/2011	7:25:19 AM	PH3 valve closed
8/10/2011	7:25:19 AM	SiCl4 pre valve closed
8/10/2011	7:25:19 AM	SiCl4 post valve closed
8/10/2011	7:25:19 AM	Bypass valve closed
8/10/2011	7:25:19 AM	Bubbler valve closed
8/10/2011	7:25:19 AM	Helium valve opened
8/10/2011	7:25:19 AM	Main Vac valve opened
8/10/2011	7:25:19 AM	Helium MFC set to  20.000000
8/10/2011	7:25:19 AM	H2 MFC set to  0.000000
8/10/2011	7:25:19 AM	BCl3 MFC set to  0.000000
8/10/2011	7:25:19 AM	PHl3 MFC set to  0.000000
8/10/2011	7:25:19 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:25:19 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:25:19 AM	Tube furnace set to 0
8/10/2011	7:25:49 AM	Helium valve closed
8/10/2011	7:25:49 AM	H2 valve closed
8/10/2011	7:25:49 AM	BCl3 valve closed
8/10/2011	7:25:49 AM	PH3 valve closed
8/10/2011	7:25:49 AM	SiCl4 pre valve closed
8/10/2011	7:25:49 AM	SiCl4 post valve closed
8/10/2011	7:25:49 AM	Bypass valve closed
8/10/2011	7:25:49 AM	Bubbler valve closed
8/10/2011	7:25:49 AM	Main Vac valve opened
8/10/2011	7:25:49 AM	Helium MFC set to  0.000000
8/10/2011	7:25:49 AM	H2 MFC set to  0.000000
8/10/2011	7:25:49 AM	BCl3 MFC set to  0.000000
8/10/2011	7:25:49 AM	PHl3 MFC set to  0.000000
8/10/2011	7:25:49 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:25:49 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:25:49 AM	Tube furnace set to 0
8/10/2011	7:26:19 AM	H2 valve closed
8/10/2011	7:26:19 AM	BCl3 valve closed
8/10/2011	7:26:19 AM	PH3 valve closed
8/10/2011	7:26:19 AM	SiCl4 pre valve closed
8/10/2011	7:26:19 AM	SiCl4 post valve closed
8/10/2011	7:26:19 AM	Bypass valve closed
8/10/2011	7:26:19 AM	Bubbler valve closed
8/10/2011	7:26:19 AM	Helium valve opened
8/10/2011	7:26:19 AM	Main Vac valve opened
8/10/2011	7:26:19 AM	Helium MFC set to  20.000000
8/10/2011	7:26:19 AM	H2 MFC set to  0.000000
8/10/2011	7:26:19 AM	BCl3 MFC set to  0.000000
8/10/2011	7:26:19 AM	PHl3 MFC set to  0.000000
8/10/2011	7:26:19 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:26:19 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:26:20 AM	Tube furnace set to 0
8/10/2011	7:26:50 AM	Helium valve closed
8/10/2011	7:26:50 AM	H2 valve closed
8/10/2011	7:26:50 AM	BCl3 valve closed
8/10/2011	7:26:50 AM	PH3 valve closed
8/10/2011	7:26:50 AM	SiCl4 pre valve closed
8/10/2011	7:26:50 AM	SiCl4 post valve closed
8/10/2011	7:26:50 AM	Bypass valve closed
8/10/2011	7:26:50 AM	Bubbler valve closed
8/10/2011	7:26:50 AM	Main Vac valve opened
8/10/2011	7:26:50 AM	Helium MFC set to  0.000000
8/10/2011	7:26:50 AM	H2 MFC set to  0.000000
8/10/2011	7:26:50 AM	BCl3 MFC set to  0.000000
8/10/2011	7:26:50 AM	PHl3 MFC set to  0.000000
8/10/2011	7:26:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:26:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:26:50 AM	Tube furnace set to 0
8/10/2011	7:27:20 AM	H2 valve closed
8/10/2011	7:27:20 AM	BCl3 valve closed
8/10/2011	7:27:20 AM	PH3 valve closed
8/10/2011	7:27:20 AM	SiCl4 pre valve closed
8/10/2011	7:27:20 AM	SiCl4 post valve closed
8/10/2011	7:27:20 AM	Bypass valve closed
8/10/2011	7:27:20 AM	Bubbler valve closed
8/10/2011	7:27:20 AM	Helium valve opened
8/10/2011	7:27:20 AM	Main Vac valve opened
8/10/2011	7:27:20 AM	Helium MFC set to  20.000000
8/10/2011	7:27:20 AM	H2 MFC set to  0.000000
8/10/2011	7:27:20 AM	BCl3 MFC set to  0.000000
8/10/2011	7:27:20 AM	PHl3 MFC set to  0.000000
8/10/2011	7:27:20 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:27:20 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:27:20 AM	Tube furnace set to 0
8/10/2011	7:27:50 AM	Helium valve closed
8/10/2011	7:27:50 AM	H2 valve closed
8/10/2011	7:27:50 AM	BCl3 valve closed
8/10/2011	7:27:50 AM	PH3 valve closed
8/10/2011	7:27:50 AM	SiCl4 pre valve closed
8/10/2011	7:27:50 AM	SiCl4 post valve closed
8/10/2011	7:27:50 AM	Bypass valve closed
8/10/2011	7:27:50 AM	Bubbler valve closed
8/10/2011	7:27:50 AM	Main Vac valve opened
8/10/2011	7:27:50 AM	Helium MFC set to  0.000000
8/10/2011	7:27:50 AM	H2 MFC set to  0.000000
8/10/2011	7:27:50 AM	BCl3 MFC set to  0.000000
8/10/2011	7:27:50 AM	PHl3 MFC set to  0.000000
8/10/2011	7:27:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:27:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:27:50 AM	Tube furnace set to 0
8/10/2011	7:28:20 AM	H2 valve closed
8/10/2011	7:28:20 AM	BCl3 valve closed
8/10/2011	7:28:20 AM	PH3 valve closed
8/10/2011	7:28:20 AM	SiCl4 pre valve closed
8/10/2011	7:28:20 AM	SiCl4 post valve closed
8/10/2011	7:28:20 AM	Bypass valve closed
8/10/2011	7:28:20 AM	Bubbler valve closed
8/10/2011	7:28:20 AM	Helium valve opened
8/10/2011	7:28:20 AM	Main Vac valve opened
8/10/2011	7:28:20 AM	Helium MFC set to  20.000000
8/10/2011	7:28:20 AM	H2 MFC set to  0.000000
8/10/2011	7:28:20 AM	BCl3 MFC set to  0.000000
8/10/2011	7:28:20 AM	PHl3 MFC set to  0.000000
8/10/2011	7:28:20 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:28:20 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:28:20 AM	Tube furnace set to 0
8/10/2011	7:28:50 AM	Helium valve closed
8/10/2011	7:28:50 AM	H2 valve closed
8/10/2011	7:28:50 AM	BCl3 valve closed
8/10/2011	7:28:50 AM	PH3 valve closed
8/10/2011	7:28:50 AM	SiCl4 pre valve closed
8/10/2011	7:28:50 AM	SiCl4 post valve closed
8/10/2011	7:28:50 AM	Bypass valve closed
8/10/2011	7:28:50 AM	Bubbler valve closed
8/10/2011	7:28:50 AM	Main Vac valve opened
8/10/2011	7:28:50 AM	Helium MFC set to  0.000000
8/10/2011	7:28:50 AM	H2 MFC set to  0.000000
8/10/2011	7:28:50 AM	BCl3 MFC set to  0.000000
8/10/2011	7:28:50 AM	PHl3 MFC set to  0.000000
8/10/2011	7:28:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:28:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:28:51 AM	Tube furnace set to 0
8/10/2011	7:29:21 AM	H2 valve closed
8/10/2011	7:29:21 AM	BCl3 valve closed
8/10/2011	7:29:21 AM	PH3 valve closed
8/10/2011	7:29:21 AM	SiCl4 pre valve closed
8/10/2011	7:29:21 AM	SiCl4 post valve closed
8/10/2011	7:29:21 AM	Bypass valve closed
8/10/2011	7:29:21 AM	Bubbler valve closed
8/10/2011	7:29:21 AM	Helium valve opened
8/10/2011	7:29:21 AM	Main Vac valve opened
8/10/2011	7:29:21 AM	Helium MFC set to  20.000000
8/10/2011	7:29:21 AM	H2 MFC set to  0.000000
8/10/2011	7:29:21 AM	BCl3 MFC set to  0.000000
8/10/2011	7:29:21 AM	PHl3 MFC set to  0.000000
8/10/2011	7:29:21 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:29:21 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:29:21 AM	Tube furnace set to 0
8/10/2011	7:29:51 AM	Helium valve closed
8/10/2011	7:29:51 AM	H2 valve closed
8/10/2011	7:29:51 AM	BCl3 valve closed
8/10/2011	7:29:51 AM	PH3 valve closed
8/10/2011	7:29:51 AM	SiCl4 pre valve closed
8/10/2011	7:29:51 AM	SiCl4 post valve closed
8/10/2011	7:29:51 AM	Bypass valve closed
8/10/2011	7:29:51 AM	Bubbler valve closed
8/10/2011	7:29:51 AM	Main Vac valve opened
8/10/2011	7:29:51 AM	Helium MFC set to  0.000000
8/10/2011	7:29:51 AM	H2 MFC set to  0.000000
8/10/2011	7:29:51 AM	BCl3 MFC set to  0.000000
8/10/2011	7:29:51 AM	PHl3 MFC set to  0.000000
8/10/2011	7:29:51 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:29:51 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:29:51 AM	Tube furnace set to 0
8/10/2011	7:30:21 AM	H2 valve closed
8/10/2011	7:30:21 AM	BCl3 valve closed
8/10/2011	7:30:21 AM	PH3 valve closed
8/10/2011	7:30:21 AM	SiCl4 pre valve closed
8/10/2011	7:30:21 AM	SiCl4 post valve closed
8/10/2011	7:30:21 AM	Bypass valve closed
8/10/2011	7:30:21 AM	Bubbler valve closed
8/10/2011	7:30:21 AM	Helium valve opened
8/10/2011	7:30:21 AM	Main Vac valve opened
8/10/2011	7:30:21 AM	Helium MFC set to  20.000000
8/10/2011	7:30:21 AM	H2 MFC set to  0.000000
8/10/2011	7:30:21 AM	BCl3 MFC set to  0.000000
8/10/2011	7:30:21 AM	PHl3 MFC set to  0.000000
8/10/2011	7:30:21 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:30:21 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:30:21 AM	Tube furnace set to 0
8/10/2011	7:30:51 AM	Helium valve closed
8/10/2011	7:30:51 AM	H2 valve closed
8/10/2011	7:30:51 AM	BCl3 valve closed
8/10/2011	7:30:51 AM	PH3 valve closed
8/10/2011	7:30:51 AM	SiCl4 pre valve closed
8/10/2011	7:30:51 AM	SiCl4 post valve closed
8/10/2011	7:30:51 AM	Bypass valve closed
8/10/2011	7:30:51 AM	Bubbler valve closed
8/10/2011	7:30:51 AM	Main Vac valve opened
8/10/2011	7:30:51 AM	Helium MFC set to  0.000000
8/10/2011	7:30:51 AM	H2 MFC set to  0.000000
8/10/2011	7:30:51 AM	BCl3 MFC set to  0.000000
8/10/2011	7:30:51 AM	PHl3 MFC set to  0.000000
8/10/2011	7:30:51 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:30:51 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:30:51 AM	Tube furnace set to 0
8/10/2011	7:31:21 AM	H2 valve closed
8/10/2011	7:31:21 AM	BCl3 valve closed
8/10/2011	7:31:21 AM	PH3 valve closed
8/10/2011	7:31:21 AM	SiCl4 pre valve closed
8/10/2011	7:31:21 AM	SiCl4 post valve closed
8/10/2011	7:31:21 AM	Bypass valve closed
8/10/2011	7:31:21 AM	Bubbler valve closed
8/10/2011	7:31:21 AM	Helium valve opened
8/10/2011	7:31:21 AM	Main Vac valve opened
8/10/2011	7:31:21 AM	Helium MFC set to  20.000000
8/10/2011	7:31:21 AM	H2 MFC set to  0.000000
8/10/2011	7:31:21 AM	BCl3 MFC set to  0.000000
8/10/2011	7:31:21 AM	PHl3 MFC set to  0.000000
8/10/2011	7:31:21 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:31:21 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:31:22 AM	Tube furnace set to 0
8/10/2011	7:31:52 AM	Helium valve closed
8/10/2011	7:31:52 AM	H2 valve closed
8/10/2011	7:31:52 AM	BCl3 valve closed
8/10/2011	7:31:52 AM	PH3 valve closed
8/10/2011	7:31:52 AM	SiCl4 pre valve closed
8/10/2011	7:31:52 AM	SiCl4 post valve closed
8/10/2011	7:31:52 AM	Bypass valve closed
8/10/2011	7:31:52 AM	Bubbler valve closed
8/10/2011	7:31:52 AM	Main Vac valve opened
8/10/2011	7:31:52 AM	Helium MFC set to  0.000000
8/10/2011	7:31:52 AM	H2 MFC set to  0.000000
8/10/2011	7:31:52 AM	BCl3 MFC set to  0.000000
8/10/2011	7:31:52 AM	PHl3 MFC set to  0.000000
8/10/2011	7:31:52 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:31:52 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:31:52 AM	Tube furnace set to 0
8/10/2011	7:31:53 AM	Run finished at 7:31 AM
8/10/2011	7:49:48 AM	Main Vac valve closed
8/10/2011	7:50:05 AM	Main Vac valve opened
8/10/2011	7:50:38 AM	Recipe started at 7:50 AM
8/10/2011	7:50:38 AM	Helium valve closed
8/10/2011	7:50:38 AM	H2 valve closed
8/10/2011	7:50:38 AM	BCl3 valve closed
8/10/2011	7:50:38 AM	PH3 valve closed
8/10/2011	7:50:38 AM	SiCl4 pre valve closed
8/10/2011	7:50:38 AM	SiCl4 post valve closed
8/10/2011	7:50:38 AM	Main Vac valve closed
8/10/2011	7:50:38 AM	Bypass valve closed
8/10/2011	7:50:38 AM	Bubbler valve closed
8/10/2011	7:50:38 AM	Helium MFC set to  0.000000
8/10/2011	7:50:38 AM	H2 MFC set to  0.000000
8/10/2011	7:50:38 AM	BCl3 MFC set to  0.000000
8/10/2011	7:50:38 AM	PHl3 MFC set to  0.000000
8/10/2011	7:50:38 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:50:38 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:50:38 AM	Tube furnace set to 0
8/10/2011	7:50:41 AM	Helium valve closed
8/10/2011	7:50:41 AM	BCl3 valve closed
8/10/2011	7:50:41 AM	PH3 valve closed
8/10/2011	7:50:41 AM	SiCl4 pre valve closed
8/10/2011	7:50:41 AM	SiCl4 post valve closed
8/10/2011	7:50:41 AM	Main Vac valve closed
8/10/2011	7:50:41 AM	Bypass valve closed
8/10/2011	7:50:41 AM	Bubbler valve closed
8/10/2011	7:50:41 AM	H2 valve opened
8/10/2011	7:50:41 AM	Helium MFC set to  0.000000
8/10/2011	7:50:41 AM	H2 MFC set to  500.000000
8/10/2011	7:50:41 AM	BCl3 MFC set to  0.000000
8/10/2011	7:50:41 AM	PHl3 MFC set to  0.000000
8/10/2011	7:50:41 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:50:41 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:50:41 AM	Tube furnace set to 0
8/10/2011	7:51:48 AM	Helium valve closed
8/10/2011	7:51:48 AM	BCl3 valve closed
8/10/2011	7:51:48 AM	PH3 valve closed
8/10/2011	7:51:48 AM	SiCl4 pre valve closed
8/10/2011	7:51:48 AM	SiCl4 post valve closed
8/10/2011	7:51:48 AM	Main Vac valve closed
8/10/2011	7:51:48 AM	Bypass valve closed
8/10/2011	7:51:48 AM	H2 valve opened
8/10/2011	7:51:48 AM	Bubbler valve opened
8/10/2011	7:51:48 AM	Helium MFC set to  0.000000
8/10/2011	7:51:48 AM	H2 MFC set to  500.000000
8/10/2011	7:51:48 AM	BCl3 MFC set to  0.000000
8/10/2011	7:51:48 AM	PHl3 MFC set to  0.000000
8/10/2011	7:51:48 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:51:48 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:51:48 AM	Tube furnace set to 0
8/10/2011	7:51:50 AM	Helium valve closed
8/10/2011	7:51:50 AM	BCl3 valve closed
8/10/2011	7:51:50 AM	PH3 valve closed
8/10/2011	7:51:50 AM	SiCl4 pre valve closed
8/10/2011	7:51:50 AM	SiCl4 post valve closed
8/10/2011	7:51:50 AM	Main Vac valve closed
8/10/2011	7:51:50 AM	Bypass valve closed
8/10/2011	7:51:50 AM	H2 valve opened
8/10/2011	7:51:50 AM	Bubbler valve opened
8/10/2011	7:51:50 AM	Helium MFC set to  0.000000
8/10/2011	7:51:50 AM	H2 MFC set to  500.000000
8/10/2011	7:51:50 AM	BCl3 MFC set to  0.000000
8/10/2011	7:51:50 AM	PHl3 MFC set to  0.000000
8/10/2011	7:51:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	7:51:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:51:50 AM	Tube furnace set to 1000
8/10/2011	8:11:50 AM	Helium valve closed
8/10/2011	8:11:50 AM	PH3 valve closed
8/10/2011	8:11:50 AM	Main Vac valve closed
8/10/2011	8:11:50 AM	Bypass valve closed
8/10/2011	8:11:50 AM	H2 valve opened
8/10/2011	8:11:50 AM	BCl3 valve opened
8/10/2011	8:11:50 AM	SiCl4 pre valve opened
8/10/2011	8:11:50 AM	SiCl4 post valve opened
8/10/2011	8:11:50 AM	Bubbler valve opened
8/10/2011	8:11:50 AM	Helium MFC set to  0.000000
8/10/2011	8:11:50 AM	H2 MFC set to  440.000000
8/10/2011	8:11:50 AM	BCl3 MFC set to  60.000000
8/10/2011	8:11:50 AM	PHl3 MFC set to  0.000000
8/10/2011	8:11:50 AM	SiCl4 MFC set to  50.000000
8/10/2011	8:11:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:11:50 AM	Tube furnace set to 1000
8/10/2011	8:24:50 AM	Helium valve closed
8/10/2011	8:24:50 AM	BCl3 valve closed
8/10/2011	8:24:50 AM	PH3 valve closed
8/10/2011	8:24:50 AM	SiCl4 pre valve closed
8/10/2011	8:24:50 AM	SiCl4 post valve closed
8/10/2011	8:24:50 AM	Main Vac valve closed
8/10/2011	8:24:50 AM	Bypass valve closed
8/10/2011	8:24:50 AM	H2 valve opened
8/10/2011	8:24:50 AM	Bubbler valve opened
8/10/2011	8:24:50 AM	Helium MFC set to  0.000000
8/10/2011	8:24:50 AM	H2 MFC set to  500.000000
8/10/2011	8:24:50 AM	BCl3 MFC set to  0.000000
8/10/2011	8:24:50 AM	PHl3 MFC set to  0.000000
8/10/2011	8:24:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	8:24:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:24:50 AM	Tube furnace set to 750
8/10/2011	8:29:50 AM	H2 valve closed
8/10/2011	8:29:50 AM	BCl3 valve closed
8/10/2011	8:29:50 AM	PH3 valve closed
8/10/2011	8:29:50 AM	SiCl4 pre valve closed
8/10/2011	8:29:50 AM	SiCl4 post valve closed
8/10/2011	8:29:50 AM	Main Vac valve closed
8/10/2011	8:29:50 AM	Bypass valve closed
8/10/2011	8:29:50 AM	Helium valve opened
8/10/2011	8:29:50 AM	Bubbler valve opened
8/10/2011	8:29:50 AM	Helium MFC set to  500.000000
8/10/2011	8:29:50 AM	H2 MFC set to  0.000000
8/10/2011	8:29:50 AM	BCl3 MFC set to  0.000000
8/10/2011	8:29:50 AM	PHl3 MFC set to  0.000000
8/10/2011	8:29:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	8:29:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:29:50 AM	Tube furnace set to 0
8/10/2011	8:49:50 AM	Helium valve closed
8/10/2011	8:49:50 AM	H2 valve closed
8/10/2011	8:49:50 AM	BCl3 valve closed
8/10/2011	8:49:50 AM	PH3 valve closed
8/10/2011	8:49:50 AM	SiCl4 pre valve closed
8/10/2011	8:49:50 AM	SiCl4 post valve closed
8/10/2011	8:49:50 AM	Main Vac valve closed
8/10/2011	8:49:50 AM	Bypass valve closed
8/10/2011	8:49:50 AM	Bubbler valve closed
8/10/2011	8:49:50 AM	Helium MFC set to  0.000000
8/10/2011	8:49:50 AM	H2 MFC set to  0.000000
8/10/2011	8:49:50 AM	BCl3 MFC set to  0.000000
8/10/2011	8:49:50 AM	PHl3 MFC set to  0.000000
8/10/2011	8:49:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	8:49:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:49:50 AM	Tube furnace set to 0
8/10/2011	8:49:51 AM	Run finished at 8:49 AM
8/10/2011	9:14:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	9:14:14 AM	Recipe started at 9:14 AM
8/10/2011	9:14:14 AM	Helium valve closed
8/10/2011	9:14:14 AM	H2 valve closed
8/10/2011	9:14:14 AM	BCl3 valve closed
8/10/2011	9:14:14 AM	PH3 valve closed
8/10/2011	9:14:14 AM	SiCl4 pre valve closed
8/10/2011	9:14:14 AM	SiCl4 post valve closed
8/10/2011	9:14:14 AM	Main Vac valve closed
8/10/2011	9:14:14 AM	Bypass valve closed
8/10/2011	9:14:14 AM	Bubbler valve closed
8/10/2011	9:14:14 AM	Helium MFC set to  0.000000
8/10/2011	9:14:14 AM	H2 MFC set to  0.000000
8/10/2011	9:14:14 AM	BCl3 MFC set to  0.000000
8/10/2011	9:14:14 AM	PHl3 MFC set to  0.000000
8/10/2011	9:14:14 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:14:14 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:14:14 AM	Tube furnace set to 0
8/10/2011	9:14:17 AM	H2 valve closed
8/10/2011	9:14:17 AM	BCl3 valve closed
8/10/2011	9:14:17 AM	PH3 valve closed
8/10/2011	9:14:17 AM	SiCl4 pre valve closed
8/10/2011	9:14:17 AM	SiCl4 post valve closed
8/10/2011	9:14:17 AM	Main Vac valve closed
8/10/2011	9:14:17 AM	Bypass valve closed
8/10/2011	9:14:17 AM	Bubbler valve closed
8/10/2011	9:14:17 AM	Helium valve opened
8/10/2011	9:14:17 AM	Helium MFC set to  500.000000
8/10/2011	9:14:17 AM	H2 MFC set to  0.000000
8/10/2011	9:14:17 AM	BCl3 MFC set to  0.000000
8/10/2011	9:14:17 AM	PHl3 MFC set to  0.000000
8/10/2011	9:14:17 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:14:17 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:14:17 AM	Tube furnace set to 0
8/10/2011	9:14:18 AM	Helium valve closed
8/10/2011	9:14:18 AM	H2 valve closed
8/10/2011	9:14:18 AM	BCl3 valve closed
8/10/2011	9:14:18 AM	PH3 valve closed
8/10/2011	9:14:18 AM	SiCl4 pre valve closed
8/10/2011	9:14:18 AM	SiCl4 post valve closed
8/10/2011	9:14:18 AM	Main Vac valve closed
8/10/2011	9:14:18 AM	Bypass valve closed
8/10/2011	9:14:18 AM	Bubbler valve closed
8/10/2011	9:14:18 AM	Helium MFC set to  0.000000
8/10/2011	9:14:18 AM	H2 MFC set to  0.000000
8/10/2011	9:14:18 AM	BCl3 MFC set to  0.000000
8/10/2011	9:14:18 AM	PHl3 MFC set to  0.000000
8/10/2011	9:14:18 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:14:18 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:14:18 AM	Tube furnace set to 0
8/10/2011	9:14:19 AM	Run finished at 9:14 AM
8/10/2011	9:14:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	9:19:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	9:19:03 AM	Recipe started at 9:19 AM
8/10/2011	9:19:03 AM	Helium valve closed
8/10/2011	9:19:03 AM	H2 valve closed
8/10/2011	9:19:03 AM	BCl3 valve closed
8/10/2011	9:19:03 AM	PH3 valve closed
8/10/2011	9:19:03 AM	SiCl4 pre valve closed
8/10/2011	9:19:03 AM	SiCl4 post valve closed
8/10/2011	9:19:03 AM	Main Vac valve closed
8/10/2011	9:19:03 AM	Bypass valve closed
8/10/2011	9:19:03 AM	Bubbler valve closed
8/10/2011	9:19:03 AM	Helium MFC set to  0.000000
8/10/2011	9:19:03 AM	H2 MFC set to  0.000000
8/10/2011	9:19:03 AM	BCl3 MFC set to  0.000000
8/10/2011	9:19:03 AM	PHl3 MFC set to  0.000000
8/10/2011	9:19:03 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:19:03 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:19:03 AM	Tube furnace set to 0
8/10/2011	9:19:06 AM	H2 valve closed
8/10/2011	9:19:06 AM	BCl3 valve closed
8/10/2011	9:19:06 AM	PH3 valve closed
8/10/2011	9:19:06 AM	SiCl4 pre valve closed
8/10/2011	9:19:06 AM	SiCl4 post valve closed
8/10/2011	9:19:06 AM	Main Vac valve closed
8/10/2011	9:19:06 AM	Bypass valve closed
8/10/2011	9:19:06 AM	Bubbler valve closed
8/10/2011	9:19:06 AM	Helium valve opened
8/10/2011	9:19:06 AM	Helium MFC set to  500.000000
8/10/2011	9:19:06 AM	H2 MFC set to  0.000000
8/10/2011	9:19:06 AM	BCl3 MFC set to  0.000000
8/10/2011	9:19:06 AM	PHl3 MFC set to  0.000000
8/10/2011	9:19:06 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:19:06 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:19:07 AM	Tube furnace set to 0
8/10/2011	9:19:10 AM	Helium valve closed
8/10/2011	9:19:10 AM	H2 valve closed
8/10/2011	9:19:10 AM	BCl3 valve closed
8/10/2011	9:19:10 AM	PH3 valve closed
8/10/2011	9:19:10 AM	SiCl4 pre valve closed
8/10/2011	9:19:10 AM	SiCl4 post valve closed
8/10/2011	9:19:10 AM	Main Vac valve closed
8/10/2011	9:19:10 AM	Bypass valve closed
8/10/2011	9:19:10 AM	Bubbler valve closed
8/10/2011	9:19:10 AM	Helium MFC set to  0.000000
8/10/2011	9:19:10 AM	H2 MFC set to  0.000000
8/10/2011	9:19:10 AM	BCl3 MFC set to  0.000000
8/10/2011	9:19:10 AM	PHl3 MFC set to  0.000000
8/10/2011	9:19:10 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:19:10 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:19:10 AM	Tube furnace set to 0
8/10/2011	9:19:11 AM	Run finished at 9:19 AM
8/10/2011	9:19:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	9:26:28 AM	Recipe started at 9:26 AM
8/10/2011	9:26:28 AM	Helium valve closed
8/10/2011	9:26:28 AM	H2 valve closed
8/10/2011	9:26:28 AM	BCl3 valve closed
8/10/2011	9:26:28 AM	PH3 valve closed
8/10/2011	9:26:28 AM	SiCl4 pre valve closed
8/10/2011	9:26:28 AM	SiCl4 post valve closed
8/10/2011	9:26:28 AM	Main Vac valve closed
8/10/2011	9:26:28 AM	Bubbler valve closed
8/10/2011	9:26:28 AM	Bypass valve opened
8/10/2011	9:26:28 AM	Helium MFC set to  0.000000
8/10/2011	9:26:28 AM	H2 MFC set to  0.000000
8/10/2011	9:26:28 AM	BCl3 MFC set to  0.000000
8/10/2011	9:26:28 AM	PHl3 MFC set to  0.000000
8/10/2011	9:26:28 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:26:28 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:26:28 AM	Tube furnace set to 0
8/10/2011	9:27:34 AM	Helium valve closed
8/10/2011	9:27:34 AM	H2 valve closed
8/10/2011	9:27:34 AM	BCl3 valve closed
8/10/2011	9:27:34 AM	PH3 valve closed
8/10/2011	9:27:34 AM	SiCl4 pre valve closed
8/10/2011	9:27:34 AM	SiCl4 post valve closed
8/10/2011	9:27:34 AM	Main Vac valve closed
8/10/2011	9:27:34 AM	Bubbler valve closed
8/10/2011	9:27:34 AM	Bypass valve opened
8/10/2011	9:27:34 AM	Helium MFC set to  0.000000
8/10/2011	9:27:34 AM	H2 MFC set to  0.000000
8/10/2011	9:27:34 AM	BCl3 MFC set to  0.000000
8/10/2011	9:27:34 AM	PHl3 MFC set to  0.000000
8/10/2011	9:27:34 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:27:34 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:27:34 AM	Tube furnace set to 0
8/10/2011	9:28:04 AM	Helium valve closed
8/10/2011	9:28:04 AM	H2 valve closed
8/10/2011	9:28:04 AM	BCl3 valve closed
8/10/2011	9:28:04 AM	PH3 valve closed
8/10/2011	9:28:04 AM	SiCl4 pre valve closed
8/10/2011	9:28:04 AM	SiCl4 post valve closed
8/10/2011	9:28:04 AM	Bypass valve closed
8/10/2011	9:28:04 AM	Bubbler valve closed
8/10/2011	9:28:04 AM	Main Vac valve opened
8/10/2011	9:28:04 AM	Helium MFC set to  0.000000
8/10/2011	9:28:05 AM	H2 MFC set to  0.000000
8/10/2011	9:28:05 AM	BCl3 MFC set to  0.000000
8/10/2011	9:28:05 AM	PHl3 MFC set to  0.000000
8/10/2011	9:28:05 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:28:05 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:28:05 AM	Tube furnace set to 0
8/10/2011	9:58:05 AM	H2 valve closed
8/10/2011	9:58:05 AM	BCl3 valve closed
8/10/2011	9:58:05 AM	PH3 valve closed
8/10/2011	9:58:05 AM	SiCl4 pre valve closed
8/10/2011	9:58:05 AM	SiCl4 post valve closed
8/10/2011	9:58:05 AM	Bypass valve closed
8/10/2011	9:58:05 AM	Bubbler valve closed
8/10/2011	9:58:05 AM	Helium valve opened
8/10/2011	9:58:05 AM	Main Vac valve opened
8/10/2011	9:58:05 AM	Helium MFC set to  20.000000
8/10/2011	9:58:05 AM	H2 MFC set to  0.000000
8/10/2011	9:58:05 AM	BCl3 MFC set to  0.000000
8/10/2011	9:58:05 AM	PHl3 MFC set to  0.000000
8/10/2011	9:58:05 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:58:05 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:58:05 AM	Tube furnace set to 0
8/10/2011	9:58:35 AM	Helium valve closed
8/10/2011	9:58:35 AM	H2 valve closed
8/10/2011	9:58:35 AM	BCl3 valve closed
8/10/2011	9:58:35 AM	PH3 valve closed
8/10/2011	9:58:35 AM	SiCl4 pre valve closed
8/10/2011	9:58:35 AM	SiCl4 post valve closed
8/10/2011	9:58:35 AM	Bypass valve closed
8/10/2011	9:58:35 AM	Bubbler valve closed
8/10/2011	9:58:35 AM	Main Vac valve opened
8/10/2011	9:58:35 AM	Helium MFC set to  0.000000
8/10/2011	9:58:35 AM	H2 MFC set to  0.000000
8/10/2011	9:58:35 AM	BCl3 MFC set to  0.000000
8/10/2011	9:58:35 AM	PHl3 MFC set to  0.000000
8/10/2011	9:58:35 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:58:35 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:58:35 AM	Tube furnace set to 0
8/10/2011	9:59:05 AM	H2 valve closed
8/10/2011	9:59:05 AM	BCl3 valve closed
8/10/2011	9:59:05 AM	PH3 valve closed
8/10/2011	9:59:05 AM	SiCl4 pre valve closed
8/10/2011	9:59:05 AM	SiCl4 post valve closed
8/10/2011	9:59:05 AM	Bypass valve closed
8/10/2011	9:59:05 AM	Bubbler valve closed
8/10/2011	9:59:05 AM	Helium valve opened
8/10/2011	9:59:05 AM	Main Vac valve opened
8/10/2011	9:59:05 AM	Helium MFC set to  20.000000
8/10/2011	9:59:05 AM	H2 MFC set to  0.000000
8/10/2011	9:59:05 AM	BCl3 MFC set to  0.000000
8/10/2011	9:59:05 AM	PHl3 MFC set to  0.000000
8/10/2011	9:59:05 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:59:05 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:59:05 AM	Tube furnace set to 0
8/10/2011	9:59:35 AM	Helium valve closed
8/10/2011	9:59:35 AM	H2 valve closed
8/10/2011	9:59:35 AM	BCl3 valve closed
8/10/2011	9:59:35 AM	PH3 valve closed
8/10/2011	9:59:35 AM	SiCl4 pre valve closed
8/10/2011	9:59:35 AM	SiCl4 post valve closed
8/10/2011	9:59:35 AM	Bypass valve closed
8/10/2011	9:59:35 AM	Bubbler valve closed
8/10/2011	9:59:35 AM	Main Vac valve opened
8/10/2011	9:59:35 AM	Helium MFC set to  0.000000
8/10/2011	9:59:35 AM	H2 MFC set to  0.000000
8/10/2011	9:59:35 AM	BCl3 MFC set to  0.000000
8/10/2011	9:59:35 AM	PHl3 MFC set to  0.000000
8/10/2011	9:59:35 AM	SiCl4 MFC set to  0.000000
8/10/2011	9:59:35 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:59:35 AM	Tube furnace set to 0
8/10/2011	10:00:05 AM	H2 valve closed
8/10/2011	10:00:05 AM	BCl3 valve closed
8/10/2011	10:00:05 AM	PH3 valve closed
8/10/2011	10:00:05 AM	SiCl4 pre valve closed
8/10/2011	10:00:05 AM	SiCl4 post valve closed
8/10/2011	10:00:05 AM	Bypass valve closed
8/10/2011	10:00:05 AM	Bubbler valve closed
8/10/2011	10:00:05 AM	Helium valve opened
8/10/2011	10:00:05 AM	Main Vac valve opened
8/10/2011	10:00:05 AM	Helium MFC set to  20.000000
8/10/2011	10:00:05 AM	H2 MFC set to  0.000000
8/10/2011	10:00:05 AM	BCl3 MFC set to  0.000000
8/10/2011	10:00:05 AM	PHl3 MFC set to  0.000000
8/10/2011	10:00:05 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:00:05 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:00:06 AM	Tube furnace set to 0
8/10/2011	10:00:36 AM	Helium valve closed
8/10/2011	10:00:36 AM	H2 valve closed
8/10/2011	10:00:36 AM	BCl3 valve closed
8/10/2011	10:00:36 AM	PH3 valve closed
8/10/2011	10:00:36 AM	SiCl4 pre valve closed
8/10/2011	10:00:36 AM	SiCl4 post valve closed
8/10/2011	10:00:36 AM	Bypass valve closed
8/10/2011	10:00:36 AM	Bubbler valve closed
8/10/2011	10:00:36 AM	Main Vac valve opened
8/10/2011	10:00:36 AM	Helium MFC set to  0.000000
8/10/2011	10:00:36 AM	H2 MFC set to  0.000000
8/10/2011	10:00:36 AM	BCl3 MFC set to  0.000000
8/10/2011	10:00:36 AM	PHl3 MFC set to  0.000000
8/10/2011	10:00:36 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:00:36 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:00:36 AM	Tube furnace set to 0
8/10/2011	10:01:06 AM	H2 valve closed
8/10/2011	10:01:06 AM	BCl3 valve closed
8/10/2011	10:01:06 AM	PH3 valve closed
8/10/2011	10:01:06 AM	SiCl4 pre valve closed
8/10/2011	10:01:06 AM	SiCl4 post valve closed
8/10/2011	10:01:06 AM	Bypass valve closed
8/10/2011	10:01:06 AM	Bubbler valve closed
8/10/2011	10:01:06 AM	Helium valve opened
8/10/2011	10:01:06 AM	Main Vac valve opened
8/10/2011	10:01:06 AM	Helium MFC set to  20.000000
8/10/2011	10:01:06 AM	H2 MFC set to  0.000000
8/10/2011	10:01:06 AM	BCl3 MFC set to  0.000000
8/10/2011	10:01:06 AM	PHl3 MFC set to  0.000000
8/10/2011	10:01:06 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:01:06 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:01:06 AM	Tube furnace set to 0
8/10/2011	10:01:36 AM	Helium valve closed
8/10/2011	10:01:36 AM	H2 valve closed
8/10/2011	10:01:36 AM	BCl3 valve closed
8/10/2011	10:01:36 AM	PH3 valve closed
8/10/2011	10:01:36 AM	SiCl4 pre valve closed
8/10/2011	10:01:36 AM	SiCl4 post valve closed
8/10/2011	10:01:36 AM	Bypass valve closed
8/10/2011	10:01:36 AM	Bubbler valve closed
8/10/2011	10:01:36 AM	Main Vac valve opened
8/10/2011	10:01:36 AM	Helium MFC set to  0.000000
8/10/2011	10:01:36 AM	H2 MFC set to  0.000000
8/10/2011	10:01:36 AM	BCl3 MFC set to  0.000000
8/10/2011	10:01:36 AM	PHl3 MFC set to  0.000000
8/10/2011	10:01:36 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:01:36 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:01:36 AM	Tube furnace set to 0
8/10/2011	10:02:06 AM	H2 valve closed
8/10/2011	10:02:06 AM	BCl3 valve closed
8/10/2011	10:02:06 AM	PH3 valve closed
8/10/2011	10:02:06 AM	SiCl4 pre valve closed
8/10/2011	10:02:06 AM	SiCl4 post valve closed
8/10/2011	10:02:06 AM	Bypass valve closed
8/10/2011	10:02:06 AM	Bubbler valve closed
8/10/2011	10:02:06 AM	Helium valve opened
8/10/2011	10:02:06 AM	Main Vac valve opened
8/10/2011	10:02:06 AM	Helium MFC set to  20.000000
8/10/2011	10:02:06 AM	H2 MFC set to  0.000000
8/10/2011	10:02:06 AM	BCl3 MFC set to  0.000000
8/10/2011	10:02:06 AM	PHl3 MFC set to  0.000000
8/10/2011	10:02:06 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:02:06 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:02:06 AM	Tube furnace set to 0
8/10/2011	10:02:36 AM	Helium valve closed
8/10/2011	10:02:36 AM	H2 valve closed
8/10/2011	10:02:36 AM	BCl3 valve closed
8/10/2011	10:02:36 AM	PH3 valve closed
8/10/2011	10:02:36 AM	SiCl4 pre valve closed
8/10/2011	10:02:36 AM	SiCl4 post valve closed
8/10/2011	10:02:36 AM	Bypass valve closed
8/10/2011	10:02:36 AM	Bubbler valve closed
8/10/2011	10:02:36 AM	Main Vac valve opened
8/10/2011	10:02:36 AM	Helium MFC set to  0.000000
8/10/2011	10:02:36 AM	H2 MFC set to  0.000000
8/10/2011	10:02:36 AM	BCl3 MFC set to  0.000000
8/10/2011	10:02:36 AM	PHl3 MFC set to  0.000000
8/10/2011	10:02:36 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:02:36 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:02:37 AM	Tube furnace set to 0
8/10/2011	10:03:07 AM	H2 valve closed
8/10/2011	10:03:07 AM	BCl3 valve closed
8/10/2011	10:03:07 AM	PH3 valve closed
8/10/2011	10:03:07 AM	SiCl4 pre valve closed
8/10/2011	10:03:07 AM	SiCl4 post valve closed
8/10/2011	10:03:07 AM	Bypass valve closed
8/10/2011	10:03:07 AM	Bubbler valve closed
8/10/2011	10:03:07 AM	Helium valve opened
8/10/2011	10:03:07 AM	Main Vac valve opened
8/10/2011	10:03:07 AM	Helium MFC set to  20.000000
8/10/2011	10:03:07 AM	H2 MFC set to  0.000000
8/10/2011	10:03:07 AM	BCl3 MFC set to  0.000000
8/10/2011	10:03:07 AM	PHl3 MFC set to  0.000000
8/10/2011	10:03:07 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:03:07 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:03:07 AM	Tube furnace set to 0
8/10/2011	10:03:37 AM	Helium valve closed
8/10/2011	10:03:37 AM	H2 valve closed
8/10/2011	10:03:37 AM	BCl3 valve closed
8/10/2011	10:03:37 AM	PH3 valve closed
8/10/2011	10:03:37 AM	SiCl4 pre valve closed
8/10/2011	10:03:37 AM	SiCl4 post valve closed
8/10/2011	10:03:37 AM	Bypass valve closed
8/10/2011	10:03:37 AM	Bubbler valve closed
8/10/2011	10:03:37 AM	Main Vac valve opened
8/10/2011	10:03:37 AM	Helium MFC set to  0.000000
8/10/2011	10:03:37 AM	H2 MFC set to  0.000000
8/10/2011	10:03:37 AM	BCl3 MFC set to  0.000000
8/10/2011	10:03:37 AM	PHl3 MFC set to  0.000000
8/10/2011	10:03:37 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:03:37 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:03:37 AM	Tube furnace set to 0
8/10/2011	10:04:07 AM	H2 valve closed
8/10/2011	10:04:07 AM	BCl3 valve closed
8/10/2011	10:04:07 AM	PH3 valve closed
8/10/2011	10:04:07 AM	SiCl4 pre valve closed
8/10/2011	10:04:07 AM	SiCl4 post valve closed
8/10/2011	10:04:07 AM	Bypass valve closed
8/10/2011	10:04:07 AM	Bubbler valve closed
8/10/2011	10:04:07 AM	Helium valve opened
8/10/2011	10:04:07 AM	Main Vac valve opened
8/10/2011	10:04:07 AM	Helium MFC set to  20.000000
8/10/2011	10:04:07 AM	H2 MFC set to  0.000000
8/10/2011	10:04:07 AM	BCl3 MFC set to  0.000000
8/10/2011	10:04:07 AM	PHl3 MFC set to  0.000000
8/10/2011	10:04:07 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:04:07 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:04:07 AM	Tube furnace set to 0
8/10/2011	10:04:37 AM	Helium valve closed
8/10/2011	10:04:37 AM	H2 valve closed
8/10/2011	10:04:37 AM	BCl3 valve closed
8/10/2011	10:04:37 AM	PH3 valve closed
8/10/2011	10:04:37 AM	SiCl4 pre valve closed
8/10/2011	10:04:37 AM	SiCl4 post valve closed
8/10/2011	10:04:37 AM	Bypass valve closed
8/10/2011	10:04:37 AM	Bubbler valve closed
8/10/2011	10:04:37 AM	Main Vac valve opened
8/10/2011	10:04:37 AM	Helium MFC set to  0.000000
8/10/2011	10:04:37 AM	H2 MFC set to  0.000000
8/10/2011	10:04:37 AM	BCl3 MFC set to  0.000000
8/10/2011	10:04:37 AM	PHl3 MFC set to  0.000000
8/10/2011	10:04:37 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:04:37 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:04:37 AM	Tube furnace set to 0
8/10/2011	10:05:07 AM	H2 valve closed
8/10/2011	10:05:07 AM	BCl3 valve closed
8/10/2011	10:05:07 AM	PH3 valve closed
8/10/2011	10:05:07 AM	SiCl4 pre valve closed
8/10/2011	10:05:07 AM	SiCl4 post valve closed
8/10/2011	10:05:07 AM	Bypass valve closed
8/10/2011	10:05:07 AM	Bubbler valve closed
8/10/2011	10:05:07 AM	Helium valve opened
8/10/2011	10:05:07 AM	Main Vac valve opened
8/10/2011	10:05:07 AM	Helium MFC set to  20.000000
8/10/2011	10:05:07 AM	H2 MFC set to  0.000000
8/10/2011	10:05:07 AM	BCl3 MFC set to  0.000000
8/10/2011	10:05:07 AM	PHl3 MFC set to  0.000000
8/10/2011	10:05:07 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:05:07 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:05:08 AM	Tube furnace set to 0
8/10/2011	10:05:38 AM	Helium valve closed
8/10/2011	10:05:38 AM	H2 valve closed
8/10/2011	10:05:38 AM	BCl3 valve closed
8/10/2011	10:05:38 AM	PH3 valve closed
8/10/2011	10:05:38 AM	SiCl4 pre valve closed
8/10/2011	10:05:38 AM	SiCl4 post valve closed
8/10/2011	10:05:38 AM	Bypass valve closed
8/10/2011	10:05:38 AM	Bubbler valve closed
8/10/2011	10:05:38 AM	Main Vac valve opened
8/10/2011	10:05:38 AM	Helium MFC set to  0.000000
8/10/2011	10:05:38 AM	H2 MFC set to  0.000000
8/10/2011	10:05:38 AM	BCl3 MFC set to  0.000000
8/10/2011	10:05:38 AM	PHl3 MFC set to  0.000000
8/10/2011	10:05:38 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:05:38 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:05:38 AM	Tube furnace set to 0
8/10/2011	10:06:08 AM	H2 valve closed
8/10/2011	10:06:08 AM	BCl3 valve closed
8/10/2011	10:06:08 AM	PH3 valve closed
8/10/2011	10:06:08 AM	SiCl4 pre valve closed
8/10/2011	10:06:08 AM	SiCl4 post valve closed
8/10/2011	10:06:08 AM	Bypass valve closed
8/10/2011	10:06:08 AM	Bubbler valve closed
8/10/2011	10:06:08 AM	Helium valve opened
8/10/2011	10:06:08 AM	Main Vac valve opened
8/10/2011	10:06:08 AM	Helium MFC set to  20.000000
8/10/2011	10:06:08 AM	H2 MFC set to  0.000000
8/10/2011	10:06:08 AM	BCl3 MFC set to  0.000000
8/10/2011	10:06:08 AM	PHl3 MFC set to  0.000000
8/10/2011	10:06:08 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:06:08 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:06:08 AM	Tube furnace set to 0
8/10/2011	10:06:38 AM	Helium valve closed
8/10/2011	10:06:38 AM	H2 valve closed
8/10/2011	10:06:38 AM	BCl3 valve closed
8/10/2011	10:06:38 AM	PH3 valve closed
8/10/2011	10:06:38 AM	SiCl4 pre valve closed
8/10/2011	10:06:38 AM	SiCl4 post valve closed
8/10/2011	10:06:38 AM	Bypass valve closed
8/10/2011	10:06:38 AM	Bubbler valve closed
8/10/2011	10:06:38 AM	Main Vac valve opened
8/10/2011	10:06:38 AM	Helium MFC set to  0.000000
8/10/2011	10:06:38 AM	H2 MFC set to  0.000000
8/10/2011	10:06:38 AM	BCl3 MFC set to  0.000000
8/10/2011	10:06:38 AM	PHl3 MFC set to  0.000000
8/10/2011	10:06:38 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:06:38 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:06:38 AM	Tube furnace set to 0
8/10/2011	10:07:08 AM	H2 valve closed
8/10/2011	10:07:08 AM	BCl3 valve closed
8/10/2011	10:07:08 AM	PH3 valve closed
8/10/2011	10:07:08 AM	SiCl4 pre valve closed
8/10/2011	10:07:08 AM	SiCl4 post valve closed
8/10/2011	10:07:08 AM	Bypass valve closed
8/10/2011	10:07:08 AM	Bubbler valve closed
8/10/2011	10:07:08 AM	Helium valve opened
8/10/2011	10:07:08 AM	Main Vac valve opened
8/10/2011	10:07:08 AM	Helium MFC set to  20.000000
8/10/2011	10:07:08 AM	H2 MFC set to  0.000000
8/10/2011	10:07:08 AM	BCl3 MFC set to  0.000000
8/10/2011	10:07:08 AM	PHl3 MFC set to  0.000000
8/10/2011	10:07:08 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:07:08 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:07:08 AM	Tube furnace set to 0
8/10/2011	10:07:38 AM	Helium valve closed
8/10/2011	10:07:38 AM	H2 valve closed
8/10/2011	10:07:38 AM	BCl3 valve closed
8/10/2011	10:07:38 AM	PH3 valve closed
8/10/2011	10:07:38 AM	SiCl4 pre valve closed
8/10/2011	10:07:38 AM	SiCl4 post valve closed
8/10/2011	10:07:38 AM	Bypass valve closed
8/10/2011	10:07:38 AM	Bubbler valve closed
8/10/2011	10:07:38 AM	Main Vac valve opened
8/10/2011	10:07:38 AM	Helium MFC set to  0.000000
8/10/2011	10:07:38 AM	H2 MFC set to  0.000000
8/10/2011	10:07:38 AM	BCl3 MFC set to  0.000000
8/10/2011	10:07:38 AM	PHl3 MFC set to  0.000000
8/10/2011	10:07:38 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:07:38 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:07:38 AM	Tube furnace set to 0
8/10/2011	10:07:39 AM	Run finished at 10:07 AM
8/10/2011	10:17:18 AM	Main Vac valve closed
8/10/2011	10:17:30 AM	Main Vac valve opened
8/10/2011	10:17:30 AM	Main Vac valve closed
8/10/2011	10:17:32 AM	Main Vac valve opened
8/10/2011	10:20:40 AM	Recipe started at 10:20 AM
8/10/2011	10:20:40 AM	Helium valve closed
8/10/2011	10:20:41 AM	H2 valve closed
8/10/2011	10:20:41 AM	BCl3 valve closed
8/10/2011	10:20:41 AM	PH3 valve closed
8/10/2011	10:20:41 AM	SiCl4 pre valve closed
8/10/2011	10:20:41 AM	SiCl4 post valve closed
8/10/2011	10:20:41 AM	Main Vac valve closed
8/10/2011	10:20:41 AM	Bypass valve closed
8/10/2011	10:20:41 AM	Bubbler valve closed
8/10/2011	10:20:41 AM	Helium MFC set to  0.000000
8/10/2011	10:20:41 AM	H2 MFC set to  0.000000
8/10/2011	10:20:41 AM	BCl3 MFC set to  0.000000
8/10/2011	10:20:41 AM	PHl3 MFC set to  0.000000
8/10/2011	10:20:41 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:20:41 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:20:41 AM	Tube furnace set to 0
8/10/2011	10:20:44 AM	Helium valve closed
8/10/2011	10:20:44 AM	BCl3 valve closed
8/10/2011	10:20:44 AM	PH3 valve closed
8/10/2011	10:20:44 AM	SiCl4 pre valve closed
8/10/2011	10:20:44 AM	SiCl4 post valve closed
8/10/2011	10:20:44 AM	Main Vac valve closed
8/10/2011	10:20:44 AM	Bypass valve closed
8/10/2011	10:20:44 AM	Bubbler valve closed
8/10/2011	10:20:44 AM	H2 valve opened
8/10/2011	10:20:44 AM	Helium MFC set to  0.000000
8/10/2011	10:20:44 AM	H2 MFC set to  500.000000
8/10/2011	10:20:44 AM	BCl3 MFC set to  0.000000
8/10/2011	10:20:44 AM	PHl3 MFC set to  0.000000
8/10/2011	10:20:44 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:20:44 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:20:44 AM	Tube furnace set to 0
8/10/2011	10:21:49 AM	Helium valve closed
8/10/2011	10:21:49 AM	BCl3 valve closed
8/10/2011	10:21:49 AM	PH3 valve closed
8/10/2011	10:21:49 AM	SiCl4 pre valve closed
8/10/2011	10:21:49 AM	SiCl4 post valve closed
8/10/2011	10:21:49 AM	Main Vac valve closed
8/10/2011	10:21:49 AM	Bypass valve closed
8/10/2011	10:21:49 AM	H2 valve opened
8/10/2011	10:21:49 AM	Bubbler valve opened
8/10/2011	10:21:49 AM	Helium MFC set to  0.000000
8/10/2011	10:21:49 AM	H2 MFC set to  500.000000
8/10/2011	10:21:49 AM	BCl3 MFC set to  0.000000
8/10/2011	10:21:49 AM	PHl3 MFC set to  0.000000
8/10/2011	10:21:49 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:21:49 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:21:49 AM	Tube furnace set to 0
8/10/2011	10:21:50 AM	Helium valve closed
8/10/2011	10:21:50 AM	BCl3 valve closed
8/10/2011	10:21:50 AM	PH3 valve closed
8/10/2011	10:21:50 AM	SiCl4 pre valve closed
8/10/2011	10:21:50 AM	SiCl4 post valve closed
8/10/2011	10:21:50 AM	Main Vac valve closed
8/10/2011	10:21:50 AM	Bypass valve closed
8/10/2011	10:21:50 AM	H2 valve opened
8/10/2011	10:21:50 AM	Bubbler valve opened
8/10/2011	10:21:50 AM	Helium MFC set to  0.000000
8/10/2011	10:21:50 AM	H2 MFC set to  500.000000
8/10/2011	10:21:50 AM	BCl3 MFC set to  0.000000
8/10/2011	10:21:50 AM	PHl3 MFC set to  0.000000
8/10/2011	10:21:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:21:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:21:50 AM	Tube furnace set to 1000
8/10/2011	10:41:50 AM	Helium valve closed
8/10/2011	10:41:50 AM	PH3 valve closed
8/10/2011	10:41:50 AM	Main Vac valve closed
8/10/2011	10:41:50 AM	Bypass valve closed
8/10/2011	10:41:50 AM	H2 valve opened
8/10/2011	10:41:50 AM	BCl3 valve opened
8/10/2011	10:41:50 AM	SiCl4 pre valve opened
8/10/2011	10:41:50 AM	SiCl4 post valve opened
8/10/2011	10:41:50 AM	Bubbler valve opened
8/10/2011	10:41:50 AM	Helium MFC set to  0.000000
8/10/2011	10:41:50 AM	H2 MFC set to  440.000000
8/10/2011	10:41:50 AM	BCl3 MFC set to  60.000000
8/10/2011	10:41:50 AM	PHl3 MFC set to  0.000000
8/10/2011	10:41:50 AM	SiCl4 MFC set to  50.000000
8/10/2011	10:41:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:41:50 AM	Tube furnace set to 1000
8/10/2011	10:55:50 AM	Helium valve closed
8/10/2011	10:55:50 AM	BCl3 valve closed
8/10/2011	10:55:50 AM	PH3 valve closed
8/10/2011	10:55:50 AM	SiCl4 pre valve closed
8/10/2011	10:55:50 AM	SiCl4 post valve closed
8/10/2011	10:55:50 AM	Main Vac valve closed
8/10/2011	10:55:50 AM	Bypass valve closed
8/10/2011	10:55:50 AM	H2 valve opened
8/10/2011	10:55:50 AM	Bubbler valve opened
8/10/2011	10:55:50 AM	Helium MFC set to  0.000000
8/10/2011	10:55:50 AM	H2 MFC set to  500.000000
8/10/2011	10:55:50 AM	BCl3 MFC set to  0.000000
8/10/2011	10:55:50 AM	PHl3 MFC set to  0.000000
8/10/2011	10:55:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	10:55:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:55:50 AM	Tube furnace set to 750
8/10/2011	11:00:50 AM	H2 valve closed
8/10/2011	11:00:50 AM	BCl3 valve closed
8/10/2011	11:00:50 AM	PH3 valve closed
8/10/2011	11:00:50 AM	SiCl4 pre valve closed
8/10/2011	11:00:50 AM	SiCl4 post valve closed
8/10/2011	11:00:50 AM	Main Vac valve closed
8/10/2011	11:00:50 AM	Bypass valve closed
8/10/2011	11:00:50 AM	Helium valve opened
8/10/2011	11:00:50 AM	Bubbler valve opened
8/10/2011	11:00:50 AM	Helium MFC set to  500.000000
8/10/2011	11:00:50 AM	H2 MFC set to  0.000000
8/10/2011	11:00:50 AM	BCl3 MFC set to  0.000000
8/10/2011	11:00:50 AM	PHl3 MFC set to  0.000000
8/10/2011	11:00:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:00:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:00:51 AM	Tube furnace set to 0
8/10/2011	11:20:50 AM	Helium valve closed
8/10/2011	11:20:50 AM	H2 valve closed
8/10/2011	11:20:50 AM	BCl3 valve closed
8/10/2011	11:20:50 AM	PH3 valve closed
8/10/2011	11:20:50 AM	SiCl4 pre valve closed
8/10/2011	11:20:50 AM	SiCl4 post valve closed
8/10/2011	11:20:50 AM	Main Vac valve closed
8/10/2011	11:20:50 AM	Bypass valve closed
8/10/2011	11:20:50 AM	Bubbler valve closed
8/10/2011	11:20:50 AM	Helium MFC set to  0.000000
8/10/2011	11:20:50 AM	H2 MFC set to  0.000000
8/10/2011	11:20:50 AM	BCl3 MFC set to  0.000000
8/10/2011	11:20:50 AM	PHl3 MFC set to  0.000000
8/10/2011	11:20:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:20:51 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:20:51 AM	Tube furnace set to 0
8/10/2011	11:20:52 AM	Run finished at 11:20 AM
8/10/2011	11:38:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	11:38:02 AM	Recipe started at 11:38 AM
8/10/2011	11:38:02 AM	Helium valve closed
8/10/2011	11:38:02 AM	H2 valve closed
8/10/2011	11:38:02 AM	BCl3 valve closed
8/10/2011	11:38:02 AM	PH3 valve closed
8/10/2011	11:38:02 AM	SiCl4 pre valve closed
8/10/2011	11:38:02 AM	SiCl4 post valve closed
8/10/2011	11:38:02 AM	Main Vac valve closed
8/10/2011	11:38:02 AM	Bypass valve closed
8/10/2011	11:38:02 AM	Bubbler valve closed
8/10/2011	11:38:02 AM	Helium MFC set to  0.000000
8/10/2011	11:38:02 AM	H2 MFC set to  0.000000
8/10/2011	11:38:02 AM	BCl3 MFC set to  0.000000
8/10/2011	11:38:02 AM	PHl3 MFC set to  0.000000
8/10/2011	11:38:02 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:38:02 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:38:02 AM	Tube furnace set to 0
8/10/2011	11:38:05 AM	H2 valve closed
8/10/2011	11:38:05 AM	BCl3 valve closed
8/10/2011	11:38:05 AM	PH3 valve closed
8/10/2011	11:38:05 AM	SiCl4 pre valve closed
8/10/2011	11:38:05 AM	SiCl4 post valve closed
8/10/2011	11:38:05 AM	Main Vac valve closed
8/10/2011	11:38:05 AM	Bypass valve closed
8/10/2011	11:38:05 AM	Bubbler valve closed
8/10/2011	11:38:05 AM	Helium valve opened
8/10/2011	11:38:05 AM	Helium MFC set to  500.000000
8/10/2011	11:38:05 AM	H2 MFC set to  0.000000
8/10/2011	11:38:05 AM	BCl3 MFC set to  0.000000
8/10/2011	11:38:05 AM	PHl3 MFC set to  0.000000
8/10/2011	11:38:05 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:38:05 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:38:05 AM	Tube furnace set to 0
8/10/2011	11:38:11 AM	Helium valve closed
8/10/2011	11:38:11 AM	H2 valve closed
8/10/2011	11:38:11 AM	BCl3 valve closed
8/10/2011	11:38:11 AM	PH3 valve closed
8/10/2011	11:38:11 AM	SiCl4 pre valve closed
8/10/2011	11:38:11 AM	SiCl4 post valve closed
8/10/2011	11:38:11 AM	Main Vac valve closed
8/10/2011	11:38:11 AM	Bypass valve closed
8/10/2011	11:38:11 AM	Bubbler valve closed
8/10/2011	11:38:11 AM	Helium MFC set to  0.000000
8/10/2011	11:38:11 AM	H2 MFC set to  0.000000
8/10/2011	11:38:11 AM	BCl3 MFC set to  0.000000
8/10/2011	11:38:11 AM	PHl3 MFC set to  0.000000
8/10/2011	11:38:11 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:38:11 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:38:11 AM	Tube furnace set to 0
8/10/2011	11:38:12 AM	Run finished at 11:38 AM
8/10/2011	11:38:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	11:42:50 AM	Recipe started at 11:42 AM
8/10/2011	11:42:50 AM	Helium valve closed
8/10/2011	11:42:50 AM	H2 valve closed
8/10/2011	11:42:50 AM	BCl3 valve closed
8/10/2011	11:42:50 AM	PH3 valve closed
8/10/2011	11:42:50 AM	SiCl4 pre valve closed
8/10/2011	11:42:50 AM	SiCl4 post valve closed
8/10/2011	11:42:50 AM	Main Vac valve closed
8/10/2011	11:42:50 AM	Bubbler valve closed
8/10/2011	11:42:50 AM	Bypass valve opened
8/10/2011	11:42:50 AM	Helium MFC set to  0.000000
8/10/2011	11:42:50 AM	H2 MFC set to  0.000000
8/10/2011	11:42:50 AM	BCl3 MFC set to  0.000000
8/10/2011	11:42:50 AM	PHl3 MFC set to  0.000000
8/10/2011	11:42:50 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:42:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:42:50 AM	Tube furnace set to 0
8/10/2011	11:43:55 AM	Helium valve closed
8/10/2011	11:43:55 AM	H2 valve closed
8/10/2011	11:43:55 AM	BCl3 valve closed
8/10/2011	11:43:55 AM	PH3 valve closed
8/10/2011	11:43:55 AM	SiCl4 pre valve closed
8/10/2011	11:43:55 AM	SiCl4 post valve closed
8/10/2011	11:43:55 AM	Main Vac valve closed
8/10/2011	11:43:55 AM	Bubbler valve closed
8/10/2011	11:43:55 AM	Bypass valve opened
8/10/2011	11:43:55 AM	Helium MFC set to  0.000000
8/10/2011	11:43:55 AM	H2 MFC set to  0.000000
8/10/2011	11:43:55 AM	BCl3 MFC set to  0.000000
8/10/2011	11:43:55 AM	PHl3 MFC set to  0.000000
8/10/2011	11:43:55 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:43:55 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:43:55 AM	Tube furnace set to 0
8/10/2011	11:44:25 AM	Helium valve closed
8/10/2011	11:44:25 AM	H2 valve closed
8/10/2011	11:44:25 AM	BCl3 valve closed
8/10/2011	11:44:25 AM	PH3 valve closed
8/10/2011	11:44:25 AM	SiCl4 pre valve closed
8/10/2011	11:44:25 AM	SiCl4 post valve closed
8/10/2011	11:44:25 AM	Bypass valve closed
8/10/2011	11:44:25 AM	Bubbler valve closed
8/10/2011	11:44:25 AM	Main Vac valve opened
8/10/2011	11:44:25 AM	Helium MFC set to  0.000000
8/10/2011	11:44:25 AM	H2 MFC set to  0.000000
8/10/2011	11:44:25 AM	BCl3 MFC set to  0.000000
8/10/2011	11:44:25 AM	PHl3 MFC set to  0.000000
8/10/2011	11:44:25 AM	SiCl4 MFC set to  0.000000
8/10/2011	11:44:25 AM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:44:25 AM	Tube furnace set to 0
8/10/2011	12:14:25 PM	H2 valve closed
8/10/2011	12:14:25 PM	BCl3 valve closed
8/10/2011	12:14:25 PM	PH3 valve closed
8/10/2011	12:14:25 PM	SiCl4 pre valve closed
8/10/2011	12:14:25 PM	SiCl4 post valve closed
8/10/2011	12:14:25 PM	Bypass valve closed
8/10/2011	12:14:25 PM	Bubbler valve closed
8/10/2011	12:14:25 PM	Helium valve opened
8/10/2011	12:14:25 PM	Main Vac valve opened
8/10/2011	12:14:25 PM	Helium MFC set to  20.000000
8/10/2011	12:14:25 PM	H2 MFC set to  0.000000
8/10/2011	12:14:25 PM	BCl3 MFC set to  0.000000
8/10/2011	12:14:25 PM	PHl3 MFC set to  0.000000
8/10/2011	12:14:25 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:14:25 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:14:25 PM	Tube furnace set to 0
8/10/2011	12:14:55 PM	Helium valve closed
8/10/2011	12:14:55 PM	H2 valve closed
8/10/2011	12:14:55 PM	BCl3 valve closed
8/10/2011	12:14:55 PM	PH3 valve closed
8/10/2011	12:14:55 PM	SiCl4 pre valve closed
8/10/2011	12:14:55 PM	SiCl4 post valve closed
8/10/2011	12:14:55 PM	Bypass valve closed
8/10/2011	12:14:55 PM	Bubbler valve closed
8/10/2011	12:14:55 PM	Main Vac valve opened
8/10/2011	12:14:55 PM	Helium MFC set to  0.000000
8/10/2011	12:14:55 PM	H2 MFC set to  0.000000
8/10/2011	12:14:55 PM	BCl3 MFC set to  0.000000
8/10/2011	12:14:55 PM	PHl3 MFC set to  0.000000
8/10/2011	12:14:55 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:14:55 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:14:56 PM	Tube furnace set to 0
8/10/2011	12:15:26 PM	H2 valve closed
8/10/2011	12:15:26 PM	BCl3 valve closed
8/10/2011	12:15:26 PM	PH3 valve closed
8/10/2011	12:15:26 PM	SiCl4 pre valve closed
8/10/2011	12:15:26 PM	SiCl4 post valve closed
8/10/2011	12:15:26 PM	Bypass valve closed
8/10/2011	12:15:26 PM	Bubbler valve closed
8/10/2011	12:15:26 PM	Helium valve opened
8/10/2011	12:15:26 PM	Main Vac valve opened
8/10/2011	12:15:26 PM	Helium MFC set to  20.000000
8/10/2011	12:15:26 PM	H2 MFC set to  0.000000
8/10/2011	12:15:26 PM	BCl3 MFC set to  0.000000
8/10/2011	12:15:26 PM	PHl3 MFC set to  0.000000
8/10/2011	12:15:26 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:15:26 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:15:26 PM	Tube furnace set to 0
8/10/2011	12:15:56 PM	Helium valve closed
8/10/2011	12:15:56 PM	H2 valve closed
8/10/2011	12:15:56 PM	BCl3 valve closed
8/10/2011	12:15:56 PM	PH3 valve closed
8/10/2011	12:15:56 PM	SiCl4 pre valve closed
8/10/2011	12:15:56 PM	SiCl4 post valve closed
8/10/2011	12:15:56 PM	Bypass valve closed
8/10/2011	12:15:56 PM	Bubbler valve closed
8/10/2011	12:15:56 PM	Main Vac valve opened
8/10/2011	12:15:56 PM	Helium MFC set to  0.000000
8/10/2011	12:15:56 PM	H2 MFC set to  0.000000
8/10/2011	12:15:56 PM	BCl3 MFC set to  0.000000
8/10/2011	12:15:56 PM	PHl3 MFC set to  0.000000
8/10/2011	12:15:56 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:15:56 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:15:56 PM	Tube furnace set to 0
8/10/2011	12:16:26 PM	H2 valve closed
8/10/2011	12:16:26 PM	BCl3 valve closed
8/10/2011	12:16:26 PM	PH3 valve closed
8/10/2011	12:16:26 PM	SiCl4 pre valve closed
8/10/2011	12:16:26 PM	SiCl4 post valve closed
8/10/2011	12:16:26 PM	Bypass valve closed
8/10/2011	12:16:26 PM	Bubbler valve closed
8/10/2011	12:16:26 PM	Helium valve opened
8/10/2011	12:16:26 PM	Main Vac valve opened
8/10/2011	12:16:26 PM	Helium MFC set to  20.000000
8/10/2011	12:16:26 PM	H2 MFC set to  0.000000
8/10/2011	12:16:26 PM	BCl3 MFC set to  0.000000
8/10/2011	12:16:26 PM	PHl3 MFC set to  0.000000
8/10/2011	12:16:26 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:16:26 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:16:26 PM	Tube furnace set to 0
8/10/2011	12:16:56 PM	Helium valve closed
8/10/2011	12:16:56 PM	H2 valve closed
8/10/2011	12:16:56 PM	BCl3 valve closed
8/10/2011	12:16:56 PM	PH3 valve closed
8/10/2011	12:16:56 PM	SiCl4 pre valve closed
8/10/2011	12:16:56 PM	SiCl4 post valve closed
8/10/2011	12:16:56 PM	Bypass valve closed
8/10/2011	12:16:56 PM	Bubbler valve closed
8/10/2011	12:16:56 PM	Main Vac valve opened
8/10/2011	12:16:56 PM	Helium MFC set to  0.000000
8/10/2011	12:16:56 PM	H2 MFC set to  0.000000
8/10/2011	12:16:56 PM	BCl3 MFC set to  0.000000
8/10/2011	12:16:56 PM	PHl3 MFC set to  0.000000
8/10/2011	12:16:56 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:16:56 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:16:56 PM	Tube furnace set to 0
8/10/2011	12:17:26 PM	H2 valve closed
8/10/2011	12:17:26 PM	BCl3 valve closed
8/10/2011	12:17:26 PM	PH3 valve closed
8/10/2011	12:17:26 PM	SiCl4 pre valve closed
8/10/2011	12:17:26 PM	SiCl4 post valve closed
8/10/2011	12:17:26 PM	Bypass valve closed
8/10/2011	12:17:26 PM	Bubbler valve closed
8/10/2011	12:17:26 PM	Helium valve opened
8/10/2011	12:17:26 PM	Main Vac valve opened
8/10/2011	12:17:26 PM	Helium MFC set to  20.000000
8/10/2011	12:17:26 PM	H2 MFC set to  0.000000
8/10/2011	12:17:26 PM	BCl3 MFC set to  0.000000
8/10/2011	12:17:26 PM	PHl3 MFC set to  0.000000
8/10/2011	12:17:26 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:17:26 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:17:27 PM	Tube furnace set to 0
8/10/2011	12:17:57 PM	Helium valve closed
8/10/2011	12:17:57 PM	H2 valve closed
8/10/2011	12:17:57 PM	BCl3 valve closed
8/10/2011	12:17:57 PM	PH3 valve closed
8/10/2011	12:17:57 PM	SiCl4 pre valve closed
8/10/2011	12:17:57 PM	SiCl4 post valve closed
8/10/2011	12:17:57 PM	Bypass valve closed
8/10/2011	12:17:57 PM	Bubbler valve closed
8/10/2011	12:17:57 PM	Main Vac valve opened
8/10/2011	12:17:57 PM	Helium MFC set to  0.000000
8/10/2011	12:17:57 PM	H2 MFC set to  0.000000
8/10/2011	12:17:57 PM	BCl3 MFC set to  0.000000
8/10/2011	12:17:57 PM	PHl3 MFC set to  0.000000
8/10/2011	12:17:57 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:17:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:17:57 PM	Tube furnace set to 0
8/10/2011	12:18:27 PM	H2 valve closed
8/10/2011	12:18:27 PM	BCl3 valve closed
8/10/2011	12:18:27 PM	PH3 valve closed
8/10/2011	12:18:27 PM	SiCl4 pre valve closed
8/10/2011	12:18:27 PM	SiCl4 post valve closed
8/10/2011	12:18:27 PM	Bypass valve closed
8/10/2011	12:18:27 PM	Bubbler valve closed
8/10/2011	12:18:27 PM	Helium valve opened
8/10/2011	12:18:27 PM	Main Vac valve opened
8/10/2011	12:18:27 PM	Helium MFC set to  20.000000
8/10/2011	12:18:27 PM	H2 MFC set to  0.000000
8/10/2011	12:18:27 PM	BCl3 MFC set to  0.000000
8/10/2011	12:18:27 PM	PHl3 MFC set to  0.000000
8/10/2011	12:18:27 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:18:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:18:27 PM	Tube furnace set to 0
8/10/2011	12:18:57 PM	Helium valve closed
8/10/2011	12:18:57 PM	H2 valve closed
8/10/2011	12:18:57 PM	BCl3 valve closed
8/10/2011	12:18:57 PM	PH3 valve closed
8/10/2011	12:18:57 PM	SiCl4 pre valve closed
8/10/2011	12:18:57 PM	SiCl4 post valve closed
8/10/2011	12:18:57 PM	Bypass valve closed
8/10/2011	12:18:57 PM	Bubbler valve closed
8/10/2011	12:18:57 PM	Main Vac valve opened
8/10/2011	12:18:57 PM	Helium MFC set to  0.000000
8/10/2011	12:18:57 PM	H2 MFC set to  0.000000
8/10/2011	12:18:57 PM	BCl3 MFC set to  0.000000
8/10/2011	12:18:57 PM	PHl3 MFC set to  0.000000
8/10/2011	12:18:57 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:18:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:18:57 PM	Tube furnace set to 0
8/10/2011	12:19:27 PM	H2 valve closed
8/10/2011	12:19:27 PM	BCl3 valve closed
8/10/2011	12:19:27 PM	PH3 valve closed
8/10/2011	12:19:27 PM	SiCl4 pre valve closed
8/10/2011	12:19:27 PM	SiCl4 post valve closed
8/10/2011	12:19:27 PM	Bypass valve closed
8/10/2011	12:19:27 PM	Bubbler valve closed
8/10/2011	12:19:27 PM	Helium valve opened
8/10/2011	12:19:27 PM	Main Vac valve opened
8/10/2011	12:19:27 PM	Helium MFC set to  20.000000
8/10/2011	12:19:27 PM	H2 MFC set to  0.000000
8/10/2011	12:19:27 PM	BCl3 MFC set to  0.000000
8/10/2011	12:19:27 PM	PHl3 MFC set to  0.000000
8/10/2011	12:19:27 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:19:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:19:27 PM	Tube furnace set to 0
8/10/2011	12:19:57 PM	Helium valve closed
8/10/2011	12:19:57 PM	H2 valve closed
8/10/2011	12:19:57 PM	BCl3 valve closed
8/10/2011	12:19:57 PM	PH3 valve closed
8/10/2011	12:19:57 PM	SiCl4 pre valve closed
8/10/2011	12:19:57 PM	SiCl4 post valve closed
8/10/2011	12:19:57 PM	Bypass valve closed
8/10/2011	12:19:57 PM	Bubbler valve closed
8/10/2011	12:19:57 PM	Main Vac valve opened
8/10/2011	12:19:57 PM	Helium MFC set to  0.000000
8/10/2011	12:19:57 PM	H2 MFC set to  0.000000
8/10/2011	12:19:57 PM	BCl3 MFC set to  0.000000
8/10/2011	12:19:57 PM	PHl3 MFC set to  0.000000
8/10/2011	12:19:57 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:19:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:19:58 PM	Tube furnace set to 0
8/10/2011	12:20:28 PM	H2 valve closed
8/10/2011	12:20:28 PM	BCl3 valve closed
8/10/2011	12:20:28 PM	PH3 valve closed
8/10/2011	12:20:28 PM	SiCl4 pre valve closed
8/10/2011	12:20:28 PM	SiCl4 post valve closed
8/10/2011	12:20:28 PM	Bypass valve closed
8/10/2011	12:20:28 PM	Bubbler valve closed
8/10/2011	12:20:28 PM	Helium valve opened
8/10/2011	12:20:28 PM	Main Vac valve opened
8/10/2011	12:20:28 PM	Helium MFC set to  20.000000
8/10/2011	12:20:28 PM	H2 MFC set to  0.000000
8/10/2011	12:20:28 PM	BCl3 MFC set to  0.000000
8/10/2011	12:20:28 PM	PHl3 MFC set to  0.000000
8/10/2011	12:20:28 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:20:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:20:28 PM	Tube furnace set to 0
8/10/2011	12:20:58 PM	Helium valve closed
8/10/2011	12:20:58 PM	H2 valve closed
8/10/2011	12:20:58 PM	BCl3 valve closed
8/10/2011	12:20:58 PM	PH3 valve closed
8/10/2011	12:20:58 PM	SiCl4 pre valve closed
8/10/2011	12:20:58 PM	SiCl4 post valve closed
8/10/2011	12:20:58 PM	Bypass valve closed
8/10/2011	12:20:58 PM	Bubbler valve closed
8/10/2011	12:20:58 PM	Main Vac valve opened
8/10/2011	12:20:58 PM	Helium MFC set to  0.000000
8/10/2011	12:20:58 PM	H2 MFC set to  0.000000
8/10/2011	12:20:58 PM	BCl3 MFC set to  0.000000
8/10/2011	12:20:58 PM	PHl3 MFC set to  0.000000
8/10/2011	12:20:58 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:20:58 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:20:58 PM	Tube furnace set to 0
8/10/2011	12:21:28 PM	H2 valve closed
8/10/2011	12:21:28 PM	BCl3 valve closed
8/10/2011	12:21:28 PM	PH3 valve closed
8/10/2011	12:21:28 PM	SiCl4 pre valve closed
8/10/2011	12:21:28 PM	SiCl4 post valve closed
8/10/2011	12:21:28 PM	Bypass valve closed
8/10/2011	12:21:28 PM	Bubbler valve closed
8/10/2011	12:21:28 PM	Helium valve opened
8/10/2011	12:21:28 PM	Main Vac valve opened
8/10/2011	12:21:28 PM	Helium MFC set to  20.000000
8/10/2011	12:21:28 PM	H2 MFC set to  0.000000
8/10/2011	12:21:28 PM	BCl3 MFC set to  0.000000
8/10/2011	12:21:28 PM	PHl3 MFC set to  0.000000
8/10/2011	12:21:28 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:21:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:21:28 PM	Tube furnace set to 0
8/10/2011	12:21:58 PM	Helium valve closed
8/10/2011	12:21:58 PM	H2 valve closed
8/10/2011	12:21:58 PM	BCl3 valve closed
8/10/2011	12:21:58 PM	PH3 valve closed
8/10/2011	12:21:58 PM	SiCl4 pre valve closed
8/10/2011	12:21:58 PM	SiCl4 post valve closed
8/10/2011	12:21:58 PM	Bypass valve closed
8/10/2011	12:21:58 PM	Bubbler valve closed
8/10/2011	12:21:58 PM	Main Vac valve opened
8/10/2011	12:21:58 PM	Helium MFC set to  0.000000
8/10/2011	12:21:58 PM	H2 MFC set to  0.000000
8/10/2011	12:21:58 PM	BCl3 MFC set to  0.000000
8/10/2011	12:21:58 PM	PHl3 MFC set to  0.000000
8/10/2011	12:21:58 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:21:58 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:21:58 PM	Tube furnace set to 0
8/10/2011	12:22:28 PM	H2 valve closed
8/10/2011	12:22:28 PM	BCl3 valve closed
8/10/2011	12:22:28 PM	PH3 valve closed
8/10/2011	12:22:28 PM	SiCl4 pre valve closed
8/10/2011	12:22:28 PM	SiCl4 post valve closed
8/10/2011	12:22:28 PM	Bypass valve closed
8/10/2011	12:22:28 PM	Bubbler valve closed
8/10/2011	12:22:28 PM	Helium valve opened
8/10/2011	12:22:28 PM	Main Vac valve opened
8/10/2011	12:22:28 PM	Helium MFC set to  20.000000
8/10/2011	12:22:28 PM	H2 MFC set to  0.000000
8/10/2011	12:22:28 PM	BCl3 MFC set to  0.000000
8/10/2011	12:22:28 PM	PHl3 MFC set to  0.000000
8/10/2011	12:22:28 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:22:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:22:29 PM	Tube furnace set to 0
8/10/2011	12:22:59 PM	Helium valve closed
8/10/2011	12:22:59 PM	H2 valve closed
8/10/2011	12:22:59 PM	BCl3 valve closed
8/10/2011	12:22:59 PM	PH3 valve closed
8/10/2011	12:22:59 PM	SiCl4 pre valve closed
8/10/2011	12:22:59 PM	SiCl4 post valve closed
8/10/2011	12:22:59 PM	Bypass valve closed
8/10/2011	12:22:59 PM	Bubbler valve closed
8/10/2011	12:22:59 PM	Main Vac valve opened
8/10/2011	12:22:59 PM	Helium MFC set to  0.000000
8/10/2011	12:22:59 PM	H2 MFC set to  0.000000
8/10/2011	12:22:59 PM	BCl3 MFC set to  0.000000
8/10/2011	12:22:59 PM	PHl3 MFC set to  0.000000
8/10/2011	12:22:59 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:22:59 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:22:59 PM	Tube furnace set to 0
8/10/2011	12:23:29 PM	H2 valve closed
8/10/2011	12:23:29 PM	BCl3 valve closed
8/10/2011	12:23:29 PM	PH3 valve closed
8/10/2011	12:23:29 PM	SiCl4 pre valve closed
8/10/2011	12:23:29 PM	SiCl4 post valve closed
8/10/2011	12:23:29 PM	Bypass valve closed
8/10/2011	12:23:29 PM	Bubbler valve closed
8/10/2011	12:23:29 PM	Helium valve opened
8/10/2011	12:23:29 PM	Main Vac valve opened
8/10/2011	12:23:29 PM	Helium MFC set to  20.000000
8/10/2011	12:23:29 PM	H2 MFC set to  0.000000
8/10/2011	12:23:29 PM	BCl3 MFC set to  0.000000
8/10/2011	12:23:29 PM	PHl3 MFC set to  0.000000
8/10/2011	12:23:29 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:23:29 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:23:29 PM	Tube furnace set to 0
8/10/2011	12:23:59 PM	Helium valve closed
8/10/2011	12:23:59 PM	H2 valve closed
8/10/2011	12:23:59 PM	BCl3 valve closed
8/10/2011	12:23:59 PM	PH3 valve closed
8/10/2011	12:23:59 PM	SiCl4 pre valve closed
8/10/2011	12:23:59 PM	SiCl4 post valve closed
8/10/2011	12:23:59 PM	Bypass valve closed
8/10/2011	12:23:59 PM	Bubbler valve closed
8/10/2011	12:23:59 PM	Main Vac valve opened
8/10/2011	12:23:59 PM	Helium MFC set to  0.000000
8/10/2011	12:23:59 PM	H2 MFC set to  0.000000
8/10/2011	12:23:59 PM	BCl3 MFC set to  0.000000
8/10/2011	12:23:59 PM	PHl3 MFC set to  0.000000
8/10/2011	12:23:59 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:23:59 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:23:59 PM	Tube furnace set to 0
8/10/2011	12:24:00 PM	Run finished at 12:24 PM
8/10/2011	12:32:45 PM	Main Vac valve closed
8/10/2011	12:32:56 PM	Main Vac valve opened
8/10/2011	12:33:14 PM	Recipe started at 12:33 PM
8/10/2011	12:33:14 PM	Helium valve closed
8/10/2011	12:33:14 PM	H2 valve closed
8/10/2011	12:33:14 PM	BCl3 valve closed
8/10/2011	12:33:14 PM	PH3 valve closed
8/10/2011	12:33:14 PM	SiCl4 pre valve closed
8/10/2011	12:33:14 PM	SiCl4 post valve closed
8/10/2011	12:33:14 PM	Main Vac valve closed
8/10/2011	12:33:14 PM	Bypass valve closed
8/10/2011	12:33:14 PM	Bubbler valve closed
8/10/2011	12:33:14 PM	Helium MFC set to  0.000000
8/10/2011	12:33:14 PM	H2 MFC set to  0.000000
8/10/2011	12:33:14 PM	BCl3 MFC set to  0.000000
8/10/2011	12:33:14 PM	PHl3 MFC set to  0.000000
8/10/2011	12:33:14 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:33:14 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:33:14 PM	Tube furnace set to 0
8/10/2011	12:33:17 PM	Helium valve closed
8/10/2011	12:33:17 PM	BCl3 valve closed
8/10/2011	12:33:17 PM	PH3 valve closed
8/10/2011	12:33:17 PM	SiCl4 pre valve closed
8/10/2011	12:33:17 PM	SiCl4 post valve closed
8/10/2011	12:33:17 PM	Main Vac valve closed
8/10/2011	12:33:17 PM	Bypass valve closed
8/10/2011	12:33:17 PM	Bubbler valve closed
8/10/2011	12:33:17 PM	H2 valve opened
8/10/2011	12:33:17 PM	Helium MFC set to  0.000000
8/10/2011	12:33:17 PM	H2 MFC set to  500.000000
8/10/2011	12:33:17 PM	BCl3 MFC set to  0.000000
8/10/2011	12:33:17 PM	PHl3 MFC set to  0.000000
8/10/2011	12:33:17 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:33:17 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:33:18 PM	Tube furnace set to 0
8/10/2011	12:34:22 PM	Helium valve closed
8/10/2011	12:34:22 PM	BCl3 valve closed
8/10/2011	12:34:22 PM	PH3 valve closed
8/10/2011	12:34:22 PM	SiCl4 pre valve closed
8/10/2011	12:34:22 PM	SiCl4 post valve closed
8/10/2011	12:34:22 PM	Main Vac valve closed
8/10/2011	12:34:22 PM	Bypass valve closed
8/10/2011	12:34:22 PM	H2 valve opened
8/10/2011	12:34:22 PM	Bubbler valve opened
8/10/2011	12:34:22 PM	Helium MFC set to  0.000000
8/10/2011	12:34:22 PM	H2 MFC set to  500.000000
8/10/2011	12:34:22 PM	BCl3 MFC set to  0.000000
8/10/2011	12:34:22 PM	PHl3 MFC set to  0.000000
8/10/2011	12:34:22 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:34:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:34:22 PM	Tube furnace set to 0
8/10/2011	12:34:23 PM	Helium valve closed
8/10/2011	12:34:23 PM	BCl3 valve closed
8/10/2011	12:34:23 PM	PH3 valve closed
8/10/2011	12:34:23 PM	SiCl4 pre valve closed
8/10/2011	12:34:23 PM	SiCl4 post valve closed
8/10/2011	12:34:23 PM	Main Vac valve closed
8/10/2011	12:34:23 PM	Bypass valve closed
8/10/2011	12:34:23 PM	H2 valve opened
8/10/2011	12:34:23 PM	Bubbler valve opened
8/10/2011	12:34:23 PM	Helium MFC set to  0.000000
8/10/2011	12:34:23 PM	H2 MFC set to  500.000000
8/10/2011	12:34:23 PM	BCl3 MFC set to  0.000000
8/10/2011	12:34:23 PM	PHl3 MFC set to  0.000000
8/10/2011	12:34:23 PM	SiCl4 MFC set to  0.000000
8/10/2011	12:34:23 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:34:23 PM	Tube furnace set to 1000
8/10/2011	12:54:23 PM	Helium valve closed
8/10/2011	12:54:23 PM	PH3 valve closed
8/10/2011	12:54:23 PM	Main Vac valve closed
8/10/2011	12:54:23 PM	Bypass valve closed
8/10/2011	12:54:23 PM	H2 valve opened
8/10/2011	12:54:23 PM	BCl3 valve opened
8/10/2011	12:54:23 PM	SiCl4 pre valve opened
8/10/2011	12:54:23 PM	SiCl4 post valve opened
8/10/2011	12:54:23 PM	Bubbler valve opened
8/10/2011	12:54:23 PM	Helium MFC set to  0.000000
8/10/2011	12:54:23 PM	H2 MFC set to  440.000000
8/10/2011	12:54:23 PM	BCl3 MFC set to  60.000000
8/10/2011	12:54:23 PM	PHl3 MFC set to  0.000000
8/10/2011	12:54:23 PM	SiCl4 MFC set to  50.000000
8/10/2011	12:54:23 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	12:54:24 PM	Tube furnace set to 1000
8/10/2011	1:09:24 PM	Helium valve closed
8/10/2011	1:09:24 PM	BCl3 valve closed
8/10/2011	1:09:24 PM	PH3 valve closed
8/10/2011	1:09:24 PM	SiCl4 pre valve closed
8/10/2011	1:09:24 PM	SiCl4 post valve closed
8/10/2011	1:09:24 PM	Main Vac valve closed
8/10/2011	1:09:24 PM	Bypass valve closed
8/10/2011	1:09:24 PM	H2 valve opened
8/10/2011	1:09:24 PM	Bubbler valve opened
8/10/2011	1:09:24 PM	Helium MFC set to  0.000000
8/10/2011	1:09:24 PM	H2 MFC set to  500.000000
8/10/2011	1:09:24 PM	BCl3 MFC set to  0.000000
8/10/2011	1:09:24 PM	PHl3 MFC set to  0.000000
8/10/2011	1:09:24 PM	SiCl4 MFC set to  0.000000
8/10/2011	1:09:24 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	1:09:24 PM	Tube furnace set to 750
8/10/2011	1:14:24 PM	H2 valve closed
8/10/2011	1:14:24 PM	BCl3 valve closed
8/10/2011	1:14:24 PM	PH3 valve closed
8/10/2011	1:14:24 PM	SiCl4 pre valve closed
8/10/2011	1:14:24 PM	SiCl4 post valve closed
8/10/2011	1:14:24 PM	Main Vac valve closed
8/10/2011	1:14:24 PM	Bypass valve closed
8/10/2011	1:14:24 PM	Helium valve opened
8/10/2011	1:14:24 PM	Bubbler valve opened
8/10/2011	1:14:24 PM	Helium MFC set to  500.000000
8/10/2011	1:14:24 PM	H2 MFC set to  0.000000
8/10/2011	1:14:24 PM	BCl3 MFC set to  0.000000
8/10/2011	1:14:24 PM	PHl3 MFC set to  0.000000
8/10/2011	1:14:24 PM	SiCl4 MFC set to  0.000000
8/10/2011	1:14:24 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	1:14:24 PM	Tube furnace set to 0
8/10/2011	1:34:24 PM	Helium valve closed
8/10/2011	1:34:24 PM	H2 valve closed
8/10/2011	1:34:24 PM	BCl3 valve closed
8/10/2011	1:34:24 PM	PH3 valve closed
8/10/2011	1:34:24 PM	SiCl4 pre valve closed
8/10/2011	1:34:24 PM	SiCl4 post valve closed
8/10/2011	1:34:24 PM	Main Vac valve closed
8/10/2011	1:34:24 PM	Bypass valve closed
8/10/2011	1:34:24 PM	Bubbler valve closed
8/10/2011	1:34:24 PM	Helium MFC set to  0.000000
8/10/2011	1:34:24 PM	H2 MFC set to  0.000000
8/10/2011	1:34:24 PM	BCl3 MFC set to  0.000000
8/10/2011	1:34:24 PM	PHl3 MFC set to  0.000000
8/10/2011	1:34:24 PM	SiCl4 MFC set to  0.000000
8/10/2011	1:34:24 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	1:34:24 PM	Tube furnace set to 0
8/10/2011	1:34:25 PM	Run finished at 1:34 PM
8/10/2011	2:01:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	2:01:21 PM	Recipe started at 2:01 PM
8/10/2011	2:01:21 PM	Helium valve closed
8/10/2011	2:01:22 PM	H2 valve closed
8/10/2011	2:01:22 PM	BCl3 valve closed
8/10/2011	2:01:22 PM	PH3 valve closed
8/10/2011	2:01:22 PM	SiCl4 pre valve closed
8/10/2011	2:01:22 PM	SiCl4 post valve closed
8/10/2011	2:01:22 PM	Main Vac valve closed
8/10/2011	2:01:22 PM	Bypass valve closed
8/10/2011	2:01:22 PM	Bubbler valve closed
8/10/2011	2:01:22 PM	Helium MFC set to  0.000000
8/10/2011	2:01:22 PM	H2 MFC set to  0.000000
8/10/2011	2:01:22 PM	BCl3 MFC set to  0.000000
8/10/2011	2:01:22 PM	PHl3 MFC set to  0.000000
8/10/2011	2:01:22 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:01:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:01:22 PM	Tube furnace set to 0
8/10/2011	2:01:25 PM	H2 valve closed
8/10/2011	2:01:25 PM	BCl3 valve closed
8/10/2011	2:01:25 PM	PH3 valve closed
8/10/2011	2:01:25 PM	SiCl4 pre valve closed
8/10/2011	2:01:25 PM	SiCl4 post valve closed
8/10/2011	2:01:25 PM	Main Vac valve closed
8/10/2011	2:01:25 PM	Bypass valve closed
8/10/2011	2:01:25 PM	Bubbler valve closed
8/10/2011	2:01:25 PM	Helium valve opened
8/10/2011	2:01:25 PM	Helium MFC set to  500.000000
8/10/2011	2:01:25 PM	H2 MFC set to  0.000000
8/10/2011	2:01:25 PM	BCl3 MFC set to  0.000000
8/10/2011	2:01:25 PM	PHl3 MFC set to  0.000000
8/10/2011	2:01:25 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:01:25 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:01:25 PM	Tube furnace set to 0
8/10/2011	2:01:32 PM	Helium valve closed
8/10/2011	2:01:32 PM	H2 valve closed
8/10/2011	2:01:32 PM	BCl3 valve closed
8/10/2011	2:01:32 PM	PH3 valve closed
8/10/2011	2:01:32 PM	SiCl4 pre valve closed
8/10/2011	2:01:32 PM	SiCl4 post valve closed
8/10/2011	2:01:32 PM	Main Vac valve closed
8/10/2011	2:01:32 PM	Bypass valve closed
8/10/2011	2:01:32 PM	Bubbler valve closed
8/10/2011	2:01:32 PM	Helium MFC set to  0.000000
8/10/2011	2:01:32 PM	H2 MFC set to  0.000000
8/10/2011	2:01:32 PM	BCl3 MFC set to  0.000000
8/10/2011	2:01:32 PM	PHl3 MFC set to  0.000000
8/10/2011	2:01:32 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:01:32 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:01:32 PM	Tube furnace set to 0
8/10/2011	2:01:33 PM	Run finished at 2:01 PM
8/10/2011	2:01:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	2:07:11 PM	Recipe started at 2:07 PM
8/10/2011	2:07:11 PM	Helium valve closed
8/10/2011	2:07:11 PM	H2 valve closed
8/10/2011	2:07:11 PM	BCl3 valve closed
8/10/2011	2:07:11 PM	PH3 valve closed
8/10/2011	2:07:11 PM	SiCl4 pre valve closed
8/10/2011	2:07:11 PM	SiCl4 post valve closed
8/10/2011	2:07:11 PM	Main Vac valve closed
8/10/2011	2:07:11 PM	Bubbler valve closed
8/10/2011	2:07:11 PM	Bypass valve opened
8/10/2011	2:07:11 PM	Helium MFC set to  0.000000
8/10/2011	2:07:11 PM	H2 MFC set to  0.000000
8/10/2011	2:07:11 PM	BCl3 MFC set to  0.000000
8/10/2011	2:07:11 PM	PHl3 MFC set to  0.000000
8/10/2011	2:07:11 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:07:11 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:07:11 PM	Tube furnace set to 0
8/10/2011	2:08:19 PM	Helium valve closed
8/10/2011	2:08:19 PM	H2 valve closed
8/10/2011	2:08:19 PM	BCl3 valve closed
8/10/2011	2:08:19 PM	PH3 valve closed
8/10/2011	2:08:19 PM	SiCl4 pre valve closed
8/10/2011	2:08:19 PM	SiCl4 post valve closed
8/10/2011	2:08:19 PM	Main Vac valve closed
8/10/2011	2:08:19 PM	Bubbler valve closed
8/10/2011	2:08:19 PM	Bypass valve opened
8/10/2011	2:08:19 PM	Helium MFC set to  0.000000
8/10/2011	2:08:19 PM	H2 MFC set to  0.000000
8/10/2011	2:08:19 PM	BCl3 MFC set to  0.000000
8/10/2011	2:08:19 PM	PHl3 MFC set to  0.000000
8/10/2011	2:08:19 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:08:19 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:08:19 PM	Tube furnace set to 0
8/10/2011	2:08:49 PM	Helium valve closed
8/10/2011	2:08:49 PM	H2 valve closed
8/10/2011	2:08:49 PM	BCl3 valve closed
8/10/2011	2:08:49 PM	PH3 valve closed
8/10/2011	2:08:49 PM	SiCl4 pre valve closed
8/10/2011	2:08:49 PM	SiCl4 post valve closed
8/10/2011	2:08:49 PM	Bypass valve closed
8/10/2011	2:08:49 PM	Bubbler valve closed
8/10/2011	2:08:49 PM	Main Vac valve opened
8/10/2011	2:08:49 PM	Helium MFC set to  0.000000
8/10/2011	2:08:49 PM	H2 MFC set to  0.000000
8/10/2011	2:08:49 PM	BCl3 MFC set to  0.000000
8/10/2011	2:08:49 PM	PHl3 MFC set to  0.000000
8/10/2011	2:08:49 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:08:49 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:08:49 PM	Tube furnace set to 0
8/10/2011	2:38:49 PM	H2 valve closed
8/10/2011	2:38:49 PM	BCl3 valve closed
8/10/2011	2:38:49 PM	PH3 valve closed
8/10/2011	2:38:49 PM	SiCl4 pre valve closed
8/10/2011	2:38:49 PM	SiCl4 post valve closed
8/10/2011	2:38:49 PM	Bypass valve closed
8/10/2011	2:38:49 PM	Bubbler valve closed
8/10/2011	2:38:49 PM	Helium valve opened
8/10/2011	2:38:49 PM	Main Vac valve opened
8/10/2011	2:38:49 PM	Helium MFC set to  20.000000
8/10/2011	2:38:49 PM	H2 MFC set to  0.000000
8/10/2011	2:38:49 PM	BCl3 MFC set to  0.000000
8/10/2011	2:38:49 PM	PHl3 MFC set to  0.000000
8/10/2011	2:38:49 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:38:49 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:38:49 PM	Tube furnace set to 0
8/10/2011	2:39:19 PM	Helium valve closed
8/10/2011	2:39:19 PM	H2 valve closed
8/10/2011	2:39:19 PM	BCl3 valve closed
8/10/2011	2:39:19 PM	PH3 valve closed
8/10/2011	2:39:19 PM	SiCl4 pre valve closed
8/10/2011	2:39:19 PM	SiCl4 post valve closed
8/10/2011	2:39:19 PM	Bypass valve closed
8/10/2011	2:39:19 PM	Bubbler valve closed
8/10/2011	2:39:19 PM	Main Vac valve opened
8/10/2011	2:39:19 PM	Helium MFC set to  0.000000
8/10/2011	2:39:19 PM	H2 MFC set to  0.000000
8/10/2011	2:39:19 PM	BCl3 MFC set to  0.000000
8/10/2011	2:39:19 PM	PHl3 MFC set to  0.000000
8/10/2011	2:39:19 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:39:19 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:39:20 PM	Tube furnace set to 0
8/10/2011	2:39:50 PM	H2 valve closed
8/10/2011	2:39:50 PM	BCl3 valve closed
8/10/2011	2:39:50 PM	PH3 valve closed
8/10/2011	2:39:50 PM	SiCl4 pre valve closed
8/10/2011	2:39:50 PM	SiCl4 post valve closed
8/10/2011	2:39:50 PM	Bypass valve closed
8/10/2011	2:39:50 PM	Bubbler valve closed
8/10/2011	2:39:50 PM	Helium valve opened
8/10/2011	2:39:50 PM	Main Vac valve opened
8/10/2011	2:39:50 PM	Helium MFC set to  20.000000
8/10/2011	2:39:50 PM	H2 MFC set to  0.000000
8/10/2011	2:39:50 PM	BCl3 MFC set to  0.000000
8/10/2011	2:39:50 PM	PHl3 MFC set to  0.000000
8/10/2011	2:39:50 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:39:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:39:50 PM	Tube furnace set to 0
8/10/2011	2:40:20 PM	Helium valve closed
8/10/2011	2:40:20 PM	H2 valve closed
8/10/2011	2:40:20 PM	BCl3 valve closed
8/10/2011	2:40:20 PM	PH3 valve closed
8/10/2011	2:40:20 PM	SiCl4 pre valve closed
8/10/2011	2:40:20 PM	SiCl4 post valve closed
8/10/2011	2:40:20 PM	Bypass valve closed
8/10/2011	2:40:20 PM	Bubbler valve closed
8/10/2011	2:40:20 PM	Main Vac valve opened
8/10/2011	2:40:20 PM	Helium MFC set to  0.000000
8/10/2011	2:40:20 PM	H2 MFC set to  0.000000
8/10/2011	2:40:20 PM	BCl3 MFC set to  0.000000
8/10/2011	2:40:20 PM	PHl3 MFC set to  0.000000
8/10/2011	2:40:20 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:40:20 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:40:20 PM	Tube furnace set to 0
8/10/2011	2:40:50 PM	H2 valve closed
8/10/2011	2:40:50 PM	BCl3 valve closed
8/10/2011	2:40:50 PM	PH3 valve closed
8/10/2011	2:40:50 PM	SiCl4 pre valve closed
8/10/2011	2:40:50 PM	SiCl4 post valve closed
8/10/2011	2:40:50 PM	Bypass valve closed
8/10/2011	2:40:50 PM	Bubbler valve closed
8/10/2011	2:40:50 PM	Helium valve opened
8/10/2011	2:40:50 PM	Main Vac valve opened
8/10/2011	2:40:50 PM	Helium MFC set to  20.000000
8/10/2011	2:40:50 PM	H2 MFC set to  0.000000
8/10/2011	2:40:50 PM	BCl3 MFC set to  0.000000
8/10/2011	2:40:50 PM	PHl3 MFC set to  0.000000
8/10/2011	2:40:50 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:40:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:40:50 PM	Tube furnace set to 0
8/10/2011	2:41:20 PM	Helium valve closed
8/10/2011	2:41:20 PM	H2 valve closed
8/10/2011	2:41:20 PM	BCl3 valve closed
8/10/2011	2:41:20 PM	PH3 valve closed
8/10/2011	2:41:20 PM	SiCl4 pre valve closed
8/10/2011	2:41:20 PM	SiCl4 post valve closed
8/10/2011	2:41:20 PM	Bypass valve closed
8/10/2011	2:41:20 PM	Bubbler valve closed
8/10/2011	2:41:20 PM	Main Vac valve opened
8/10/2011	2:41:20 PM	Helium MFC set to  0.000000
8/10/2011	2:41:20 PM	H2 MFC set to  0.000000
8/10/2011	2:41:20 PM	BCl3 MFC set to  0.000000
8/10/2011	2:41:20 PM	PHl3 MFC set to  0.000000
8/10/2011	2:41:20 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:41:20 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:41:20 PM	Tube furnace set to 0
8/10/2011	2:41:50 PM	H2 valve closed
8/10/2011	2:41:50 PM	BCl3 valve closed
8/10/2011	2:41:50 PM	PH3 valve closed
8/10/2011	2:41:50 PM	SiCl4 pre valve closed
8/10/2011	2:41:50 PM	SiCl4 post valve closed
8/10/2011	2:41:50 PM	Bypass valve closed
8/10/2011	2:41:50 PM	Bubbler valve closed
8/10/2011	2:41:50 PM	Helium valve opened
8/10/2011	2:41:50 PM	Main Vac valve opened
8/10/2011	2:41:50 PM	Helium MFC set to  20.000000
8/10/2011	2:41:50 PM	H2 MFC set to  0.000000
8/10/2011	2:41:50 PM	BCl3 MFC set to  0.000000
8/10/2011	2:41:50 PM	PHl3 MFC set to  0.000000
8/10/2011	2:41:50 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:41:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:41:51 PM	Tube furnace set to 0
8/10/2011	2:42:21 PM	Helium valve closed
8/10/2011	2:42:21 PM	H2 valve closed
8/10/2011	2:42:21 PM	BCl3 valve closed
8/10/2011	2:42:21 PM	PH3 valve closed
8/10/2011	2:42:21 PM	SiCl4 pre valve closed
8/10/2011	2:42:21 PM	SiCl4 post valve closed
8/10/2011	2:42:21 PM	Bypass valve closed
8/10/2011	2:42:21 PM	Bubbler valve closed
8/10/2011	2:42:21 PM	Main Vac valve opened
8/10/2011	2:42:21 PM	Helium MFC set to  0.000000
8/10/2011	2:42:21 PM	H2 MFC set to  0.000000
8/10/2011	2:42:21 PM	BCl3 MFC set to  0.000000
8/10/2011	2:42:21 PM	PHl3 MFC set to  0.000000
8/10/2011	2:42:21 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:42:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:42:21 PM	Tube furnace set to 0
8/10/2011	2:42:51 PM	H2 valve closed
8/10/2011	2:42:51 PM	BCl3 valve closed
8/10/2011	2:42:51 PM	PH3 valve closed
8/10/2011	2:42:51 PM	SiCl4 pre valve closed
8/10/2011	2:42:51 PM	SiCl4 post valve closed
8/10/2011	2:42:51 PM	Bypass valve closed
8/10/2011	2:42:51 PM	Bubbler valve closed
8/10/2011	2:42:51 PM	Helium valve opened
8/10/2011	2:42:51 PM	Main Vac valve opened
8/10/2011	2:42:51 PM	Helium MFC set to  20.000000
8/10/2011	2:42:51 PM	H2 MFC set to  0.000000
8/10/2011	2:42:51 PM	BCl3 MFC set to  0.000000
8/10/2011	2:42:51 PM	PHl3 MFC set to  0.000000
8/10/2011	2:42:51 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:42:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:42:51 PM	Tube furnace set to 0
8/10/2011	2:43:21 PM	Helium valve closed
8/10/2011	2:43:21 PM	H2 valve closed
8/10/2011	2:43:21 PM	BCl3 valve closed
8/10/2011	2:43:21 PM	PH3 valve closed
8/10/2011	2:43:21 PM	SiCl4 pre valve closed
8/10/2011	2:43:21 PM	SiCl4 post valve closed
8/10/2011	2:43:21 PM	Bypass valve closed
8/10/2011	2:43:21 PM	Bubbler valve closed
8/10/2011	2:43:21 PM	Main Vac valve opened
8/10/2011	2:43:21 PM	Helium MFC set to  0.000000
8/10/2011	2:43:21 PM	H2 MFC set to  0.000000
8/10/2011	2:43:21 PM	BCl3 MFC set to  0.000000
8/10/2011	2:43:21 PM	PHl3 MFC set to  0.000000
8/10/2011	2:43:21 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:43:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:43:21 PM	Tube furnace set to 0
8/10/2011	2:43:51 PM	H2 valve closed
8/10/2011	2:43:51 PM	BCl3 valve closed
8/10/2011	2:43:51 PM	PH3 valve closed
8/10/2011	2:43:51 PM	SiCl4 pre valve closed
8/10/2011	2:43:51 PM	SiCl4 post valve closed
8/10/2011	2:43:51 PM	Bypass valve closed
8/10/2011	2:43:51 PM	Bubbler valve closed
8/10/2011	2:43:51 PM	Helium valve opened
8/10/2011	2:43:51 PM	Main Vac valve opened
8/10/2011	2:43:51 PM	Helium MFC set to  20.000000
8/10/2011	2:43:51 PM	H2 MFC set to  0.000000
8/10/2011	2:43:51 PM	BCl3 MFC set to  0.000000
8/10/2011	2:43:51 PM	PHl3 MFC set to  0.000000
8/10/2011	2:43:51 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:43:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:43:51 PM	Tube furnace set to 0
8/10/2011	2:44:21 PM	Helium valve closed
8/10/2011	2:44:21 PM	H2 valve closed
8/10/2011	2:44:21 PM	BCl3 valve closed
8/10/2011	2:44:21 PM	PH3 valve closed
8/10/2011	2:44:21 PM	SiCl4 pre valve closed
8/10/2011	2:44:21 PM	SiCl4 post valve closed
8/10/2011	2:44:21 PM	Bypass valve closed
8/10/2011	2:44:21 PM	Bubbler valve closed
8/10/2011	2:44:21 PM	Main Vac valve opened
8/10/2011	2:44:21 PM	Helium MFC set to  0.000000
8/10/2011	2:44:21 PM	H2 MFC set to  0.000000
8/10/2011	2:44:21 PM	BCl3 MFC set to  0.000000
8/10/2011	2:44:21 PM	PHl3 MFC set to  0.000000
8/10/2011	2:44:21 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:44:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:44:22 PM	Tube furnace set to 0
8/10/2011	2:44:52 PM	H2 valve closed
8/10/2011	2:44:52 PM	BCl3 valve closed
8/10/2011	2:44:52 PM	PH3 valve closed
8/10/2011	2:44:52 PM	SiCl4 pre valve closed
8/10/2011	2:44:52 PM	SiCl4 post valve closed
8/10/2011	2:44:52 PM	Bypass valve closed
8/10/2011	2:44:52 PM	Bubbler valve closed
8/10/2011	2:44:52 PM	Helium valve opened
8/10/2011	2:44:52 PM	Main Vac valve opened
8/10/2011	2:44:52 PM	Helium MFC set to  20.000000
8/10/2011	2:44:52 PM	H2 MFC set to  0.000000
8/10/2011	2:44:52 PM	BCl3 MFC set to  0.000000
8/10/2011	2:44:52 PM	PHl3 MFC set to  0.000000
8/10/2011	2:44:52 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:44:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:44:52 PM	Tube furnace set to 0
8/10/2011	2:45:22 PM	Helium valve closed
8/10/2011	2:45:22 PM	H2 valve closed
8/10/2011	2:45:22 PM	BCl3 valve closed
8/10/2011	2:45:22 PM	PH3 valve closed
8/10/2011	2:45:22 PM	SiCl4 pre valve closed
8/10/2011	2:45:22 PM	SiCl4 post valve closed
8/10/2011	2:45:22 PM	Bypass valve closed
8/10/2011	2:45:22 PM	Bubbler valve closed
8/10/2011	2:45:22 PM	Main Vac valve opened
8/10/2011	2:45:22 PM	Helium MFC set to  0.000000
8/10/2011	2:45:22 PM	H2 MFC set to  0.000000
8/10/2011	2:45:22 PM	BCl3 MFC set to  0.000000
8/10/2011	2:45:22 PM	PHl3 MFC set to  0.000000
8/10/2011	2:45:22 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:45:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:45:22 PM	Tube furnace set to 0
8/10/2011	2:45:52 PM	H2 valve closed
8/10/2011	2:45:52 PM	BCl3 valve closed
8/10/2011	2:45:52 PM	PH3 valve closed
8/10/2011	2:45:52 PM	SiCl4 pre valve closed
8/10/2011	2:45:52 PM	SiCl4 post valve closed
8/10/2011	2:45:52 PM	Bypass valve closed
8/10/2011	2:45:52 PM	Bubbler valve closed
8/10/2011	2:45:52 PM	Helium valve opened
8/10/2011	2:45:52 PM	Main Vac valve opened
8/10/2011	2:45:52 PM	Helium MFC set to  20.000000
8/10/2011	2:45:52 PM	H2 MFC set to  0.000000
8/10/2011	2:45:52 PM	BCl3 MFC set to  0.000000
8/10/2011	2:45:52 PM	PHl3 MFC set to  0.000000
8/10/2011	2:45:52 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:45:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:45:52 PM	Tube furnace set to 0
8/10/2011	2:46:22 PM	Helium valve closed
8/10/2011	2:46:22 PM	H2 valve closed
8/10/2011	2:46:22 PM	BCl3 valve closed
8/10/2011	2:46:22 PM	PH3 valve closed
8/10/2011	2:46:22 PM	SiCl4 pre valve closed
8/10/2011	2:46:22 PM	SiCl4 post valve closed
8/10/2011	2:46:22 PM	Bypass valve closed
8/10/2011	2:46:22 PM	Bubbler valve closed
8/10/2011	2:46:22 PM	Main Vac valve opened
8/10/2011	2:46:22 PM	Helium MFC set to  0.000000
8/10/2011	2:46:22 PM	H2 MFC set to  0.000000
8/10/2011	2:46:22 PM	BCl3 MFC set to  0.000000
8/10/2011	2:46:22 PM	PHl3 MFC set to  0.000000
8/10/2011	2:46:22 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:46:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:46:22 PM	Tube furnace set to 0
8/10/2011	2:46:52 PM	H2 valve closed
8/10/2011	2:46:52 PM	BCl3 valve closed
8/10/2011	2:46:52 PM	PH3 valve closed
8/10/2011	2:46:52 PM	SiCl4 pre valve closed
8/10/2011	2:46:52 PM	SiCl4 post valve closed
8/10/2011	2:46:52 PM	Bypass valve closed
8/10/2011	2:46:52 PM	Bubbler valve closed
8/10/2011	2:46:52 PM	Helium valve opened
8/10/2011	2:46:52 PM	Main Vac valve opened
8/10/2011	2:46:52 PM	Helium MFC set to  20.000000
8/10/2011	2:46:52 PM	H2 MFC set to  0.000000
8/10/2011	2:46:52 PM	BCl3 MFC set to  0.000000
8/10/2011	2:46:52 PM	PHl3 MFC set to  0.000000
8/10/2011	2:46:52 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:46:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:46:53 PM	Tube furnace set to 0
8/10/2011	2:47:23 PM	Helium valve closed
8/10/2011	2:47:23 PM	H2 valve closed
8/10/2011	2:47:23 PM	BCl3 valve closed
8/10/2011	2:47:23 PM	PH3 valve closed
8/10/2011	2:47:23 PM	SiCl4 pre valve closed
8/10/2011	2:47:23 PM	SiCl4 post valve closed
8/10/2011	2:47:23 PM	Bypass valve closed
8/10/2011	2:47:23 PM	Bubbler valve closed
8/10/2011	2:47:23 PM	Main Vac valve opened
8/10/2011	2:47:23 PM	Helium MFC set to  0.000000
8/10/2011	2:47:23 PM	H2 MFC set to  0.000000
8/10/2011	2:47:23 PM	BCl3 MFC set to  0.000000
8/10/2011	2:47:23 PM	PHl3 MFC set to  0.000000
8/10/2011	2:47:23 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:47:23 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:47:23 PM	Tube furnace set to 0
8/10/2011	2:47:53 PM	H2 valve closed
8/10/2011	2:47:53 PM	BCl3 valve closed
8/10/2011	2:47:53 PM	PH3 valve closed
8/10/2011	2:47:53 PM	SiCl4 pre valve closed
8/10/2011	2:47:53 PM	SiCl4 post valve closed
8/10/2011	2:47:53 PM	Bypass valve closed
8/10/2011	2:47:53 PM	Bubbler valve closed
8/10/2011	2:47:53 PM	Helium valve opened
8/10/2011	2:47:53 PM	Main Vac valve opened
8/10/2011	2:47:53 PM	Helium MFC set to  20.000000
8/10/2011	2:47:53 PM	H2 MFC set to  0.000000
8/10/2011	2:47:53 PM	BCl3 MFC set to  0.000000
8/10/2011	2:47:53 PM	PHl3 MFC set to  0.000000
8/10/2011	2:47:53 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:47:53 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:47:53 PM	Tube furnace set to 0
8/10/2011	2:48:23 PM	Helium valve closed
8/10/2011	2:48:23 PM	H2 valve closed
8/10/2011	2:48:23 PM	BCl3 valve closed
8/10/2011	2:48:23 PM	PH3 valve closed
8/10/2011	2:48:23 PM	SiCl4 pre valve closed
8/10/2011	2:48:23 PM	SiCl4 post valve closed
8/10/2011	2:48:23 PM	Bypass valve closed
8/10/2011	2:48:23 PM	Bubbler valve closed
8/10/2011	2:48:23 PM	Main Vac valve opened
8/10/2011	2:48:23 PM	Helium MFC set to  0.000000
8/10/2011	2:48:23 PM	H2 MFC set to  0.000000
8/10/2011	2:48:23 PM	BCl3 MFC set to  0.000000
8/10/2011	2:48:23 PM	PHl3 MFC set to  0.000000
8/10/2011	2:48:23 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:48:23 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:48:23 PM	Tube furnace set to 0
8/10/2011	2:48:24 PM	Run finished at 2:48 PM
8/10/2011	2:51:32 PM	Main Vac valve closed
8/10/2011	2:51:41 PM	Main Vac valve opened
8/10/2011	2:52:42 PM	Recipe started at 2:52 PM
8/10/2011	2:52:42 PM	Helium valve closed
8/10/2011	2:52:42 PM	H2 valve closed
8/10/2011	2:52:42 PM	BCl3 valve closed
8/10/2011	2:52:42 PM	PH3 valve closed
8/10/2011	2:52:42 PM	SiCl4 pre valve closed
8/10/2011	2:52:42 PM	SiCl4 post valve closed
8/10/2011	2:52:42 PM	Main Vac valve closed
8/10/2011	2:52:42 PM	Bypass valve closed
8/10/2011	2:52:42 PM	Bubbler valve closed
8/10/2011	2:52:42 PM	Helium MFC set to  0.000000
8/10/2011	2:52:42 PM	H2 MFC set to  0.000000
8/10/2011	2:52:42 PM	BCl3 MFC set to  0.000000
8/10/2011	2:52:42 PM	PHl3 MFC set to  0.000000
8/10/2011	2:52:42 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:52:42 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:52:42 PM	Tube furnace set to 0
8/10/2011	2:52:45 PM	Helium valve closed
8/10/2011	2:52:45 PM	BCl3 valve closed
8/10/2011	2:52:45 PM	PH3 valve closed
8/10/2011	2:52:45 PM	SiCl4 pre valve closed
8/10/2011	2:52:45 PM	SiCl4 post valve closed
8/10/2011	2:52:45 PM	Main Vac valve closed
8/10/2011	2:52:45 PM	Bypass valve closed
8/10/2011	2:52:45 PM	Bubbler valve closed
8/10/2011	2:52:45 PM	H2 valve opened
8/10/2011	2:52:45 PM	Helium MFC set to  0.000000
8/10/2011	2:52:45 PM	H2 MFC set to  500.000000
8/10/2011	2:52:45 PM	BCl3 MFC set to  0.000000
8/10/2011	2:52:45 PM	PHl3 MFC set to  0.000000
8/10/2011	2:52:45 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:52:45 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:52:46 PM	Tube furnace set to 0
8/10/2011	2:53:50 PM	Helium valve closed
8/10/2011	2:53:50 PM	BCl3 valve closed
8/10/2011	2:53:50 PM	PH3 valve closed
8/10/2011	2:53:50 PM	SiCl4 pre valve closed
8/10/2011	2:53:50 PM	SiCl4 post valve closed
8/10/2011	2:53:50 PM	Main Vac valve closed
8/10/2011	2:53:50 PM	Bypass valve closed
8/10/2011	2:53:50 PM	H2 valve opened
8/10/2011	2:53:50 PM	Bubbler valve opened
8/10/2011	2:53:50 PM	Helium MFC set to  0.000000
8/10/2011	2:53:50 PM	H2 MFC set to  500.000000
8/10/2011	2:53:50 PM	BCl3 MFC set to  0.000000
8/10/2011	2:53:50 PM	PHl3 MFC set to  0.000000
8/10/2011	2:53:50 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:53:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:53:50 PM	Tube furnace set to 0
8/10/2011	2:53:51 PM	Helium valve closed
8/10/2011	2:53:51 PM	BCl3 valve closed
8/10/2011	2:53:51 PM	PH3 valve closed
8/10/2011	2:53:51 PM	SiCl4 pre valve closed
8/10/2011	2:53:51 PM	SiCl4 post valve closed
8/10/2011	2:53:51 PM	Main Vac valve closed
8/10/2011	2:53:51 PM	Bypass valve closed
8/10/2011	2:53:51 PM	H2 valve opened
8/10/2011	2:53:51 PM	Bubbler valve opened
8/10/2011	2:53:51 PM	Helium MFC set to  0.000000
8/10/2011	2:53:51 PM	H2 MFC set to  500.000000
8/10/2011	2:53:51 PM	BCl3 MFC set to  0.000000
8/10/2011	2:53:51 PM	PHl3 MFC set to  0.000000
8/10/2011	2:53:51 PM	SiCl4 MFC set to  0.000000
8/10/2011	2:53:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	2:53:51 PM	Tube furnace set to 1000
8/10/2011	3:13:51 PM	Helium valve closed
8/10/2011	3:13:51 PM	PH3 valve closed
8/10/2011	3:13:51 PM	Main Vac valve closed
8/10/2011	3:13:51 PM	Bypass valve closed
8/10/2011	3:13:51 PM	H2 valve opened
8/10/2011	3:13:51 PM	BCl3 valve opened
8/10/2011	3:13:51 PM	SiCl4 pre valve opened
8/10/2011	3:13:51 PM	SiCl4 post valve opened
8/10/2011	3:13:51 PM	Bubbler valve opened
8/10/2011	3:13:51 PM	Helium MFC set to  0.000000
8/10/2011	3:13:51 PM	H2 MFC set to  440.000000
8/10/2011	3:13:51 PM	BCl3 MFC set to  60.000000
8/10/2011	3:13:51 PM	PHl3 MFC set to  0.000000
8/10/2011	3:13:51 PM	SiCl4 MFC set to  50.000000
8/10/2011	3:13:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	3:13:52 PM	Tube furnace set to 1000
8/10/2011	3:29:52 PM	Helium valve closed
8/10/2011	3:29:52 PM	BCl3 valve closed
8/10/2011	3:29:52 PM	PH3 valve closed
8/10/2011	3:29:52 PM	SiCl4 pre valve closed
8/10/2011	3:29:52 PM	SiCl4 post valve closed
8/10/2011	3:29:52 PM	Main Vac valve closed
8/10/2011	3:29:52 PM	Bypass valve closed
8/10/2011	3:29:52 PM	H2 valve opened
8/10/2011	3:29:52 PM	Bubbler valve opened
8/10/2011	3:29:52 PM	Helium MFC set to  0.000000
8/10/2011	3:29:52 PM	H2 MFC set to  500.000000
8/10/2011	3:29:52 PM	BCl3 MFC set to  0.000000
8/10/2011	3:29:52 PM	PHl3 MFC set to  0.000000
8/10/2011	3:29:52 PM	SiCl4 MFC set to  0.000000
8/10/2011	3:29:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	3:29:52 PM	Tube furnace set to 750
8/10/2011	3:34:52 PM	H2 valve closed
8/10/2011	3:34:52 PM	BCl3 valve closed
8/10/2011	3:34:52 PM	PH3 valve closed
8/10/2011	3:34:52 PM	SiCl4 pre valve closed
8/10/2011	3:34:52 PM	SiCl4 post valve closed
8/10/2011	3:34:52 PM	Main Vac valve closed
8/10/2011	3:34:52 PM	Bypass valve closed
8/10/2011	3:34:52 PM	Helium valve opened
8/10/2011	3:34:52 PM	Bubbler valve opened
8/10/2011	3:34:52 PM	Helium MFC set to  500.000000
8/10/2011	3:34:52 PM	H2 MFC set to  0.000000
8/10/2011	3:34:52 PM	BCl3 MFC set to  0.000000
8/10/2011	3:34:52 PM	PHl3 MFC set to  0.000000
8/10/2011	3:34:52 PM	SiCl4 MFC set to  0.000000
8/10/2011	3:34:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	3:34:52 PM	Tube furnace set to 0
8/10/2011	3:54:52 PM	Helium valve closed
8/10/2011	3:54:52 PM	H2 valve closed
8/10/2011	3:54:52 PM	BCl3 valve closed
8/10/2011	3:54:52 PM	PH3 valve closed
8/10/2011	3:54:52 PM	SiCl4 pre valve closed
8/10/2011	3:54:52 PM	SiCl4 post valve closed
8/10/2011	3:54:52 PM	Main Vac valve closed
8/10/2011	3:54:52 PM	Bypass valve closed
8/10/2011	3:54:52 PM	Bubbler valve closed
8/10/2011	3:54:52 PM	Helium MFC set to  0.000000
8/10/2011	3:54:52 PM	H2 MFC set to  0.000000
8/10/2011	3:54:52 PM	BCl3 MFC set to  0.000000
8/10/2011	3:54:52 PM	PHl3 MFC set to  0.000000
8/10/2011	3:54:52 PM	SiCl4 MFC set to  0.000000
8/10/2011	3:54:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	3:54:52 PM	Tube furnace set to 0
8/10/2011	3:54:53 PM	Run finished at 3:54 PM
8/10/2011	4:10:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	4:10:20 PM	Recipe started at 4:10 PM
8/10/2011	4:10:20 PM	Helium valve closed
8/10/2011	4:10:20 PM	H2 valve closed
8/10/2011	4:10:20 PM	BCl3 valve closed
8/10/2011	4:10:20 PM	PH3 valve closed
8/10/2011	4:10:20 PM	SiCl4 pre valve closed
8/10/2011	4:10:20 PM	SiCl4 post valve closed
8/10/2011	4:10:20 PM	Main Vac valve closed
8/10/2011	4:10:20 PM	Bypass valve closed
8/10/2011	4:10:20 PM	Bubbler valve closed
8/10/2011	4:10:20 PM	Helium MFC set to  0.000000
8/10/2011	4:10:20 PM	H2 MFC set to  0.000000
8/10/2011	4:10:20 PM	BCl3 MFC set to  0.000000
8/10/2011	4:10:20 PM	PHl3 MFC set to  0.000000
8/10/2011	4:10:20 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:10:20 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:10:20 PM	Tube furnace set to 0
8/10/2011	4:10:23 PM	H2 valve closed
8/10/2011	4:10:23 PM	BCl3 valve closed
8/10/2011	4:10:23 PM	PH3 valve closed
8/10/2011	4:10:23 PM	SiCl4 pre valve closed
8/10/2011	4:10:23 PM	SiCl4 post valve closed
8/10/2011	4:10:23 PM	Main Vac valve closed
8/10/2011	4:10:23 PM	Bypass valve closed
8/10/2011	4:10:23 PM	Bubbler valve closed
8/10/2011	4:10:23 PM	Helium valve opened
8/10/2011	4:10:23 PM	Helium MFC set to  500.000000
8/10/2011	4:10:23 PM	H2 MFC set to  0.000000
8/10/2011	4:10:23 PM	BCl3 MFC set to  0.000000
8/10/2011	4:10:23 PM	PHl3 MFC set to  0.000000
8/10/2011	4:10:23 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:10:23 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:10:23 PM	Tube furnace set to 0
8/10/2011	4:10:27 PM	Helium valve closed
8/10/2011	4:10:27 PM	H2 valve closed
8/10/2011	4:10:27 PM	BCl3 valve closed
8/10/2011	4:10:27 PM	PH3 valve closed
8/10/2011	4:10:27 PM	SiCl4 pre valve closed
8/10/2011	4:10:27 PM	SiCl4 post valve closed
8/10/2011	4:10:27 PM	Main Vac valve closed
8/10/2011	4:10:27 PM	Bypass valve closed
8/10/2011	4:10:27 PM	Bubbler valve closed
8/10/2011	4:10:27 PM	Helium MFC set to  0.000000
8/10/2011	4:10:27 PM	H2 MFC set to  0.000000
8/10/2011	4:10:27 PM	BCl3 MFC set to  0.000000
8/10/2011	4:10:27 PM	PHl3 MFC set to  0.000000
8/10/2011	4:10:27 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:10:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:10:27 PM	Tube furnace set to 0
8/10/2011	4:10:28 PM	Run finished at 4:10 PM
8/10/2011	4:10:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	4:15:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	4:15:15 PM	Recipe started at 4:15 PM
8/10/2011	4:15:15 PM	Helium valve closed
8/10/2011	4:15:15 PM	H2 valve closed
8/10/2011	4:15:15 PM	BCl3 valve closed
8/10/2011	4:15:15 PM	PH3 valve closed
8/10/2011	4:15:15 PM	SiCl4 pre valve closed
8/10/2011	4:15:15 PM	SiCl4 post valve closed
8/10/2011	4:15:15 PM	Main Vac valve closed
8/10/2011	4:15:15 PM	Bypass valve closed
8/10/2011	4:15:15 PM	Bubbler valve closed
8/10/2011	4:15:15 PM	Helium MFC set to  0.000000
8/10/2011	4:15:15 PM	H2 MFC set to  0.000000
8/10/2011	4:15:15 PM	BCl3 MFC set to  0.000000
8/10/2011	4:15:15 PM	PHl3 MFC set to  0.000000
8/10/2011	4:15:15 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:15:15 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:15:16 PM	Tube furnace set to 0
8/10/2011	4:15:19 PM	H2 valve closed
8/10/2011	4:15:19 PM	BCl3 valve closed
8/10/2011	4:15:19 PM	PH3 valve closed
8/10/2011	4:15:19 PM	SiCl4 pre valve closed
8/10/2011	4:15:19 PM	SiCl4 post valve closed
8/10/2011	4:15:19 PM	Main Vac valve closed
8/10/2011	4:15:19 PM	Bypass valve closed
8/10/2011	4:15:19 PM	Bubbler valve closed
8/10/2011	4:15:19 PM	Helium valve opened
8/10/2011	4:15:19 PM	Helium MFC set to  500.000000
8/10/2011	4:15:19 PM	H2 MFC set to  0.000000
8/10/2011	4:15:19 PM	BCl3 MFC set to  0.000000
8/10/2011	4:15:19 PM	PHl3 MFC set to  0.000000
8/10/2011	4:15:19 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:15:19 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:15:19 PM	Tube furnace set to 0
8/10/2011	4:15:21 PM	Helium valve closed
8/10/2011	4:15:21 PM	H2 valve closed
8/10/2011	4:15:21 PM	BCl3 valve closed
8/10/2011	4:15:21 PM	PH3 valve closed
8/10/2011	4:15:21 PM	SiCl4 pre valve closed
8/10/2011	4:15:21 PM	SiCl4 post valve closed
8/10/2011	4:15:21 PM	Main Vac valve closed
8/10/2011	4:15:21 PM	Bypass valve closed
8/10/2011	4:15:21 PM	Bubbler valve closed
8/10/2011	4:15:21 PM	Helium MFC set to  0.000000
8/10/2011	4:15:21 PM	H2 MFC set to  0.000000
8/10/2011	4:15:21 PM	BCl3 MFC set to  0.000000
8/10/2011	4:15:21 PM	PHl3 MFC set to  0.000000
8/10/2011	4:15:21 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:15:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:15:21 PM	Tube furnace set to 0
8/10/2011	4:15:22 PM	Run finished at 4:15 PM
8/10/2011	4:15:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	4:27:40 PM	Recipe started at 4:27 PM
8/10/2011	4:27:40 PM	Helium valve closed
8/10/2011	4:27:40 PM	H2 valve closed
8/10/2011	4:27:40 PM	BCl3 valve closed
8/10/2011	4:27:40 PM	PH3 valve closed
8/10/2011	4:27:40 PM	SiCl4 pre valve closed
8/10/2011	4:27:40 PM	SiCl4 post valve closed
8/10/2011	4:27:40 PM	Main Vac valve closed
8/10/2011	4:27:40 PM	Bubbler valve closed
8/10/2011	4:27:40 PM	Bypass valve opened
8/10/2011	4:27:40 PM	Helium MFC set to  0.000000
8/10/2011	4:27:40 PM	H2 MFC set to  0.000000
8/10/2011	4:27:40 PM	BCl3 MFC set to  0.000000
8/10/2011	4:27:40 PM	PHl3 MFC set to  0.000000
8/10/2011	4:27:40 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:27:40 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:27:40 PM	Tube furnace set to 0
8/10/2011	4:28:58 PM	Helium valve closed
8/10/2011	4:28:58 PM	H2 valve closed
8/10/2011	4:28:58 PM	BCl3 valve closed
8/10/2011	4:28:58 PM	PH3 valve closed
8/10/2011	4:28:58 PM	SiCl4 pre valve closed
8/10/2011	4:28:58 PM	SiCl4 post valve closed
8/10/2011	4:28:58 PM	Main Vac valve closed
8/10/2011	4:28:58 PM	Bubbler valve closed
8/10/2011	4:28:58 PM	Bypass valve opened
8/10/2011	4:28:58 PM	Helium MFC set to  0.000000
8/10/2011	4:28:58 PM	H2 MFC set to  0.000000
8/10/2011	4:28:58 PM	BCl3 MFC set to  0.000000
8/10/2011	4:28:58 PM	PHl3 MFC set to  0.000000
8/10/2011	4:28:58 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:28:58 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:28:58 PM	Tube furnace set to 0
8/10/2011	4:29:28 PM	Helium valve closed
8/10/2011	4:29:28 PM	H2 valve closed
8/10/2011	4:29:28 PM	BCl3 valve closed
8/10/2011	4:29:28 PM	PH3 valve closed
8/10/2011	4:29:28 PM	SiCl4 pre valve closed
8/10/2011	4:29:28 PM	SiCl4 post valve closed
8/10/2011	4:29:28 PM	Bypass valve closed
8/10/2011	4:29:28 PM	Bubbler valve closed
8/10/2011	4:29:28 PM	Main Vac valve opened
8/10/2011	4:29:28 PM	Helium MFC set to  0.000000
8/10/2011	4:29:28 PM	H2 MFC set to  0.000000
8/10/2011	4:29:28 PM	BCl3 MFC set to  0.000000
8/10/2011	4:29:28 PM	PHl3 MFC set to  0.000000
8/10/2011	4:29:28 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:29:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:29:29 PM	Tube furnace set to 0
8/10/2011	4:59:29 PM	H2 valve closed
8/10/2011	4:59:29 PM	BCl3 valve closed
8/10/2011	4:59:29 PM	PH3 valve closed
8/10/2011	4:59:29 PM	SiCl4 pre valve closed
8/10/2011	4:59:29 PM	SiCl4 post valve closed
8/10/2011	4:59:29 PM	Bypass valve closed
8/10/2011	4:59:29 PM	Bubbler valve closed
8/10/2011	4:59:29 PM	Helium valve opened
8/10/2011	4:59:29 PM	Main Vac valve opened
8/10/2011	4:59:29 PM	Helium MFC set to  20.000000
8/10/2011	4:59:29 PM	H2 MFC set to  0.000000
8/10/2011	4:59:29 PM	BCl3 MFC set to  0.000000
8/10/2011	4:59:29 PM	PHl3 MFC set to  0.000000
8/10/2011	4:59:29 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:59:29 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:59:29 PM	Tube furnace set to 0
8/10/2011	4:59:59 PM	Helium valve closed
8/10/2011	4:59:59 PM	H2 valve closed
8/10/2011	4:59:59 PM	BCl3 valve closed
8/10/2011	4:59:59 PM	PH3 valve closed
8/10/2011	4:59:59 PM	SiCl4 pre valve closed
8/10/2011	4:59:59 PM	SiCl4 post valve closed
8/10/2011	4:59:59 PM	Bypass valve closed
8/10/2011	4:59:59 PM	Bubbler valve closed
8/10/2011	4:59:59 PM	Main Vac valve opened
8/10/2011	4:59:59 PM	Helium MFC set to  0.000000
8/10/2011	4:59:59 PM	H2 MFC set to  0.000000
8/10/2011	4:59:59 PM	BCl3 MFC set to  0.000000
8/10/2011	4:59:59 PM	PHl3 MFC set to  0.000000
8/10/2011	4:59:59 PM	SiCl4 MFC set to  0.000000
8/10/2011	4:59:59 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	4:59:59 PM	Tube furnace set to 0
8/10/2011	5:00:29 PM	H2 valve closed
8/10/2011	5:00:29 PM	BCl3 valve closed
8/10/2011	5:00:29 PM	PH3 valve closed
8/10/2011	5:00:29 PM	SiCl4 pre valve closed
8/10/2011	5:00:29 PM	SiCl4 post valve closed
8/10/2011	5:00:29 PM	Bypass valve closed
8/10/2011	5:00:29 PM	Bubbler valve closed
8/10/2011	5:00:29 PM	Helium valve opened
8/10/2011	5:00:29 PM	Main Vac valve opened
8/10/2011	5:00:29 PM	Helium MFC set to  20.000000
8/10/2011	5:00:29 PM	H2 MFC set to  0.000000
8/10/2011	5:00:29 PM	BCl3 MFC set to  0.000000
8/10/2011	5:00:29 PM	PHl3 MFC set to  0.000000
8/10/2011	5:00:29 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:00:29 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:00:29 PM	Tube furnace set to 0
8/10/2011	5:00:59 PM	Helium valve closed
8/10/2011	5:00:59 PM	H2 valve closed
8/10/2011	5:00:59 PM	BCl3 valve closed
8/10/2011	5:00:59 PM	PH3 valve closed
8/10/2011	5:00:59 PM	SiCl4 pre valve closed
8/10/2011	5:00:59 PM	SiCl4 post valve closed
8/10/2011	5:00:59 PM	Bypass valve closed
8/10/2011	5:00:59 PM	Bubbler valve closed
8/10/2011	5:00:59 PM	Main Vac valve opened
8/10/2011	5:00:59 PM	Helium MFC set to  0.000000
8/10/2011	5:00:59 PM	H2 MFC set to  0.000000
8/10/2011	5:00:59 PM	BCl3 MFC set to  0.000000
8/10/2011	5:00:59 PM	PHl3 MFC set to  0.000000
8/10/2011	5:00:59 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:00:59 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:00:59 PM	Tube furnace set to 0
8/10/2011	5:01:29 PM	H2 valve closed
8/10/2011	5:01:29 PM	BCl3 valve closed
8/10/2011	5:01:29 PM	PH3 valve closed
8/10/2011	5:01:29 PM	SiCl4 pre valve closed
8/10/2011	5:01:29 PM	SiCl4 post valve closed
8/10/2011	5:01:29 PM	Bypass valve closed
8/10/2011	5:01:29 PM	Bubbler valve closed
8/10/2011	5:01:29 PM	Helium valve opened
8/10/2011	5:01:29 PM	Main Vac valve opened
8/10/2011	5:01:29 PM	Helium MFC set to  20.000000
8/10/2011	5:01:29 PM	H2 MFC set to  0.000000
8/10/2011	5:01:29 PM	BCl3 MFC set to  0.000000
8/10/2011	5:01:29 PM	PHl3 MFC set to  0.000000
8/10/2011	5:01:29 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:01:29 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:01:30 PM	Tube furnace set to 0
8/10/2011	5:02:00 PM	Helium valve closed
8/10/2011	5:02:00 PM	H2 valve closed
8/10/2011	5:02:00 PM	BCl3 valve closed
8/10/2011	5:02:00 PM	PH3 valve closed
8/10/2011	5:02:00 PM	SiCl4 pre valve closed
8/10/2011	5:02:00 PM	SiCl4 post valve closed
8/10/2011	5:02:00 PM	Bypass valve closed
8/10/2011	5:02:00 PM	Bubbler valve closed
8/10/2011	5:02:00 PM	Main Vac valve opened
8/10/2011	5:02:00 PM	Helium MFC set to  0.000000
8/10/2011	5:02:00 PM	H2 MFC set to  0.000000
8/10/2011	5:02:00 PM	BCl3 MFC set to  0.000000
8/10/2011	5:02:00 PM	PHl3 MFC set to  0.000000
8/10/2011	5:02:00 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:02:00 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:02:00 PM	Tube furnace set to 0
8/10/2011	5:02:30 PM	H2 valve closed
8/10/2011	5:02:30 PM	BCl3 valve closed
8/10/2011	5:02:30 PM	PH3 valve closed
8/10/2011	5:02:30 PM	SiCl4 pre valve closed
8/10/2011	5:02:30 PM	SiCl4 post valve closed
8/10/2011	5:02:30 PM	Bypass valve closed
8/10/2011	5:02:30 PM	Bubbler valve closed
8/10/2011	5:02:30 PM	Helium valve opened
8/10/2011	5:02:30 PM	Main Vac valve opened
8/10/2011	5:02:30 PM	Helium MFC set to  20.000000
8/10/2011	5:02:30 PM	H2 MFC set to  0.000000
8/10/2011	5:02:30 PM	BCl3 MFC set to  0.000000
8/10/2011	5:02:30 PM	PHl3 MFC set to  0.000000
8/10/2011	5:02:30 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:02:30 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:02:30 PM	Tube furnace set to 0
8/10/2011	5:03:00 PM	Helium valve closed
8/10/2011	5:03:00 PM	H2 valve closed
8/10/2011	5:03:00 PM	BCl3 valve closed
8/10/2011	5:03:00 PM	PH3 valve closed
8/10/2011	5:03:00 PM	SiCl4 pre valve closed
8/10/2011	5:03:00 PM	SiCl4 post valve closed
8/10/2011	5:03:00 PM	Bypass valve closed
8/10/2011	5:03:00 PM	Bubbler valve closed
8/10/2011	5:03:00 PM	Main Vac valve opened
8/10/2011	5:03:00 PM	Helium MFC set to  0.000000
8/10/2011	5:03:00 PM	H2 MFC set to  0.000000
8/10/2011	5:03:00 PM	BCl3 MFC set to  0.000000
8/10/2011	5:03:00 PM	PHl3 MFC set to  0.000000
8/10/2011	5:03:00 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:03:00 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:03:00 PM	Tube furnace set to 0
8/10/2011	5:03:30 PM	H2 valve closed
8/10/2011	5:03:30 PM	BCl3 valve closed
8/10/2011	5:03:30 PM	PH3 valve closed
8/10/2011	5:03:30 PM	SiCl4 pre valve closed
8/10/2011	5:03:30 PM	SiCl4 post valve closed
8/10/2011	5:03:30 PM	Bypass valve closed
8/10/2011	5:03:30 PM	Bubbler valve closed
8/10/2011	5:03:30 PM	Helium valve opened
8/10/2011	5:03:30 PM	Main Vac valve opened
8/10/2011	5:03:30 PM	Helium MFC set to  20.000000
8/10/2011	5:03:30 PM	H2 MFC set to  0.000000
8/10/2011	5:03:30 PM	BCl3 MFC set to  0.000000
8/10/2011	5:03:30 PM	PHl3 MFC set to  0.000000
8/10/2011	5:03:30 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:03:30 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:03:30 PM	Tube furnace set to 0
8/10/2011	5:04:00 PM	Helium valve closed
8/10/2011	5:04:00 PM	H2 valve closed
8/10/2011	5:04:00 PM	BCl3 valve closed
8/10/2011	5:04:00 PM	PH3 valve closed
8/10/2011	5:04:00 PM	SiCl4 pre valve closed
8/10/2011	5:04:00 PM	SiCl4 post valve closed
8/10/2011	5:04:00 PM	Bypass valve closed
8/10/2011	5:04:00 PM	Bubbler valve closed
8/10/2011	5:04:00 PM	Main Vac valve opened
8/10/2011	5:04:00 PM	Helium MFC set to  0.000000
8/10/2011	5:04:00 PM	H2 MFC set to  0.000000
8/10/2011	5:04:00 PM	BCl3 MFC set to  0.000000
8/10/2011	5:04:00 PM	PHl3 MFC set to  0.000000
8/10/2011	5:04:00 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:04:00 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:04:00 PM	Tube furnace set to 0
8/10/2011	5:04:31 PM	H2 valve closed
8/10/2011	5:04:31 PM	BCl3 valve closed
8/10/2011	5:04:31 PM	PH3 valve closed
8/10/2011	5:04:31 PM	SiCl4 pre valve closed
8/10/2011	5:04:31 PM	SiCl4 post valve closed
8/10/2011	5:04:31 PM	Bypass valve closed
8/10/2011	5:04:31 PM	Bubbler valve closed
8/10/2011	5:04:31 PM	Helium valve opened
8/10/2011	5:04:31 PM	Main Vac valve opened
8/10/2011	5:04:31 PM	Helium MFC set to  20.000000
8/10/2011	5:04:31 PM	H2 MFC set to  0.000000
8/10/2011	5:04:31 PM	BCl3 MFC set to  0.000000
8/10/2011	5:04:31 PM	PHl3 MFC set to  0.000000
8/10/2011	5:04:31 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:04:31 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:04:31 PM	Tube furnace set to 0
8/10/2011	5:05:01 PM	Helium valve closed
8/10/2011	5:05:01 PM	H2 valve closed
8/10/2011	5:05:01 PM	BCl3 valve closed
8/10/2011	5:05:01 PM	PH3 valve closed
8/10/2011	5:05:01 PM	SiCl4 pre valve closed
8/10/2011	5:05:01 PM	SiCl4 post valve closed
8/10/2011	5:05:01 PM	Bypass valve closed
8/10/2011	5:05:01 PM	Bubbler valve closed
8/10/2011	5:05:01 PM	Main Vac valve opened
8/10/2011	5:05:01 PM	Helium MFC set to  0.000000
8/10/2011	5:05:01 PM	H2 MFC set to  0.000000
8/10/2011	5:05:01 PM	BCl3 MFC set to  0.000000
8/10/2011	5:05:01 PM	PHl3 MFC set to  0.000000
8/10/2011	5:05:01 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:05:01 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:05:01 PM	Tube furnace set to 0
8/10/2011	5:05:31 PM	H2 valve closed
8/10/2011	5:05:31 PM	BCl3 valve closed
8/10/2011	5:05:31 PM	PH3 valve closed
8/10/2011	5:05:31 PM	SiCl4 pre valve closed
8/10/2011	5:05:31 PM	SiCl4 post valve closed
8/10/2011	5:05:31 PM	Bypass valve closed
8/10/2011	5:05:31 PM	Bubbler valve closed
8/10/2011	5:05:31 PM	Helium valve opened
8/10/2011	5:05:31 PM	Main Vac valve opened
8/10/2011	5:05:31 PM	Helium MFC set to  20.000000
8/10/2011	5:05:31 PM	H2 MFC set to  0.000000
8/10/2011	5:05:31 PM	BCl3 MFC set to  0.000000
8/10/2011	5:05:31 PM	PHl3 MFC set to  0.000000
8/10/2011	5:05:31 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:05:31 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:05:31 PM	Tube furnace set to 0
8/10/2011	5:06:01 PM	Helium valve closed
8/10/2011	5:06:01 PM	H2 valve closed
8/10/2011	5:06:01 PM	BCl3 valve closed
8/10/2011	5:06:01 PM	PH3 valve closed
8/10/2011	5:06:01 PM	SiCl4 pre valve closed
8/10/2011	5:06:01 PM	SiCl4 post valve closed
8/10/2011	5:06:01 PM	Bypass valve closed
8/10/2011	5:06:01 PM	Bubbler valve closed
8/10/2011	5:06:01 PM	Main Vac valve opened
8/10/2011	5:06:01 PM	Helium MFC set to  0.000000
8/10/2011	5:06:01 PM	H2 MFC set to  0.000000
8/10/2011	5:06:01 PM	BCl3 MFC set to  0.000000
8/10/2011	5:06:01 PM	PHl3 MFC set to  0.000000
8/10/2011	5:06:01 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:06:01 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:06:01 PM	Tube furnace set to 0
8/10/2011	5:06:31 PM	H2 valve closed
8/10/2011	5:06:31 PM	BCl3 valve closed
8/10/2011	5:06:31 PM	PH3 valve closed
8/10/2011	5:06:31 PM	SiCl4 pre valve closed
8/10/2011	5:06:31 PM	SiCl4 post valve closed
8/10/2011	5:06:31 PM	Bypass valve closed
8/10/2011	5:06:31 PM	Bubbler valve closed
8/10/2011	5:06:31 PM	Helium valve opened
8/10/2011	5:06:31 PM	Main Vac valve opened
8/10/2011	5:06:31 PM	Helium MFC set to  20.000000
8/10/2011	5:06:31 PM	H2 MFC set to  0.000000
8/10/2011	5:06:31 PM	BCl3 MFC set to  0.000000
8/10/2011	5:06:31 PM	PHl3 MFC set to  0.000000
8/10/2011	5:06:31 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:06:31 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:06:31 PM	Tube furnace set to 0
8/10/2011	5:07:01 PM	Helium valve closed
8/10/2011	5:07:02 PM	H2 valve closed
8/10/2011	5:07:02 PM	BCl3 valve closed
8/10/2011	5:07:02 PM	PH3 valve closed
8/10/2011	5:07:02 PM	SiCl4 pre valve closed
8/10/2011	5:07:02 PM	SiCl4 post valve closed
8/10/2011	5:07:02 PM	Bypass valve closed
8/10/2011	5:07:02 PM	Bubbler valve closed
8/10/2011	5:07:02 PM	Main Vac valve opened
8/10/2011	5:07:02 PM	Helium MFC set to  0.000000
8/10/2011	5:07:02 PM	H2 MFC set to  0.000000
8/10/2011	5:07:02 PM	BCl3 MFC set to  0.000000
8/10/2011	5:07:02 PM	PHl3 MFC set to  0.000000
8/10/2011	5:07:02 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:07:02 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:07:02 PM	Tube furnace set to 0
8/10/2011	5:07:32 PM	H2 valve closed
8/10/2011	5:07:32 PM	BCl3 valve closed
8/10/2011	5:07:32 PM	PH3 valve closed
8/10/2011	5:07:32 PM	SiCl4 pre valve closed
8/10/2011	5:07:32 PM	SiCl4 post valve closed
8/10/2011	5:07:32 PM	Bypass valve closed
8/10/2011	5:07:32 PM	Bubbler valve closed
8/10/2011	5:07:32 PM	Helium valve opened
8/10/2011	5:07:32 PM	Main Vac valve opened
8/10/2011	5:07:32 PM	Helium MFC set to  20.000000
8/10/2011	5:07:32 PM	H2 MFC set to  0.000000
8/10/2011	5:07:32 PM	BCl3 MFC set to  0.000000
8/10/2011	5:07:32 PM	PHl3 MFC set to  0.000000
8/10/2011	5:07:32 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:07:32 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:07:32 PM	Tube furnace set to 0
8/10/2011	5:08:02 PM	Helium valve closed
8/10/2011	5:08:02 PM	H2 valve closed
8/10/2011	5:08:02 PM	BCl3 valve closed
8/10/2011	5:08:02 PM	PH3 valve closed
8/10/2011	5:08:02 PM	SiCl4 pre valve closed
8/10/2011	5:08:02 PM	SiCl4 post valve closed
8/10/2011	5:08:02 PM	Bypass valve closed
8/10/2011	5:08:02 PM	Bubbler valve closed
8/10/2011	5:08:02 PM	Main Vac valve opened
8/10/2011	5:08:02 PM	Helium MFC set to  0.000000
8/10/2011	5:08:02 PM	H2 MFC set to  0.000000
8/10/2011	5:08:02 PM	BCl3 MFC set to  0.000000
8/10/2011	5:08:02 PM	PHl3 MFC set to  0.000000
8/10/2011	5:08:02 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:08:02 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:08:02 PM	Tube furnace set to 0
8/10/2011	5:08:32 PM	H2 valve closed
8/10/2011	5:08:32 PM	BCl3 valve closed
8/10/2011	5:08:32 PM	PH3 valve closed
8/10/2011	5:08:32 PM	SiCl4 pre valve closed
8/10/2011	5:08:32 PM	SiCl4 post valve closed
8/10/2011	5:08:32 PM	Bypass valve closed
8/10/2011	5:08:32 PM	Bubbler valve closed
8/10/2011	5:08:32 PM	Helium valve opened
8/10/2011	5:08:32 PM	Main Vac valve opened
8/10/2011	5:08:32 PM	Helium MFC set to  20.000000
8/10/2011	5:08:32 PM	H2 MFC set to  0.000000
8/10/2011	5:08:32 PM	BCl3 MFC set to  0.000000
8/10/2011	5:08:32 PM	PHl3 MFC set to  0.000000
8/10/2011	5:08:32 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:08:32 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:08:32 PM	Tube furnace set to 0
8/10/2011	5:09:02 PM	Helium valve closed
8/10/2011	5:09:02 PM	H2 valve closed
8/10/2011	5:09:02 PM	BCl3 valve closed
8/10/2011	5:09:02 PM	PH3 valve closed
8/10/2011	5:09:02 PM	SiCl4 pre valve closed
8/10/2011	5:09:02 PM	SiCl4 post valve closed
8/10/2011	5:09:02 PM	Bypass valve closed
8/10/2011	5:09:02 PM	Bubbler valve closed
8/10/2011	5:09:02 PM	Main Vac valve opened
8/10/2011	5:09:02 PM	Helium MFC set to  0.000000
8/10/2011	5:09:02 PM	H2 MFC set to  0.000000
8/10/2011	5:09:02 PM	BCl3 MFC set to  0.000000
8/10/2011	5:09:02 PM	PHl3 MFC set to  0.000000
8/10/2011	5:09:02 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:09:02 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:09:02 PM	Tube furnace set to 0
8/10/2011	5:09:03 PM	Run finished at 5:09 PM
8/10/2011	5:19:05 PM	Main Vac valve closed
8/10/2011	5:19:12 PM	Main Vac valve opened
8/10/2011	5:19:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	5:20:00 PM	Recipe started at 5:19 PM
8/10/2011	5:20:00 PM	Helium valve closed
8/10/2011	5:20:00 PM	H2 valve closed
8/10/2011	5:20:00 PM	BCl3 valve closed
8/10/2011	5:20:00 PM	PH3 valve closed
8/10/2011	5:20:00 PM	SiCl4 pre valve closed
8/10/2011	5:20:00 PM	SiCl4 post valve closed
8/10/2011	5:20:00 PM	Main Vac valve closed
8/10/2011	5:20:00 PM	Bypass valve closed
8/10/2011	5:20:00 PM	Bubbler valve closed
8/10/2011	5:20:00 PM	Helium MFC set to  0.000000
8/10/2011	5:20:00 PM	H2 MFC set to  0.000000
8/10/2011	5:20:00 PM	BCl3 MFC set to  0.000000
8/10/2011	5:20:00 PM	PHl3 MFC set to  0.000000
8/10/2011	5:20:00 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:20:00 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:20:00 PM	Tube furnace set to 0
8/10/2011	5:20:03 PM	H2 valve closed
8/10/2011	5:20:03 PM	BCl3 valve closed
8/10/2011	5:20:03 PM	PH3 valve closed
8/10/2011	5:20:03 PM	SiCl4 pre valve closed
8/10/2011	5:20:03 PM	SiCl4 post valve closed
8/10/2011	5:20:03 PM	Main Vac valve closed
8/10/2011	5:20:03 PM	Bypass valve closed
8/10/2011	5:20:03 PM	Bubbler valve closed
8/10/2011	5:20:03 PM	Helium valve opened
8/10/2011	5:20:03 PM	Helium MFC set to  500.000000
8/10/2011	5:20:03 PM	H2 MFC set to  0.000000
8/10/2011	5:20:03 PM	BCl3 MFC set to  0.000000
8/10/2011	5:20:03 PM	PHl3 MFC set to  0.000000
8/10/2011	5:20:03 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:20:03 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:20:03 PM	Tube furnace set to 0
8/10/2011	5:21:06 PM	Helium valve closed
8/10/2011	5:21:06 PM	H2 valve closed
8/10/2011	5:21:06 PM	BCl3 valve closed
8/10/2011	5:21:06 PM	PH3 valve closed
8/10/2011	5:21:06 PM	SiCl4 pre valve closed
8/10/2011	5:21:06 PM	SiCl4 post valve closed
8/10/2011	5:21:06 PM	Main Vac valve closed
8/10/2011	5:21:06 PM	Bypass valve closed
8/10/2011	5:21:06 PM	Bubbler valve closed
8/10/2011	5:21:06 PM	Helium MFC set to  0.000000
8/10/2011	5:21:06 PM	H2 MFC set to  0.000000
8/10/2011	5:21:06 PM	BCl3 MFC set to  0.000000
8/10/2011	5:21:06 PM	PHl3 MFC set to  0.000000
8/10/2011	5:21:06 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:21:06 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:21:06 PM	Tube furnace set to 0
8/10/2011	5:21:07 PM	Run finished at 5:21 PM
8/10/2011	5:21:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	5:33:22 PM	Recipe started at 5:33 PM
8/10/2011	5:33:22 PM	Helium valve closed
8/10/2011	5:33:22 PM	H2 valve closed
8/10/2011	5:33:22 PM	BCl3 valve closed
8/10/2011	5:33:22 PM	PH3 valve closed
8/10/2011	5:33:22 PM	SiCl4 pre valve closed
8/10/2011	5:33:22 PM	SiCl4 post valve closed
8/10/2011	5:33:22 PM	Main Vac valve closed
8/10/2011	5:33:22 PM	Bubbler valve closed
8/10/2011	5:33:22 PM	Bypass valve opened
8/10/2011	5:33:22 PM	Helium MFC set to  0.000000
8/10/2011	5:33:22 PM	H2 MFC set to  0.000000
8/10/2011	5:33:22 PM	BCl3 MFC set to  0.000000
8/10/2011	5:33:22 PM	PHl3 MFC set to  0.000000
8/10/2011	5:33:22 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:33:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:33:22 PM	Tube furnace set to 0
8/10/2011	5:34:42 PM	Helium valve closed
8/10/2011	5:34:42 PM	H2 valve closed
8/10/2011	5:34:42 PM	BCl3 valve closed
8/10/2011	5:34:42 PM	PH3 valve closed
8/10/2011	5:34:42 PM	SiCl4 pre valve closed
8/10/2011	5:34:42 PM	SiCl4 post valve closed
8/10/2011	5:34:42 PM	Main Vac valve closed
8/10/2011	5:34:42 PM	Bubbler valve closed
8/10/2011	5:34:42 PM	Bypass valve opened
8/10/2011	5:34:42 PM	Helium MFC set to  0.000000
8/10/2011	5:34:42 PM	H2 MFC set to  0.000000
8/10/2011	5:34:42 PM	BCl3 MFC set to  0.000000
8/10/2011	5:34:42 PM	PHl3 MFC set to  0.000000
8/10/2011	5:34:42 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:34:42 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:34:42 PM	Tube furnace set to 0
8/10/2011	5:35:12 PM	Helium valve closed
8/10/2011	5:35:12 PM	H2 valve closed
8/10/2011	5:35:12 PM	BCl3 valve closed
8/10/2011	5:35:12 PM	PH3 valve closed
8/10/2011	5:35:12 PM	SiCl4 pre valve closed
8/10/2011	5:35:12 PM	SiCl4 post valve closed
8/10/2011	5:35:12 PM	Bypass valve closed
8/10/2011	5:35:12 PM	Bubbler valve closed
8/10/2011	5:35:12 PM	Main Vac valve opened
8/10/2011	5:35:12 PM	Helium MFC set to  0.000000
8/10/2011	5:35:12 PM	H2 MFC set to  0.000000
8/10/2011	5:35:12 PM	BCl3 MFC set to  0.000000
8/10/2011	5:35:12 PM	PHl3 MFC set to  0.000000
8/10/2011	5:35:12 PM	SiCl4 MFC set to  0.000000
8/10/2011	5:35:12 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	5:35:12 PM	Tube furnace set to 0
8/10/2011	6:05:12 PM	H2 valve closed
8/10/2011	6:05:12 PM	BCl3 valve closed
8/10/2011	6:05:12 PM	PH3 valve closed
8/10/2011	6:05:12 PM	SiCl4 pre valve closed
8/10/2011	6:05:12 PM	SiCl4 post valve closed
8/10/2011	6:05:12 PM	Bypass valve closed
8/10/2011	6:05:12 PM	Bubbler valve closed
8/10/2011	6:05:12 PM	Helium valve opened
8/10/2011	6:05:12 PM	Main Vac valve opened
8/10/2011	6:05:12 PM	Helium MFC set to  20.000000
8/10/2011	6:05:12 PM	H2 MFC set to  0.000000
8/10/2011	6:05:12 PM	BCl3 MFC set to  0.000000
8/10/2011	6:05:12 PM	PHl3 MFC set to  0.000000
8/10/2011	6:05:12 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:05:12 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:05:12 PM	Tube furnace set to 0
8/10/2011	6:05:42 PM	Helium valve closed
8/10/2011	6:05:42 PM	H2 valve closed
8/10/2011	6:05:42 PM	BCl3 valve closed
8/10/2011	6:05:42 PM	PH3 valve closed
8/10/2011	6:05:42 PM	SiCl4 pre valve closed
8/10/2011	6:05:42 PM	SiCl4 post valve closed
8/10/2011	6:05:42 PM	Bypass valve closed
8/10/2011	6:05:42 PM	Bubbler valve closed
8/10/2011	6:05:42 PM	Main Vac valve opened
8/10/2011	6:05:42 PM	Helium MFC set to  0.000000
8/10/2011	6:05:42 PM	H2 MFC set to  0.000000
8/10/2011	6:05:42 PM	BCl3 MFC set to  0.000000
8/10/2011	6:05:42 PM	PHl3 MFC set to  0.000000
8/10/2011	6:05:42 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:05:42 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:05:43 PM	Tube furnace set to 0
8/10/2011	6:06:13 PM	H2 valve closed
8/10/2011	6:06:13 PM	BCl3 valve closed
8/10/2011	6:06:13 PM	PH3 valve closed
8/10/2011	6:06:13 PM	SiCl4 pre valve closed
8/10/2011	6:06:13 PM	SiCl4 post valve closed
8/10/2011	6:06:13 PM	Bypass valve closed
8/10/2011	6:06:13 PM	Bubbler valve closed
8/10/2011	6:06:13 PM	Helium valve opened
8/10/2011	6:06:13 PM	Main Vac valve opened
8/10/2011	6:06:13 PM	Helium MFC set to  20.000000
8/10/2011	6:06:13 PM	H2 MFC set to  0.000000
8/10/2011	6:06:13 PM	BCl3 MFC set to  0.000000
8/10/2011	6:06:13 PM	PHl3 MFC set to  0.000000
8/10/2011	6:06:13 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:06:13 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:06:13 PM	Tube furnace set to 0
8/10/2011	6:06:43 PM	Helium valve closed
8/10/2011	6:06:43 PM	H2 valve closed
8/10/2011	6:06:43 PM	BCl3 valve closed
8/10/2011	6:06:43 PM	PH3 valve closed
8/10/2011	6:06:43 PM	SiCl4 pre valve closed
8/10/2011	6:06:43 PM	SiCl4 post valve closed
8/10/2011	6:06:43 PM	Bypass valve closed
8/10/2011	6:06:43 PM	Bubbler valve closed
8/10/2011	6:06:43 PM	Main Vac valve opened
8/10/2011	6:06:43 PM	Helium MFC set to  0.000000
8/10/2011	6:06:43 PM	H2 MFC set to  0.000000
8/10/2011	6:06:43 PM	BCl3 MFC set to  0.000000
8/10/2011	6:06:43 PM	PHl3 MFC set to  0.000000
8/10/2011	6:06:43 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:06:43 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:06:43 PM	Tube furnace set to 0
8/10/2011	6:07:13 PM	H2 valve closed
8/10/2011	6:07:13 PM	BCl3 valve closed
8/10/2011	6:07:13 PM	PH3 valve closed
8/10/2011	6:07:13 PM	SiCl4 pre valve closed
8/10/2011	6:07:13 PM	SiCl4 post valve closed
8/10/2011	6:07:13 PM	Bypass valve closed
8/10/2011	6:07:13 PM	Bubbler valve closed
8/10/2011	6:07:13 PM	Helium valve opened
8/10/2011	6:07:13 PM	Main Vac valve opened
8/10/2011	6:07:13 PM	Helium MFC set to  20.000000
8/10/2011	6:07:13 PM	H2 MFC set to  0.000000
8/10/2011	6:07:13 PM	BCl3 MFC set to  0.000000
8/10/2011	6:07:13 PM	PHl3 MFC set to  0.000000
8/10/2011	6:07:13 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:07:13 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:07:13 PM	Tube furnace set to 0
8/10/2011	6:07:43 PM	Helium valve closed
8/10/2011	6:07:43 PM	H2 valve closed
8/10/2011	6:07:43 PM	BCl3 valve closed
8/10/2011	6:07:43 PM	PH3 valve closed
8/10/2011	6:07:43 PM	SiCl4 pre valve closed
8/10/2011	6:07:43 PM	SiCl4 post valve closed
8/10/2011	6:07:43 PM	Bypass valve closed
8/10/2011	6:07:43 PM	Bubbler valve closed
8/10/2011	6:07:43 PM	Main Vac valve opened
8/10/2011	6:07:43 PM	Helium MFC set to  0.000000
8/10/2011	6:07:43 PM	H2 MFC set to  0.000000
8/10/2011	6:07:43 PM	BCl3 MFC set to  0.000000
8/10/2011	6:07:43 PM	PHl3 MFC set to  0.000000
8/10/2011	6:07:43 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:07:43 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:07:43 PM	Tube furnace set to 0
8/10/2011	6:08:13 PM	H2 valve closed
8/10/2011	6:08:13 PM	BCl3 valve closed
8/10/2011	6:08:13 PM	PH3 valve closed
8/10/2011	6:08:13 PM	SiCl4 pre valve closed
8/10/2011	6:08:13 PM	SiCl4 post valve closed
8/10/2011	6:08:13 PM	Bypass valve closed
8/10/2011	6:08:13 PM	Bubbler valve closed
8/10/2011	6:08:13 PM	Helium valve opened
8/10/2011	6:08:13 PM	Main Vac valve opened
8/10/2011	6:08:13 PM	Helium MFC set to  20.000000
8/10/2011	6:08:13 PM	H2 MFC set to  0.000000
8/10/2011	6:08:13 PM	BCl3 MFC set to  0.000000
8/10/2011	6:08:13 PM	PHl3 MFC set to  0.000000
8/10/2011	6:08:13 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:08:13 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:08:14 PM	Tube furnace set to 0
8/10/2011	6:08:44 PM	Helium valve closed
8/10/2011	6:08:44 PM	H2 valve closed
8/10/2011	6:08:44 PM	BCl3 valve closed
8/10/2011	6:08:44 PM	PH3 valve closed
8/10/2011	6:08:44 PM	SiCl4 pre valve closed
8/10/2011	6:08:44 PM	SiCl4 post valve closed
8/10/2011	6:08:44 PM	Bypass valve closed
8/10/2011	6:08:44 PM	Bubbler valve closed
8/10/2011	6:08:44 PM	Main Vac valve opened
8/10/2011	6:08:44 PM	Helium MFC set to  0.000000
8/10/2011	6:08:44 PM	H2 MFC set to  0.000000
8/10/2011	6:08:44 PM	BCl3 MFC set to  0.000000
8/10/2011	6:08:44 PM	PHl3 MFC set to  0.000000
8/10/2011	6:08:44 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:08:44 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:08:44 PM	Tube furnace set to 0
8/10/2011	6:09:14 PM	H2 valve closed
8/10/2011	6:09:14 PM	BCl3 valve closed
8/10/2011	6:09:14 PM	PH3 valve closed
8/10/2011	6:09:14 PM	SiCl4 pre valve closed
8/10/2011	6:09:14 PM	SiCl4 post valve closed
8/10/2011	6:09:14 PM	Bypass valve closed
8/10/2011	6:09:14 PM	Bubbler valve closed
8/10/2011	6:09:14 PM	Helium valve opened
8/10/2011	6:09:14 PM	Main Vac valve opened
8/10/2011	6:09:14 PM	Helium MFC set to  20.000000
8/10/2011	6:09:14 PM	H2 MFC set to  0.000000
8/10/2011	6:09:14 PM	BCl3 MFC set to  0.000000
8/10/2011	6:09:14 PM	PHl3 MFC set to  0.000000
8/10/2011	6:09:14 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:09:14 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:09:14 PM	Tube furnace set to 0
8/10/2011	6:09:44 PM	Helium valve closed
8/10/2011	6:09:44 PM	H2 valve closed
8/10/2011	6:09:44 PM	BCl3 valve closed
8/10/2011	6:09:44 PM	PH3 valve closed
8/10/2011	6:09:44 PM	SiCl4 pre valve closed
8/10/2011	6:09:44 PM	SiCl4 post valve closed
8/10/2011	6:09:44 PM	Bypass valve closed
8/10/2011	6:09:44 PM	Bubbler valve closed
8/10/2011	6:09:44 PM	Main Vac valve opened
8/10/2011	6:09:44 PM	Helium MFC set to  0.000000
8/10/2011	6:09:44 PM	H2 MFC set to  0.000000
8/10/2011	6:09:44 PM	BCl3 MFC set to  0.000000
8/10/2011	6:09:44 PM	PHl3 MFC set to  0.000000
8/10/2011	6:09:44 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:09:44 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:09:44 PM	Tube furnace set to 0
8/10/2011	6:10:14 PM	H2 valve closed
8/10/2011	6:10:14 PM	BCl3 valve closed
8/10/2011	6:10:14 PM	PH3 valve closed
8/10/2011	6:10:14 PM	SiCl4 pre valve closed
8/10/2011	6:10:14 PM	SiCl4 post valve closed
8/10/2011	6:10:14 PM	Bypass valve closed
8/10/2011	6:10:14 PM	Bubbler valve closed
8/10/2011	6:10:14 PM	Helium valve opened
8/10/2011	6:10:14 PM	Main Vac valve opened
8/10/2011	6:10:14 PM	Helium MFC set to  20.000000
8/10/2011	6:10:14 PM	H2 MFC set to  0.000000
8/10/2011	6:10:14 PM	BCl3 MFC set to  0.000000
8/10/2011	6:10:14 PM	PHl3 MFC set to  0.000000
8/10/2011	6:10:14 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:10:14 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:10:14 PM	Tube furnace set to 0
8/10/2011	6:10:44 PM	Helium valve closed
8/10/2011	6:10:44 PM	H2 valve closed
8/10/2011	6:10:44 PM	BCl3 valve closed
8/10/2011	6:10:44 PM	PH3 valve closed
8/10/2011	6:10:44 PM	SiCl4 pre valve closed
8/10/2011	6:10:44 PM	SiCl4 post valve closed
8/10/2011	6:10:44 PM	Bypass valve closed
8/10/2011	6:10:44 PM	Bubbler valve closed
8/10/2011	6:10:44 PM	Main Vac valve opened
8/10/2011	6:10:44 PM	Helium MFC set to  0.000000
8/10/2011	6:10:44 PM	H2 MFC set to  0.000000
8/10/2011	6:10:44 PM	BCl3 MFC set to  0.000000
8/10/2011	6:10:44 PM	PHl3 MFC set to  0.000000
8/10/2011	6:10:44 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:10:44 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:10:45 PM	Tube furnace set to 0
8/10/2011	6:11:15 PM	H2 valve closed
8/10/2011	6:11:15 PM	BCl3 valve closed
8/10/2011	6:11:15 PM	PH3 valve closed
8/10/2011	6:11:15 PM	SiCl4 pre valve closed
8/10/2011	6:11:15 PM	SiCl4 post valve closed
8/10/2011	6:11:15 PM	Bypass valve closed
8/10/2011	6:11:15 PM	Bubbler valve closed
8/10/2011	6:11:15 PM	Helium valve opened
8/10/2011	6:11:15 PM	Main Vac valve opened
8/10/2011	6:11:15 PM	Helium MFC set to  20.000000
8/10/2011	6:11:15 PM	H2 MFC set to  0.000000
8/10/2011	6:11:15 PM	BCl3 MFC set to  0.000000
8/10/2011	6:11:15 PM	PHl3 MFC set to  0.000000
8/10/2011	6:11:15 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:11:15 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:11:15 PM	Tube furnace set to 0
8/10/2011	6:11:45 PM	Helium valve closed
8/10/2011	6:11:45 PM	H2 valve closed
8/10/2011	6:11:45 PM	BCl3 valve closed
8/10/2011	6:11:45 PM	PH3 valve closed
8/10/2011	6:11:45 PM	SiCl4 pre valve closed
8/10/2011	6:11:45 PM	SiCl4 post valve closed
8/10/2011	6:11:45 PM	Bypass valve closed
8/10/2011	6:11:45 PM	Bubbler valve closed
8/10/2011	6:11:45 PM	Main Vac valve opened
8/10/2011	6:11:45 PM	Helium MFC set to  0.000000
8/10/2011	6:11:45 PM	H2 MFC set to  0.000000
8/10/2011	6:11:45 PM	BCl3 MFC set to  0.000000
8/10/2011	6:11:45 PM	PHl3 MFC set to  0.000000
8/10/2011	6:11:45 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:11:45 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:11:45 PM	Tube furnace set to 0
8/10/2011	6:12:15 PM	H2 valve closed
8/10/2011	6:12:15 PM	BCl3 valve closed
8/10/2011	6:12:15 PM	PH3 valve closed
8/10/2011	6:12:15 PM	SiCl4 pre valve closed
8/10/2011	6:12:15 PM	SiCl4 post valve closed
8/10/2011	6:12:15 PM	Bypass valve closed
8/10/2011	6:12:15 PM	Bubbler valve closed
8/10/2011	6:12:15 PM	Helium valve opened
8/10/2011	6:12:15 PM	Main Vac valve opened
8/10/2011	6:12:15 PM	Helium MFC set to  20.000000
8/10/2011	6:12:15 PM	H2 MFC set to  0.000000
8/10/2011	6:12:15 PM	BCl3 MFC set to  0.000000
8/10/2011	6:12:15 PM	PHl3 MFC set to  0.000000
8/10/2011	6:12:15 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:12:15 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:12:15 PM	Tube furnace set to 0
8/10/2011	6:12:45 PM	Helium valve closed
8/10/2011	6:12:45 PM	H2 valve closed
8/10/2011	6:12:45 PM	BCl3 valve closed
8/10/2011	6:12:45 PM	PH3 valve closed
8/10/2011	6:12:45 PM	SiCl4 pre valve closed
8/10/2011	6:12:45 PM	SiCl4 post valve closed
8/10/2011	6:12:45 PM	Bypass valve closed
8/10/2011	6:12:45 PM	Bubbler valve closed
8/10/2011	6:12:45 PM	Main Vac valve opened
8/10/2011	6:12:45 PM	Helium MFC set to  0.000000
8/10/2011	6:12:45 PM	H2 MFC set to  0.000000
8/10/2011	6:12:45 PM	BCl3 MFC set to  0.000000
8/10/2011	6:12:45 PM	PHl3 MFC set to  0.000000
8/10/2011	6:12:45 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:12:45 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:12:46 PM	Tube furnace set to 0
8/10/2011	6:13:16 PM	H2 valve closed
8/10/2011	6:13:16 PM	BCl3 valve closed
8/10/2011	6:13:16 PM	PH3 valve closed
8/10/2011	6:13:16 PM	SiCl4 pre valve closed
8/10/2011	6:13:16 PM	SiCl4 post valve closed
8/10/2011	6:13:16 PM	Bypass valve closed
8/10/2011	6:13:16 PM	Bubbler valve closed
8/10/2011	6:13:16 PM	Helium valve opened
8/10/2011	6:13:16 PM	Main Vac valve opened
8/10/2011	6:13:16 PM	Helium MFC set to  20.000000
8/10/2011	6:13:16 PM	H2 MFC set to  0.000000
8/10/2011	6:13:16 PM	BCl3 MFC set to  0.000000
8/10/2011	6:13:16 PM	PHl3 MFC set to  0.000000
8/10/2011	6:13:16 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:13:16 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:13:16 PM	Tube furnace set to 0
8/10/2011	6:13:46 PM	Helium valve closed
8/10/2011	6:13:46 PM	H2 valve closed
8/10/2011	6:13:46 PM	BCl3 valve closed
8/10/2011	6:13:46 PM	PH3 valve closed
8/10/2011	6:13:46 PM	SiCl4 pre valve closed
8/10/2011	6:13:46 PM	SiCl4 post valve closed
8/10/2011	6:13:46 PM	Bypass valve closed
8/10/2011	6:13:46 PM	Bubbler valve closed
8/10/2011	6:13:46 PM	Main Vac valve opened
8/10/2011	6:13:46 PM	Helium MFC set to  0.000000
8/10/2011	6:13:46 PM	H2 MFC set to  0.000000
8/10/2011	6:13:46 PM	BCl3 MFC set to  0.000000
8/10/2011	6:13:46 PM	PHl3 MFC set to  0.000000
8/10/2011	6:13:46 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:13:46 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:13:46 PM	Tube furnace set to 0
8/10/2011	6:14:16 PM	H2 valve closed
8/10/2011	6:14:16 PM	BCl3 valve closed
8/10/2011	6:14:16 PM	PH3 valve closed
8/10/2011	6:14:16 PM	SiCl4 pre valve closed
8/10/2011	6:14:16 PM	SiCl4 post valve closed
8/10/2011	6:14:16 PM	Bypass valve closed
8/10/2011	6:14:16 PM	Bubbler valve closed
8/10/2011	6:14:16 PM	Helium valve opened
8/10/2011	6:14:16 PM	Main Vac valve opened
8/10/2011	6:14:16 PM	Helium MFC set to  20.000000
8/10/2011	6:14:16 PM	H2 MFC set to  0.000000
8/10/2011	6:14:16 PM	BCl3 MFC set to  0.000000
8/10/2011	6:14:16 PM	PHl3 MFC set to  0.000000
8/10/2011	6:14:16 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:14:16 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:14:16 PM	Tube furnace set to 0
8/10/2011	6:14:46 PM	Helium valve closed
8/10/2011	6:14:46 PM	H2 valve closed
8/10/2011	6:14:46 PM	BCl3 valve closed
8/10/2011	6:14:46 PM	PH3 valve closed
8/10/2011	6:14:46 PM	SiCl4 pre valve closed
8/10/2011	6:14:46 PM	SiCl4 post valve closed
8/10/2011	6:14:46 PM	Bypass valve closed
8/10/2011	6:14:46 PM	Bubbler valve closed
8/10/2011	6:14:46 PM	Main Vac valve opened
8/10/2011	6:14:46 PM	Helium MFC set to  0.000000
8/10/2011	6:14:46 PM	H2 MFC set to  0.000000
8/10/2011	6:14:46 PM	BCl3 MFC set to  0.000000
8/10/2011	6:14:46 PM	PHl3 MFC set to  0.000000
8/10/2011	6:14:46 PM	SiCl4 MFC set to  0.000000
8/10/2011	6:14:46 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	6:14:46 PM	Tube furnace set to 0
8/10/2011	6:14:47 PM	Run finished at 6:14 PM
8/10/2011	7:29:59 PM	Main Vac valve closed
8/10/2011	7:30:09 PM	Main Vac valve opened
8/10/2011	7:30:39 PM	Recipe started at 7:30 PM
8/10/2011	7:30:39 PM	Helium valve closed
8/10/2011	7:30:39 PM	H2 valve closed
8/10/2011	7:30:39 PM	BCl3 valve closed
8/10/2011	7:30:39 PM	PH3 valve closed
8/10/2011	7:30:39 PM	SiCl4 pre valve closed
8/10/2011	7:30:39 PM	SiCl4 post valve closed
8/10/2011	7:30:39 PM	Main Vac valve closed
8/10/2011	7:30:39 PM	Bypass valve closed
8/10/2011	7:30:39 PM	Bubbler valve closed
8/10/2011	7:30:39 PM	Helium MFC set to  0.000000
8/10/2011	7:30:39 PM	H2 MFC set to  0.000000
8/10/2011	7:30:39 PM	BCl3 MFC set to  0.000000
8/10/2011	7:30:39 PM	PHl3 MFC set to  0.000000
8/10/2011	7:30:39 PM	SiCl4 MFC set to  0.000000
8/10/2011	7:30:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:30:39 PM	Tube furnace set to 0
8/10/2011	7:30:42 PM	Helium valve closed
8/10/2011	7:30:42 PM	BCl3 valve closed
8/10/2011	7:30:42 PM	PH3 valve closed
8/10/2011	7:30:42 PM	SiCl4 pre valve closed
8/10/2011	7:30:42 PM	SiCl4 post valve closed
8/10/2011	7:30:42 PM	Main Vac valve closed
8/10/2011	7:30:42 PM	Bypass valve closed
8/10/2011	7:30:42 PM	Bubbler valve closed
8/10/2011	7:30:42 PM	H2 valve opened
8/10/2011	7:30:42 PM	Helium MFC set to  0.000000
8/10/2011	7:30:42 PM	H2 MFC set to  500.000000
8/10/2011	7:30:42 PM	BCl3 MFC set to  0.000000
8/10/2011	7:30:42 PM	PHl3 MFC set to  0.000000
8/10/2011	7:30:42 PM	SiCl4 MFC set to  0.000000
8/10/2011	7:30:42 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:30:42 PM	Tube furnace set to 0
8/10/2011	7:31:49 PM	Helium valve closed
8/10/2011	7:31:49 PM	BCl3 valve closed
8/10/2011	7:31:49 PM	PH3 valve closed
8/10/2011	7:31:49 PM	SiCl4 pre valve closed
8/10/2011	7:31:49 PM	SiCl4 post valve closed
8/10/2011	7:31:49 PM	Main Vac valve closed
8/10/2011	7:31:49 PM	Bypass valve closed
8/10/2011	7:31:49 PM	H2 valve opened
8/10/2011	7:31:49 PM	Bubbler valve opened
8/10/2011	7:31:50 PM	Helium MFC set to  0.000000
8/10/2011	7:31:50 PM	H2 MFC set to  500.000000
8/10/2011	7:31:50 PM	BCl3 MFC set to  0.000000
8/10/2011	7:31:50 PM	PHl3 MFC set to  0.000000
8/10/2011	7:31:50 PM	SiCl4 MFC set to  0.000000
8/10/2011	7:31:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:31:50 PM	Tube furnace set to 0
8/10/2011	7:31:51 PM	Helium valve closed
8/10/2011	7:31:51 PM	BCl3 valve closed
8/10/2011	7:31:51 PM	PH3 valve closed
8/10/2011	7:31:51 PM	SiCl4 pre valve closed
8/10/2011	7:31:51 PM	SiCl4 post valve closed
8/10/2011	7:31:51 PM	Main Vac valve closed
8/10/2011	7:31:51 PM	Bypass valve closed
8/10/2011	7:31:51 PM	H2 valve opened
8/10/2011	7:31:51 PM	Bubbler valve opened
8/10/2011	7:31:51 PM	Helium MFC set to  0.000000
8/10/2011	7:31:51 PM	H2 MFC set to  500.000000
8/10/2011	7:31:51 PM	BCl3 MFC set to  0.000000
8/10/2011	7:31:51 PM	PHl3 MFC set to  0.000000
8/10/2011	7:31:51 PM	SiCl4 MFC set to  0.000000
8/10/2011	7:31:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:31:51 PM	Tube furnace set to 1000
8/10/2011	7:51:51 PM	Helium valve closed
8/10/2011	7:51:51 PM	PH3 valve closed
8/10/2011	7:51:51 PM	Main Vac valve closed
8/10/2011	7:51:51 PM	Bypass valve closed
8/10/2011	7:51:51 PM	H2 valve opened
8/10/2011	7:51:51 PM	BCl3 valve opened
8/10/2011	7:51:51 PM	SiCl4 pre valve opened
8/10/2011	7:51:51 PM	SiCl4 post valve opened
8/10/2011	7:51:51 PM	Bubbler valve opened
8/10/2011	7:51:51 PM	Helium MFC set to  0.000000
8/10/2011	7:51:51 PM	H2 MFC set to  500.000000
8/10/2011	7:51:51 PM	BCl3 MFC set to  2.500000
8/10/2011	7:51:51 PM	PHl3 MFC set to  0.000000
8/10/2011	7:51:51 PM	SiCl4 MFC set to  50.000000
8/10/2011	7:51:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	7:51:51 PM	Tube furnace set to 1000
8/10/2011	8:06:21 PM	Helium valve closed
8/10/2011	8:06:21 PM	BCl3 valve closed
8/10/2011	8:06:21 PM	PH3 valve closed
8/10/2011	8:06:21 PM	SiCl4 pre valve closed
8/10/2011	8:06:21 PM	SiCl4 post valve closed
8/10/2011	8:06:21 PM	Main Vac valve closed
8/10/2011	8:06:21 PM	Bypass valve closed
8/10/2011	8:06:21 PM	H2 valve opened
8/10/2011	8:06:21 PM	Bubbler valve opened
8/10/2011	8:06:21 PM	Helium MFC set to  0.000000
8/10/2011	8:06:21 PM	H2 MFC set to  500.000000
8/10/2011	8:06:21 PM	BCl3 MFC set to  0.000000
8/10/2011	8:06:21 PM	PHl3 MFC set to  0.000000
8/10/2011	8:06:21 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:06:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:06:21 PM	Tube furnace set to 750
8/10/2011	8:11:21 PM	H2 valve closed
8/10/2011	8:11:21 PM	BCl3 valve closed
8/10/2011	8:11:21 PM	PH3 valve closed
8/10/2011	8:11:21 PM	SiCl4 pre valve closed
8/10/2011	8:11:21 PM	SiCl4 post valve closed
8/10/2011	8:11:21 PM	Main Vac valve closed
8/10/2011	8:11:21 PM	Bypass valve closed
8/10/2011	8:11:21 PM	Helium valve opened
8/10/2011	8:11:21 PM	Bubbler valve opened
8/10/2011	8:11:21 PM	Helium MFC set to  500.000000
8/10/2011	8:11:21 PM	H2 MFC set to  0.000000
8/10/2011	8:11:21 PM	BCl3 MFC set to  0.000000
8/10/2011	8:11:21 PM	PHl3 MFC set to  0.000000
8/10/2011	8:11:21 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:11:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:11:21 PM	Tube furnace set to 0
8/10/2011	8:31:21 PM	Helium valve closed
8/10/2011	8:31:21 PM	H2 valve closed
8/10/2011	8:31:21 PM	BCl3 valve closed
8/10/2011	8:31:21 PM	PH3 valve closed
8/10/2011	8:31:21 PM	SiCl4 pre valve closed
8/10/2011	8:31:21 PM	SiCl4 post valve closed
8/10/2011	8:31:21 PM	Main Vac valve closed
8/10/2011	8:31:21 PM	Bypass valve closed
8/10/2011	8:31:21 PM	Bubbler valve closed
8/10/2011	8:31:21 PM	Helium MFC set to  0.000000
8/10/2011	8:31:21 PM	H2 MFC set to  0.000000
8/10/2011	8:31:21 PM	BCl3 MFC set to  0.000000
8/10/2011	8:31:21 PM	PHl3 MFC set to  0.000000
8/10/2011	8:31:21 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:31:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:31:21 PM	Tube furnace set to 0
8/10/2011	8:31:22 PM	Run finished at 8:31 PM
8/10/2011	8:48:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	8:48:32 PM	Recipe started at 8:48 PM
8/10/2011	8:48:32 PM	Helium valve closed
8/10/2011	8:48:32 PM	H2 valve closed
8/10/2011	8:48:32 PM	BCl3 valve closed
8/10/2011	8:48:32 PM	PH3 valve closed
8/10/2011	8:48:32 PM	SiCl4 pre valve closed
8/10/2011	8:48:32 PM	SiCl4 post valve closed
8/10/2011	8:48:32 PM	Main Vac valve closed
8/10/2011	8:48:32 PM	Bypass valve closed
8/10/2011	8:48:32 PM	Bubbler valve closed
8/10/2011	8:48:32 PM	Helium MFC set to  0.000000
8/10/2011	8:48:32 PM	H2 MFC set to  0.000000
8/10/2011	8:48:32 PM	BCl3 MFC set to  0.000000
8/10/2011	8:48:32 PM	PHl3 MFC set to  0.000000
8/10/2011	8:48:32 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:48:32 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:48:32 PM	Tube furnace set to 0
8/10/2011	8:48:35 PM	H2 valve closed
8/10/2011	8:48:35 PM	BCl3 valve closed
8/10/2011	8:48:35 PM	PH3 valve closed
8/10/2011	8:48:35 PM	SiCl4 pre valve closed
8/10/2011	8:48:35 PM	SiCl4 post valve closed
8/10/2011	8:48:35 PM	Main Vac valve closed
8/10/2011	8:48:35 PM	Bypass valve closed
8/10/2011	8:48:35 PM	Bubbler valve closed
8/10/2011	8:48:35 PM	Helium valve opened
8/10/2011	8:48:35 PM	Helium MFC set to  500.000000
8/10/2011	8:48:35 PM	H2 MFC set to  0.000000
8/10/2011	8:48:35 PM	BCl3 MFC set to  0.000000
8/10/2011	8:48:35 PM	PHl3 MFC set to  0.000000
8/10/2011	8:48:35 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:48:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:48:35 PM	Tube furnace set to 0
8/10/2011	8:48:37 PM	Helium valve closed
8/10/2011	8:48:37 PM	H2 valve closed
8/10/2011	8:48:37 PM	BCl3 valve closed
8/10/2011	8:48:37 PM	PH3 valve closed
8/10/2011	8:48:37 PM	SiCl4 pre valve closed
8/10/2011	8:48:37 PM	SiCl4 post valve closed
8/10/2011	8:48:37 PM	Main Vac valve closed
8/10/2011	8:48:37 PM	Bypass valve closed
8/10/2011	8:48:37 PM	Bubbler valve closed
8/10/2011	8:48:37 PM	Helium MFC set to  0.000000
8/10/2011	8:48:37 PM	H2 MFC set to  0.000000
8/10/2011	8:48:37 PM	BCl3 MFC set to  0.000000
8/10/2011	8:48:37 PM	PHl3 MFC set to  0.000000
8/10/2011	8:48:37 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:48:37 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:48:37 PM	Tube furnace set to 0
8/10/2011	8:48:38 PM	Run finished at 8:48 PM
8/10/2011	8:48:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	8:58:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	8:58:20 PM	Recipe started at 8:58 PM
8/10/2011	8:58:20 PM	Helium valve closed
8/10/2011	8:58:20 PM	H2 valve closed
8/10/2011	8:58:20 PM	BCl3 valve closed
8/10/2011	8:58:20 PM	PH3 valve closed
8/10/2011	8:58:20 PM	SiCl4 pre valve closed
8/10/2011	8:58:20 PM	SiCl4 post valve closed
8/10/2011	8:58:20 PM	Main Vac valve closed
8/10/2011	8:58:20 PM	Bypass valve closed
8/10/2011	8:58:20 PM	Bubbler valve closed
8/10/2011	8:58:20 PM	Helium MFC set to  0.000000
8/10/2011	8:58:20 PM	H2 MFC set to  0.000000
8/10/2011	8:58:20 PM	BCl3 MFC set to  0.000000
8/10/2011	8:58:20 PM	PHl3 MFC set to  0.000000
8/10/2011	8:58:20 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:58:20 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:58:21 PM	Tube furnace set to 0
8/10/2011	8:58:24 PM	H2 valve closed
8/10/2011	8:58:24 PM	BCl3 valve closed
8/10/2011	8:58:24 PM	PH3 valve closed
8/10/2011	8:58:24 PM	SiCl4 pre valve closed
8/10/2011	8:58:24 PM	SiCl4 post valve closed
8/10/2011	8:58:24 PM	Main Vac valve closed
8/10/2011	8:58:24 PM	Bypass valve closed
8/10/2011	8:58:24 PM	Bubbler valve closed
8/10/2011	8:58:24 PM	Helium valve opened
8/10/2011	8:58:24 PM	Helium MFC set to  500.000000
8/10/2011	8:58:24 PM	H2 MFC set to  0.000000
8/10/2011	8:58:24 PM	BCl3 MFC set to  0.000000
8/10/2011	8:58:24 PM	PHl3 MFC set to  0.000000
8/10/2011	8:58:24 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:58:24 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:58:24 PM	Tube furnace set to 0
8/10/2011	8:58:28 PM	Helium valve closed
8/10/2011	8:58:28 PM	H2 valve closed
8/10/2011	8:58:28 PM	BCl3 valve closed
8/10/2011	8:58:28 PM	PH3 valve closed
8/10/2011	8:58:28 PM	SiCl4 pre valve closed
8/10/2011	8:58:28 PM	SiCl4 post valve closed
8/10/2011	8:58:28 PM	Main Vac valve closed
8/10/2011	8:58:28 PM	Bypass valve closed
8/10/2011	8:58:28 PM	Bubbler valve closed
8/10/2011	8:58:28 PM	Helium MFC set to  0.000000
8/10/2011	8:58:28 PM	H2 MFC set to  0.000000
8/10/2011	8:58:28 PM	BCl3 MFC set to  0.000000
8/10/2011	8:58:28 PM	PHl3 MFC set to  0.000000
8/10/2011	8:58:28 PM	SiCl4 MFC set to  0.000000
8/10/2011	8:58:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	8:58:28 PM	Tube furnace set to 0
8/10/2011	8:58:29 PM	Run finished at 8:58 PM
8/10/2011	8:58:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	9:03:03 PM	Recipe started at 9:02 PM
8/10/2011	9:03:03 PM	Helium valve closed
8/10/2011	9:03:03 PM	H2 valve closed
8/10/2011	9:03:03 PM	BCl3 valve closed
8/10/2011	9:03:03 PM	PH3 valve closed
8/10/2011	9:03:03 PM	SiCl4 pre valve closed
8/10/2011	9:03:03 PM	SiCl4 post valve closed
8/10/2011	9:03:03 PM	Main Vac valve closed
8/10/2011	9:03:03 PM	Bubbler valve closed
8/10/2011	9:03:03 PM	Bypass valve opened
8/10/2011	9:03:03 PM	Helium MFC set to  0.000000
8/10/2011	9:03:03 PM	H2 MFC set to  0.000000
8/10/2011	9:03:03 PM	BCl3 MFC set to  0.000000
8/10/2011	9:03:03 PM	PHl3 MFC set to  0.000000
8/10/2011	9:03:03 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:03:03 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:03:03 PM	Tube furnace set to 0
8/10/2011	9:04:07 PM	Helium valve closed
8/10/2011	9:04:07 PM	H2 valve closed
8/10/2011	9:04:08 PM	BCl3 valve closed
8/10/2011	9:04:08 PM	PH3 valve closed
8/10/2011	9:04:08 PM	SiCl4 pre valve closed
8/10/2011	9:04:08 PM	SiCl4 post valve closed
8/10/2011	9:04:08 PM	Main Vac valve closed
8/10/2011	9:04:08 PM	Bubbler valve closed
8/10/2011	9:04:08 PM	Bypass valve opened
8/10/2011	9:04:08 PM	Helium MFC set to  0.000000
8/10/2011	9:04:08 PM	H2 MFC set to  0.000000
8/10/2011	9:04:08 PM	BCl3 MFC set to  0.000000
8/10/2011	9:04:08 PM	PHl3 MFC set to  0.000000
8/10/2011	9:04:08 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:04:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:04:08 PM	Tube furnace set to 0
8/10/2011	9:04:38 PM	Helium valve closed
8/10/2011	9:04:38 PM	H2 valve closed
8/10/2011	9:04:38 PM	BCl3 valve closed
8/10/2011	9:04:38 PM	PH3 valve closed
8/10/2011	9:04:38 PM	SiCl4 pre valve closed
8/10/2011	9:04:38 PM	SiCl4 post valve closed
8/10/2011	9:04:38 PM	Bypass valve closed
8/10/2011	9:04:38 PM	Bubbler valve closed
8/10/2011	9:04:38 PM	Main Vac valve opened
8/10/2011	9:04:38 PM	Helium MFC set to  0.000000
8/10/2011	9:04:38 PM	H2 MFC set to  0.000000
8/10/2011	9:04:38 PM	BCl3 MFC set to  0.000000
8/10/2011	9:04:38 PM	PHl3 MFC set to  0.000000
8/10/2011	9:04:38 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:04:38 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:04:38 PM	Tube furnace set to 0
8/10/2011	9:34:38 PM	H2 valve closed
8/10/2011	9:34:38 PM	BCl3 valve closed
8/10/2011	9:34:38 PM	PH3 valve closed
8/10/2011	9:34:38 PM	SiCl4 pre valve closed
8/10/2011	9:34:38 PM	SiCl4 post valve closed
8/10/2011	9:34:38 PM	Bypass valve closed
8/10/2011	9:34:38 PM	Bubbler valve closed
8/10/2011	9:34:38 PM	Helium valve opened
8/10/2011	9:34:38 PM	Main Vac valve opened
8/10/2011	9:34:38 PM	Helium MFC set to  20.000000
8/10/2011	9:34:38 PM	H2 MFC set to  0.000000
8/10/2011	9:34:38 PM	BCl3 MFC set to  0.000000
8/10/2011	9:34:38 PM	PHl3 MFC set to  0.000000
8/10/2011	9:34:38 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:34:38 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:34:38 PM	Tube furnace set to 0
8/10/2011	9:35:08 PM	Helium valve closed
8/10/2011	9:35:08 PM	H2 valve closed
8/10/2011	9:35:08 PM	BCl3 valve closed
8/10/2011	9:35:08 PM	PH3 valve closed
8/10/2011	9:35:08 PM	SiCl4 pre valve closed
8/10/2011	9:35:08 PM	SiCl4 post valve closed
8/10/2011	9:35:08 PM	Bypass valve closed
8/10/2011	9:35:08 PM	Bubbler valve closed
8/10/2011	9:35:08 PM	Main Vac valve opened
8/10/2011	9:35:08 PM	Helium MFC set to  0.000000
8/10/2011	9:35:08 PM	H2 MFC set to  0.000000
8/10/2011	9:35:08 PM	BCl3 MFC set to  0.000000
8/10/2011	9:35:08 PM	PHl3 MFC set to  0.000000
8/10/2011	9:35:08 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:35:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:35:08 PM	Tube furnace set to 0
8/10/2011	9:35:38 PM	H2 valve closed
8/10/2011	9:35:38 PM	BCl3 valve closed
8/10/2011	9:35:38 PM	PH3 valve closed
8/10/2011	9:35:38 PM	SiCl4 pre valve closed
8/10/2011	9:35:38 PM	SiCl4 post valve closed
8/10/2011	9:35:38 PM	Bypass valve closed
8/10/2011	9:35:38 PM	Bubbler valve closed
8/10/2011	9:35:38 PM	Helium valve opened
8/10/2011	9:35:38 PM	Main Vac valve opened
8/10/2011	9:35:38 PM	Helium MFC set to  20.000000
8/10/2011	9:35:38 PM	H2 MFC set to  0.000000
8/10/2011	9:35:38 PM	BCl3 MFC set to  0.000000
8/10/2011	9:35:38 PM	PHl3 MFC set to  0.000000
8/10/2011	9:35:38 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:35:38 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:35:38 PM	Tube furnace set to 0
8/10/2011	9:36:08 PM	Helium valve closed
8/10/2011	9:36:08 PM	H2 valve closed
8/10/2011	9:36:08 PM	BCl3 valve closed
8/10/2011	9:36:08 PM	PH3 valve closed
8/10/2011	9:36:08 PM	SiCl4 pre valve closed
8/10/2011	9:36:08 PM	SiCl4 post valve closed
8/10/2011	9:36:08 PM	Bypass valve closed
8/10/2011	9:36:08 PM	Bubbler valve closed
8/10/2011	9:36:08 PM	Main Vac valve opened
8/10/2011	9:36:08 PM	Helium MFC set to  0.000000
8/10/2011	9:36:08 PM	H2 MFC set to  0.000000
8/10/2011	9:36:08 PM	BCl3 MFC set to  0.000000
8/10/2011	9:36:08 PM	PHl3 MFC set to  0.000000
8/10/2011	9:36:08 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:36:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:36:09 PM	Tube furnace set to 0
8/10/2011	9:36:39 PM	H2 valve closed
8/10/2011	9:36:39 PM	BCl3 valve closed
8/10/2011	9:36:39 PM	PH3 valve closed
8/10/2011	9:36:39 PM	SiCl4 pre valve closed
8/10/2011	9:36:39 PM	SiCl4 post valve closed
8/10/2011	9:36:39 PM	Bypass valve closed
8/10/2011	9:36:39 PM	Bubbler valve closed
8/10/2011	9:36:39 PM	Helium valve opened
8/10/2011	9:36:39 PM	Main Vac valve opened
8/10/2011	9:36:39 PM	Helium MFC set to  20.000000
8/10/2011	9:36:39 PM	H2 MFC set to  0.000000
8/10/2011	9:36:39 PM	BCl3 MFC set to  0.000000
8/10/2011	9:36:39 PM	PHl3 MFC set to  0.000000
8/10/2011	9:36:39 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:36:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:36:39 PM	Tube furnace set to 0
8/10/2011	9:37:09 PM	Helium valve closed
8/10/2011	9:37:09 PM	H2 valve closed
8/10/2011	9:37:09 PM	BCl3 valve closed
8/10/2011	9:37:09 PM	PH3 valve closed
8/10/2011	9:37:09 PM	SiCl4 pre valve closed
8/10/2011	9:37:09 PM	SiCl4 post valve closed
8/10/2011	9:37:09 PM	Bypass valve closed
8/10/2011	9:37:09 PM	Bubbler valve closed
8/10/2011	9:37:09 PM	Main Vac valve opened
8/10/2011	9:37:09 PM	Helium MFC set to  0.000000
8/10/2011	9:37:09 PM	H2 MFC set to  0.000000
8/10/2011	9:37:09 PM	BCl3 MFC set to  0.000000
8/10/2011	9:37:09 PM	PHl3 MFC set to  0.000000
8/10/2011	9:37:09 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:37:09 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:37:09 PM	Tube furnace set to 0
8/10/2011	9:37:39 PM	H2 valve closed
8/10/2011	9:37:39 PM	BCl3 valve closed
8/10/2011	9:37:39 PM	PH3 valve closed
8/10/2011	9:37:39 PM	SiCl4 pre valve closed
8/10/2011	9:37:39 PM	SiCl4 post valve closed
8/10/2011	9:37:39 PM	Bypass valve closed
8/10/2011	9:37:39 PM	Bubbler valve closed
8/10/2011	9:37:39 PM	Helium valve opened
8/10/2011	9:37:39 PM	Main Vac valve opened
8/10/2011	9:37:39 PM	Helium MFC set to  20.000000
8/10/2011	9:37:39 PM	H2 MFC set to  0.000000
8/10/2011	9:37:39 PM	BCl3 MFC set to  0.000000
8/10/2011	9:37:39 PM	PHl3 MFC set to  0.000000
8/10/2011	9:37:39 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:37:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:37:39 PM	Tube furnace set to 0
8/10/2011	9:38:09 PM	Helium valve closed
8/10/2011	9:38:09 PM	H2 valve closed
8/10/2011	9:38:09 PM	BCl3 valve closed
8/10/2011	9:38:09 PM	PH3 valve closed
8/10/2011	9:38:09 PM	SiCl4 pre valve closed
8/10/2011	9:38:09 PM	SiCl4 post valve closed
8/10/2011	9:38:09 PM	Bypass valve closed
8/10/2011	9:38:09 PM	Bubbler valve closed
8/10/2011	9:38:09 PM	Main Vac valve opened
8/10/2011	9:38:09 PM	Helium MFC set to  0.000000
8/10/2011	9:38:09 PM	H2 MFC set to  0.000000
8/10/2011	9:38:09 PM	BCl3 MFC set to  0.000000
8/10/2011	9:38:09 PM	PHl3 MFC set to  0.000000
8/10/2011	9:38:09 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:38:09 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:38:09 PM	Tube furnace set to 0
8/10/2011	9:38:39 PM	H2 valve closed
8/10/2011	9:38:39 PM	BCl3 valve closed
8/10/2011	9:38:39 PM	PH3 valve closed
8/10/2011	9:38:39 PM	SiCl4 pre valve closed
8/10/2011	9:38:39 PM	SiCl4 post valve closed
8/10/2011	9:38:39 PM	Bypass valve closed
8/10/2011	9:38:39 PM	Bubbler valve closed
8/10/2011	9:38:39 PM	Helium valve opened
8/10/2011	9:38:39 PM	Main Vac valve opened
8/10/2011	9:38:39 PM	Helium MFC set to  20.000000
8/10/2011	9:38:39 PM	H2 MFC set to  0.000000
8/10/2011	9:38:39 PM	BCl3 MFC set to  0.000000
8/10/2011	9:38:39 PM	PHl3 MFC set to  0.000000
8/10/2011	9:38:39 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:38:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:38:40 PM	Tube furnace set to 0
8/10/2011	9:39:10 PM	Helium valve closed
8/10/2011	9:39:10 PM	H2 valve closed
8/10/2011	9:39:10 PM	BCl3 valve closed
8/10/2011	9:39:10 PM	PH3 valve closed
8/10/2011	9:39:10 PM	SiCl4 pre valve closed
8/10/2011	9:39:10 PM	SiCl4 post valve closed
8/10/2011	9:39:10 PM	Bypass valve closed
8/10/2011	9:39:10 PM	Bubbler valve closed
8/10/2011	9:39:10 PM	Main Vac valve opened
8/10/2011	9:39:10 PM	Helium MFC set to  0.000000
8/10/2011	9:39:10 PM	H2 MFC set to  0.000000
8/10/2011	9:39:10 PM	BCl3 MFC set to  0.000000
8/10/2011	9:39:10 PM	PHl3 MFC set to  0.000000
8/10/2011	9:39:10 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:39:10 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:39:10 PM	Tube furnace set to 0
8/10/2011	9:39:40 PM	H2 valve closed
8/10/2011	9:39:40 PM	BCl3 valve closed
8/10/2011	9:39:40 PM	PH3 valve closed
8/10/2011	9:39:40 PM	SiCl4 pre valve closed
8/10/2011	9:39:40 PM	SiCl4 post valve closed
8/10/2011	9:39:40 PM	Bypass valve closed
8/10/2011	9:39:40 PM	Bubbler valve closed
8/10/2011	9:39:40 PM	Helium valve opened
8/10/2011	9:39:40 PM	Main Vac valve opened
8/10/2011	9:39:40 PM	Helium MFC set to  20.000000
8/10/2011	9:39:40 PM	H2 MFC set to  0.000000
8/10/2011	9:39:40 PM	BCl3 MFC set to  0.000000
8/10/2011	9:39:40 PM	PHl3 MFC set to  0.000000
8/10/2011	9:39:40 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:39:40 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:39:40 PM	Tube furnace set to 0
8/10/2011	9:40:10 PM	Helium valve closed
8/10/2011	9:40:10 PM	H2 valve closed
8/10/2011	9:40:10 PM	BCl3 valve closed
8/10/2011	9:40:10 PM	PH3 valve closed
8/10/2011	9:40:10 PM	SiCl4 pre valve closed
8/10/2011	9:40:10 PM	SiCl4 post valve closed
8/10/2011	9:40:10 PM	Bypass valve closed
8/10/2011	9:40:10 PM	Bubbler valve closed
8/10/2011	9:40:10 PM	Main Vac valve opened
8/10/2011	9:40:10 PM	Helium MFC set to  0.000000
8/10/2011	9:40:10 PM	H2 MFC set to  0.000000
8/10/2011	9:40:10 PM	BCl3 MFC set to  0.000000
8/10/2011	9:40:10 PM	PHl3 MFC set to  0.000000
8/10/2011	9:40:10 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:40:10 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:40:10 PM	Tube furnace set to 0
8/10/2011	9:40:40 PM	H2 valve closed
8/10/2011	9:40:40 PM	BCl3 valve closed
8/10/2011	9:40:40 PM	PH3 valve closed
8/10/2011	9:40:40 PM	SiCl4 pre valve closed
8/10/2011	9:40:40 PM	SiCl4 post valve closed
8/10/2011	9:40:40 PM	Bypass valve closed
8/10/2011	9:40:40 PM	Bubbler valve closed
8/10/2011	9:40:40 PM	Helium valve opened
8/10/2011	9:40:40 PM	Main Vac valve opened
8/10/2011	9:40:40 PM	Helium MFC set to  20.000000
8/10/2011	9:40:40 PM	H2 MFC set to  0.000000
8/10/2011	9:40:40 PM	BCl3 MFC set to  0.000000
8/10/2011	9:40:40 PM	PHl3 MFC set to  0.000000
8/10/2011	9:40:40 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:40:40 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:40:40 PM	Tube furnace set to 0
8/10/2011	9:41:10 PM	Helium valve closed
8/10/2011	9:41:10 PM	H2 valve closed
8/10/2011	9:41:10 PM	BCl3 valve closed
8/10/2011	9:41:10 PM	PH3 valve closed
8/10/2011	9:41:10 PM	SiCl4 pre valve closed
8/10/2011	9:41:10 PM	SiCl4 post valve closed
8/10/2011	9:41:10 PM	Bypass valve closed
8/10/2011	9:41:10 PM	Bubbler valve closed
8/10/2011	9:41:10 PM	Main Vac valve opened
8/10/2011	9:41:10 PM	Helium MFC set to  0.000000
8/10/2011	9:41:10 PM	H2 MFC set to  0.000000
8/10/2011	9:41:10 PM	BCl3 MFC set to  0.000000
8/10/2011	9:41:10 PM	PHl3 MFC set to  0.000000
8/10/2011	9:41:10 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:41:10 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:41:11 PM	Tube furnace set to 0
8/10/2011	9:41:41 PM	H2 valve closed
8/10/2011	9:41:41 PM	BCl3 valve closed
8/10/2011	9:41:41 PM	PH3 valve closed
8/10/2011	9:41:41 PM	SiCl4 pre valve closed
8/10/2011	9:41:41 PM	SiCl4 post valve closed
8/10/2011	9:41:41 PM	Bypass valve closed
8/10/2011	9:41:41 PM	Bubbler valve closed
8/10/2011	9:41:41 PM	Helium valve opened
8/10/2011	9:41:41 PM	Main Vac valve opened
8/10/2011	9:41:41 PM	Helium MFC set to  20.000000
8/10/2011	9:41:41 PM	H2 MFC set to  0.000000
8/10/2011	9:41:41 PM	BCl3 MFC set to  0.000000
8/10/2011	9:41:41 PM	PHl3 MFC set to  0.000000
8/10/2011	9:41:41 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:41:41 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:41:41 PM	Tube furnace set to 0
8/10/2011	9:42:11 PM	Helium valve closed
8/10/2011	9:42:11 PM	H2 valve closed
8/10/2011	9:42:11 PM	BCl3 valve closed
8/10/2011	9:42:11 PM	PH3 valve closed
8/10/2011	9:42:11 PM	SiCl4 pre valve closed
8/10/2011	9:42:11 PM	SiCl4 post valve closed
8/10/2011	9:42:11 PM	Bypass valve closed
8/10/2011	9:42:11 PM	Bubbler valve closed
8/10/2011	9:42:11 PM	Main Vac valve opened
8/10/2011	9:42:11 PM	Helium MFC set to  0.000000
8/10/2011	9:42:11 PM	H2 MFC set to  0.000000
8/10/2011	9:42:11 PM	BCl3 MFC set to  0.000000
8/10/2011	9:42:11 PM	PHl3 MFC set to  0.000000
8/10/2011	9:42:11 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:42:11 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:42:11 PM	Tube furnace set to 0
8/10/2011	9:42:41 PM	H2 valve closed
8/10/2011	9:42:41 PM	BCl3 valve closed
8/10/2011	9:42:41 PM	PH3 valve closed
8/10/2011	9:42:41 PM	SiCl4 pre valve closed
8/10/2011	9:42:41 PM	SiCl4 post valve closed
8/10/2011	9:42:41 PM	Bypass valve closed
8/10/2011	9:42:41 PM	Bubbler valve closed
8/10/2011	9:42:41 PM	Helium valve opened
8/10/2011	9:42:41 PM	Main Vac valve opened
8/10/2011	9:42:41 PM	Helium MFC set to  20.000000
8/10/2011	9:42:41 PM	H2 MFC set to  0.000000
8/10/2011	9:42:41 PM	BCl3 MFC set to  0.000000
8/10/2011	9:42:41 PM	PHl3 MFC set to  0.000000
8/10/2011	9:42:41 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:42:41 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:42:41 PM	Tube furnace set to 0
8/10/2011	9:43:11 PM	Helium valve closed
8/10/2011	9:43:11 PM	H2 valve closed
8/10/2011	9:43:11 PM	BCl3 valve closed
8/10/2011	9:43:11 PM	PH3 valve closed
8/10/2011	9:43:11 PM	SiCl4 pre valve closed
8/10/2011	9:43:11 PM	SiCl4 post valve closed
8/10/2011	9:43:11 PM	Bypass valve closed
8/10/2011	9:43:11 PM	Bubbler valve closed
8/10/2011	9:43:11 PM	Main Vac valve opened
8/10/2011	9:43:11 PM	Helium MFC set to  0.000000
8/10/2011	9:43:11 PM	H2 MFC set to  0.000000
8/10/2011	9:43:11 PM	BCl3 MFC set to  0.000000
8/10/2011	9:43:11 PM	PHl3 MFC set to  0.000000
8/10/2011	9:43:11 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:43:11 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:43:11 PM	Tube furnace set to 0
8/10/2011	9:43:41 PM	H2 valve closed
8/10/2011	9:43:41 PM	BCl3 valve closed
8/10/2011	9:43:41 PM	PH3 valve closed
8/10/2011	9:43:41 PM	SiCl4 pre valve closed
8/10/2011	9:43:41 PM	SiCl4 post valve closed
8/10/2011	9:43:41 PM	Bypass valve closed
8/10/2011	9:43:41 PM	Bubbler valve closed
8/10/2011	9:43:41 PM	Helium valve opened
8/10/2011	9:43:41 PM	Main Vac valve opened
8/10/2011	9:43:41 PM	Helium MFC set to  20.000000
8/10/2011	9:43:41 PM	H2 MFC set to  0.000000
8/10/2011	9:43:41 PM	BCl3 MFC set to  0.000000
8/10/2011	9:43:41 PM	PHl3 MFC set to  0.000000
8/10/2011	9:43:41 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:43:41 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:43:42 PM	Tube furnace set to 0
8/10/2011	9:44:12 PM	Helium valve closed
8/10/2011	9:44:12 PM	H2 valve closed
8/10/2011	9:44:12 PM	BCl3 valve closed
8/10/2011	9:44:12 PM	PH3 valve closed
8/10/2011	9:44:12 PM	SiCl4 pre valve closed
8/10/2011	9:44:12 PM	SiCl4 post valve closed
8/10/2011	9:44:12 PM	Bypass valve closed
8/10/2011	9:44:12 PM	Bubbler valve closed
8/10/2011	9:44:12 PM	Main Vac valve opened
8/10/2011	9:44:12 PM	Helium MFC set to  0.000000
8/10/2011	9:44:12 PM	H2 MFC set to  0.000000
8/10/2011	9:44:12 PM	BCl3 MFC set to  0.000000
8/10/2011	9:44:12 PM	PHl3 MFC set to  0.000000
8/10/2011	9:44:12 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:44:12 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:44:12 PM	Tube furnace set to 0
8/10/2011	9:44:13 PM	Run finished at 9:44 PM
8/10/2011	9:52:51 PM	Main Vac valve closed
8/10/2011	9:53:01 PM	Main Vac valve opened
8/10/2011	9:53:01 PM	Main Vac valve closed
8/10/2011	9:53:02 PM	Main Vac valve opened
8/10/2011	9:53:48 PM	Recipe started at 9:53 PM
8/10/2011	9:53:48 PM	Helium valve closed
8/10/2011	9:53:48 PM	H2 valve closed
8/10/2011	9:53:48 PM	BCl3 valve closed
8/10/2011	9:53:48 PM	PH3 valve closed
8/10/2011	9:53:48 PM	SiCl4 pre valve closed
8/10/2011	9:53:48 PM	SiCl4 post valve closed
8/10/2011	9:53:48 PM	Main Vac valve closed
8/10/2011	9:53:48 PM	Bypass valve closed
8/10/2011	9:53:48 PM	Bubbler valve closed
8/10/2011	9:53:48 PM	Helium MFC set to  0.000000
8/10/2011	9:53:48 PM	H2 MFC set to  0.000000
8/10/2011	9:53:48 PM	BCl3 MFC set to  0.000000
8/10/2011	9:53:48 PM	PHl3 MFC set to  0.000000
8/10/2011	9:53:48 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:53:48 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:53:48 PM	Tube furnace set to 0
8/10/2011	9:53:51 PM	Helium valve closed
8/10/2011	9:53:51 PM	BCl3 valve closed
8/10/2011	9:53:51 PM	PH3 valve closed
8/10/2011	9:53:51 PM	SiCl4 pre valve closed
8/10/2011	9:53:51 PM	SiCl4 post valve closed
8/10/2011	9:53:51 PM	Main Vac valve closed
8/10/2011	9:53:51 PM	Bypass valve closed
8/10/2011	9:53:51 PM	Bubbler valve closed
8/10/2011	9:53:51 PM	H2 valve opened
8/10/2011	9:53:51 PM	Helium MFC set to  0.000000
8/10/2011	9:53:51 PM	H2 MFC set to  500.000000
8/10/2011	9:53:51 PM	BCl3 MFC set to  0.000000
8/10/2011	9:53:51 PM	PHl3 MFC set to  0.000000
8/10/2011	9:53:51 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:53:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:53:51 PM	Tube furnace set to 0
8/10/2011	9:54:56 PM	Helium valve closed
8/10/2011	9:54:56 PM	BCl3 valve closed
8/10/2011	9:54:56 PM	PH3 valve closed
8/10/2011	9:54:56 PM	SiCl4 pre valve closed
8/10/2011	9:54:56 PM	SiCl4 post valve closed
8/10/2011	9:54:56 PM	Main Vac valve closed
8/10/2011	9:54:56 PM	Bypass valve closed
8/10/2011	9:54:56 PM	H2 valve opened
8/10/2011	9:54:56 PM	Bubbler valve opened
8/10/2011	9:54:56 PM	Helium MFC set to  0.000000
8/10/2011	9:54:56 PM	H2 MFC set to  500.000000
8/10/2011	9:54:56 PM	BCl3 MFC set to  0.000000
8/10/2011	9:54:56 PM	PHl3 MFC set to  0.000000
8/10/2011	9:54:56 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:54:56 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:54:56 PM	Tube furnace set to 0
8/10/2011	9:54:57 PM	Helium valve closed
8/10/2011	9:54:57 PM	BCl3 valve closed
8/10/2011	9:54:57 PM	PH3 valve closed
8/10/2011	9:54:57 PM	SiCl4 pre valve closed
8/10/2011	9:54:57 PM	SiCl4 post valve closed
8/10/2011	9:54:57 PM	Main Vac valve closed
8/10/2011	9:54:57 PM	Bypass valve closed
8/10/2011	9:54:57 PM	H2 valve opened
8/10/2011	9:54:57 PM	Bubbler valve opened
8/10/2011	9:54:57 PM	Helium MFC set to  0.000000
8/10/2011	9:54:57 PM	H2 MFC set to  500.000000
8/10/2011	9:54:57 PM	BCl3 MFC set to  0.000000
8/10/2011	9:54:57 PM	PHl3 MFC set to  0.000000
8/10/2011	9:54:57 PM	SiCl4 MFC set to  0.000000
8/10/2011	9:54:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	9:54:57 PM	Tube furnace set to 1000
8/10/2011	10:14:57 PM	Helium valve closed
8/10/2011	10:14:57 PM	PH3 valve closed
8/10/2011	10:14:57 PM	Main Vac valve closed
8/10/2011	10:14:57 PM	Bypass valve closed
8/10/2011	10:14:57 PM	H2 valve opened
8/10/2011	10:14:57 PM	BCl3 valve opened
8/10/2011	10:14:57 PM	SiCl4 pre valve opened
8/10/2011	10:14:57 PM	SiCl4 post valve opened
8/10/2011	10:14:57 PM	Bubbler valve opened
8/10/2011	10:14:57 PM	Helium MFC set to  0.000000
8/10/2011	10:14:57 PM	H2 MFC set to  500.000000
8/10/2011	10:14:57 PM	BCl3 MFC set to  2.500000
8/10/2011	10:14:57 PM	PHl3 MFC set to  0.000000
8/10/2011	10:14:57 PM	SiCl4 MFC set to  50.000000
8/10/2011	10:14:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:14:57 PM	Tube furnace set to 1000
8/10/2011	10:29:27 PM	Helium valve closed
8/10/2011	10:29:27 PM	BCl3 valve closed
8/10/2011	10:29:27 PM	PH3 valve closed
8/10/2011	10:29:27 PM	SiCl4 pre valve closed
8/10/2011	10:29:27 PM	SiCl4 post valve closed
8/10/2011	10:29:27 PM	Main Vac valve closed
8/10/2011	10:29:27 PM	Bypass valve closed
8/10/2011	10:29:27 PM	H2 valve opened
8/10/2011	10:29:27 PM	Bubbler valve opened
8/10/2011	10:29:27 PM	Helium MFC set to  0.000000
8/10/2011	10:29:27 PM	H2 MFC set to  500.000000
8/10/2011	10:29:27 PM	BCl3 MFC set to  0.000000
8/10/2011	10:29:27 PM	PHl3 MFC set to  0.000000
8/10/2011	10:29:27 PM	SiCl4 MFC set to  0.000000
8/10/2011	10:29:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:29:27 PM	Tube furnace set to 750
8/10/2011	10:34:27 PM	H2 valve closed
8/10/2011	10:34:27 PM	BCl3 valve closed
8/10/2011	10:34:27 PM	PH3 valve closed
8/10/2011	10:34:27 PM	SiCl4 pre valve closed
8/10/2011	10:34:27 PM	SiCl4 post valve closed
8/10/2011	10:34:27 PM	Main Vac valve closed
8/10/2011	10:34:27 PM	Bypass valve closed
8/10/2011	10:34:28 PM	Helium valve opened
8/10/2011	10:34:28 PM	Bubbler valve opened
8/10/2011	10:34:28 PM	Helium MFC set to  500.000000
8/10/2011	10:34:28 PM	H2 MFC set to  0.000000
8/10/2011	10:34:28 PM	BCl3 MFC set to  0.000000
8/10/2011	10:34:28 PM	PHl3 MFC set to  0.000000
8/10/2011	10:34:28 PM	SiCl4 MFC set to  0.000000
8/10/2011	10:34:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:34:28 PM	Tube furnace set to 0
8/10/2011	10:54:28 PM	Helium valve closed
8/10/2011	10:54:28 PM	H2 valve closed
8/10/2011	10:54:28 PM	BCl3 valve closed
8/10/2011	10:54:28 PM	PH3 valve closed
8/10/2011	10:54:28 PM	SiCl4 pre valve closed
8/10/2011	10:54:28 PM	SiCl4 post valve closed
8/10/2011	10:54:28 PM	Main Vac valve closed
8/10/2011	10:54:28 PM	Bypass valve closed
8/10/2011	10:54:28 PM	Bubbler valve closed
8/10/2011	10:54:28 PM	Helium MFC set to  0.000000
8/10/2011	10:54:28 PM	H2 MFC set to  0.000000
8/10/2011	10:54:28 PM	BCl3 MFC set to  0.000000
8/10/2011	10:54:28 PM	PHl3 MFC set to  0.000000
8/10/2011	10:54:28 PM	SiCl4 MFC set to  0.000000
8/10/2011	10:54:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	10:54:28 PM	Tube furnace set to 0
8/10/2011	10:54:29 PM	Run finished at 10:54 PM
8/10/2011	11:11:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	11:11:09 PM	Recipe started at 11:11 PM
8/10/2011	11:11:09 PM	Helium valve closed
8/10/2011	11:11:09 PM	H2 valve closed
8/10/2011	11:11:09 PM	BCl3 valve closed
8/10/2011	11:11:09 PM	PH3 valve closed
8/10/2011	11:11:09 PM	SiCl4 pre valve closed
8/10/2011	11:11:09 PM	SiCl4 post valve closed
8/10/2011	11:11:09 PM	Main Vac valve closed
8/10/2011	11:11:09 PM	Bypass valve closed
8/10/2011	11:11:09 PM	Bubbler valve closed
8/10/2011	11:11:09 PM	Helium MFC set to  0.000000
8/10/2011	11:11:09 PM	H2 MFC set to  0.000000
8/10/2011	11:11:09 PM	BCl3 MFC set to  0.000000
8/10/2011	11:11:09 PM	PHl3 MFC set to  0.000000
8/10/2011	11:11:09 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:11:09 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:11:09 PM	Tube furnace set to 0
8/10/2011	11:11:12 PM	H2 valve closed
8/10/2011	11:11:12 PM	BCl3 valve closed
8/10/2011	11:11:12 PM	PH3 valve closed
8/10/2011	11:11:12 PM	SiCl4 pre valve closed
8/10/2011	11:11:12 PM	SiCl4 post valve closed
8/10/2011	11:11:12 PM	Main Vac valve closed
8/10/2011	11:11:12 PM	Bypass valve closed
8/10/2011	11:11:12 PM	Bubbler valve closed
8/10/2011	11:11:12 PM	Helium valve opened
8/10/2011	11:11:12 PM	Helium MFC set to  500.000000
8/10/2011	11:11:12 PM	H2 MFC set to  0.000000
8/10/2011	11:11:12 PM	BCl3 MFC set to  0.000000
8/10/2011	11:11:12 PM	PHl3 MFC set to  0.000000
8/10/2011	11:11:12 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:11:12 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:11:12 PM	Tube furnace set to 0
8/10/2011	11:11:17 PM	Helium valve closed
8/10/2011	11:11:17 PM	H2 valve closed
8/10/2011	11:11:17 PM	BCl3 valve closed
8/10/2011	11:11:17 PM	PH3 valve closed
8/10/2011	11:11:17 PM	SiCl4 pre valve closed
8/10/2011	11:11:17 PM	SiCl4 post valve closed
8/10/2011	11:11:17 PM	Main Vac valve closed
8/10/2011	11:11:17 PM	Bypass valve closed
8/10/2011	11:11:17 PM	Bubbler valve closed
8/10/2011	11:11:17 PM	Helium MFC set to  0.000000
8/10/2011	11:11:17 PM	H2 MFC set to  0.000000
8/10/2011	11:11:17 PM	BCl3 MFC set to  0.000000
8/10/2011	11:11:17 PM	PHl3 MFC set to  0.000000
8/10/2011	11:11:17 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:11:17 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:11:17 PM	Tube furnace set to 0
8/10/2011	11:11:18 PM	Run finished at 11:11 PM
8/10/2011	11:11:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2011	11:23:24 PM	Recipe started at 11:23 PM
8/10/2011	11:23:24 PM	Helium valve closed
8/10/2011	11:23:24 PM	H2 valve closed
8/10/2011	11:23:24 PM	BCl3 valve closed
8/10/2011	11:23:24 PM	PH3 valve closed
8/10/2011	11:23:24 PM	SiCl4 pre valve closed
8/10/2011	11:23:24 PM	SiCl4 post valve closed
8/10/2011	11:23:24 PM	Main Vac valve closed
8/10/2011	11:23:24 PM	Bubbler valve closed
8/10/2011	11:23:24 PM	Bypass valve opened
8/10/2011	11:23:24 PM	Helium MFC set to  0.000000
8/10/2011	11:23:24 PM	H2 MFC set to  0.000000
8/10/2011	11:23:24 PM	BCl3 MFC set to  0.000000
8/10/2011	11:23:24 PM	PHl3 MFC set to  0.000000
8/10/2011	11:23:24 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:23:24 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:23:24 PM	Tube furnace set to 0
8/10/2011	11:24:37 PM	Helium valve closed
8/10/2011	11:24:37 PM	H2 valve closed
8/10/2011	11:24:37 PM	BCl3 valve closed
8/10/2011	11:24:37 PM	PH3 valve closed
8/10/2011	11:24:37 PM	SiCl4 pre valve closed
8/10/2011	11:24:37 PM	SiCl4 post valve closed
8/10/2011	11:24:37 PM	Main Vac valve closed
8/10/2011	11:24:37 PM	Bubbler valve closed
8/10/2011	11:24:37 PM	Bypass valve opened
8/10/2011	11:24:37 PM	Helium MFC set to  0.000000
8/10/2011	11:24:37 PM	H2 MFC set to  0.000000
8/10/2011	11:24:37 PM	BCl3 MFC set to  0.000000
8/10/2011	11:24:37 PM	PHl3 MFC set to  0.000000
8/10/2011	11:24:37 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:24:37 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:24:37 PM	Tube furnace set to 0
8/10/2011	11:25:07 PM	Helium valve closed
8/10/2011	11:25:08 PM	H2 valve closed
8/10/2011	11:25:08 PM	BCl3 valve closed
8/10/2011	11:25:08 PM	PH3 valve closed
8/10/2011	11:25:08 PM	SiCl4 pre valve closed
8/10/2011	11:25:08 PM	SiCl4 post valve closed
8/10/2011	11:25:08 PM	Bypass valve closed
8/10/2011	11:25:08 PM	Bubbler valve closed
8/10/2011	11:25:08 PM	Main Vac valve opened
8/10/2011	11:25:08 PM	Helium MFC set to  0.000000
8/10/2011	11:25:08 PM	H2 MFC set to  0.000000
8/10/2011	11:25:08 PM	BCl3 MFC set to  0.000000
8/10/2011	11:25:08 PM	PHl3 MFC set to  0.000000
8/10/2011	11:25:08 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:25:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:25:08 PM	Tube furnace set to 0
8/10/2011	11:55:08 PM	H2 valve closed
8/10/2011	11:55:08 PM	BCl3 valve closed
8/10/2011	11:55:08 PM	PH3 valve closed
8/10/2011	11:55:08 PM	SiCl4 pre valve closed
8/10/2011	11:55:08 PM	SiCl4 post valve closed
8/10/2011	11:55:08 PM	Bypass valve closed
8/10/2011	11:55:08 PM	Bubbler valve closed
8/10/2011	11:55:08 PM	Helium valve opened
8/10/2011	11:55:08 PM	Main Vac valve opened
8/10/2011	11:55:08 PM	Helium MFC set to  20.000000
8/10/2011	11:55:08 PM	H2 MFC set to  0.000000
8/10/2011	11:55:08 PM	BCl3 MFC set to  0.000000
8/10/2011	11:55:08 PM	PHl3 MFC set to  0.000000
8/10/2011	11:55:08 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:55:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:55:08 PM	Tube furnace set to 0
8/10/2011	11:55:38 PM	Helium valve closed
8/10/2011	11:55:38 PM	H2 valve closed
8/10/2011	11:55:38 PM	BCl3 valve closed
8/10/2011	11:55:38 PM	PH3 valve closed
8/10/2011	11:55:38 PM	SiCl4 pre valve closed
8/10/2011	11:55:38 PM	SiCl4 post valve closed
8/10/2011	11:55:38 PM	Bypass valve closed
8/10/2011	11:55:38 PM	Bubbler valve closed
8/10/2011	11:55:38 PM	Main Vac valve opened
8/10/2011	11:55:38 PM	Helium MFC set to  0.000000
8/10/2011	11:55:38 PM	H2 MFC set to  0.000000
8/10/2011	11:55:38 PM	BCl3 MFC set to  0.000000
8/10/2011	11:55:38 PM	PHl3 MFC set to  0.000000
8/10/2011	11:55:38 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:55:38 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:55:38 PM	Tube furnace set to 0
8/10/2011	11:56:08 PM	H2 valve closed
8/10/2011	11:56:08 PM	BCl3 valve closed
8/10/2011	11:56:08 PM	PH3 valve closed
8/10/2011	11:56:08 PM	SiCl4 pre valve closed
8/10/2011	11:56:08 PM	SiCl4 post valve closed
8/10/2011	11:56:08 PM	Bypass valve closed
8/10/2011	11:56:08 PM	Bubbler valve closed
8/10/2011	11:56:08 PM	Helium valve opened
8/10/2011	11:56:08 PM	Main Vac valve opened
8/10/2011	11:56:08 PM	Helium MFC set to  20.000000
8/10/2011	11:56:08 PM	H2 MFC set to  0.000000
8/10/2011	11:56:08 PM	BCl3 MFC set to  0.000000
8/10/2011	11:56:08 PM	PHl3 MFC set to  0.000000
8/10/2011	11:56:08 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:56:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:56:08 PM	Tube furnace set to 0
8/10/2011	11:56:38 PM	Helium valve closed
8/10/2011	11:56:38 PM	H2 valve closed
8/10/2011	11:56:38 PM	BCl3 valve closed
8/10/2011	11:56:38 PM	PH3 valve closed
8/10/2011	11:56:38 PM	SiCl4 pre valve closed
8/10/2011	11:56:38 PM	SiCl4 post valve closed
8/10/2011	11:56:38 PM	Bypass valve closed
8/10/2011	11:56:38 PM	Bubbler valve closed
8/10/2011	11:56:38 PM	Main Vac valve opened
8/10/2011	11:56:38 PM	Helium MFC set to  0.000000
8/10/2011	11:56:38 PM	H2 MFC set to  0.000000
8/10/2011	11:56:38 PM	BCl3 MFC set to  0.000000
8/10/2011	11:56:38 PM	PHl3 MFC set to  0.000000
8/10/2011	11:56:38 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:56:38 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:56:38 PM	Tube furnace set to 0
8/10/2011	11:57:08 PM	H2 valve closed
8/10/2011	11:57:08 PM	BCl3 valve closed
8/10/2011	11:57:08 PM	PH3 valve closed
8/10/2011	11:57:08 PM	SiCl4 pre valve closed
8/10/2011	11:57:08 PM	SiCl4 post valve closed
8/10/2011	11:57:08 PM	Bypass valve closed
8/10/2011	11:57:08 PM	Bubbler valve closed
8/10/2011	11:57:08 PM	Helium valve opened
8/10/2011	11:57:08 PM	Main Vac valve opened
8/10/2011	11:57:08 PM	Helium MFC set to  20.000000
8/10/2011	11:57:08 PM	H2 MFC set to  0.000000
8/10/2011	11:57:08 PM	BCl3 MFC set to  0.000000
8/10/2011	11:57:08 PM	PHl3 MFC set to  0.000000
8/10/2011	11:57:08 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:57:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:57:09 PM	Tube furnace set to 0
8/10/2011	11:57:39 PM	Helium valve closed
8/10/2011	11:57:39 PM	H2 valve closed
8/10/2011	11:57:39 PM	BCl3 valve closed
8/10/2011	11:57:39 PM	PH3 valve closed
8/10/2011	11:57:39 PM	SiCl4 pre valve closed
8/10/2011	11:57:39 PM	SiCl4 post valve closed
8/10/2011	11:57:39 PM	Bypass valve closed
8/10/2011	11:57:39 PM	Bubbler valve closed
8/10/2011	11:57:39 PM	Main Vac valve opened
8/10/2011	11:57:39 PM	Helium MFC set to  0.000000
8/10/2011	11:57:39 PM	H2 MFC set to  0.000000
8/10/2011	11:57:39 PM	BCl3 MFC set to  0.000000
8/10/2011	11:57:39 PM	PHl3 MFC set to  0.000000
8/10/2011	11:57:39 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:57:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:57:39 PM	Tube furnace set to 0
8/10/2011	11:58:09 PM	H2 valve closed
8/10/2011	11:58:09 PM	BCl3 valve closed
8/10/2011	11:58:09 PM	PH3 valve closed
8/10/2011	11:58:09 PM	SiCl4 pre valve closed
8/10/2011	11:58:09 PM	SiCl4 post valve closed
8/10/2011	11:58:09 PM	Bypass valve closed
8/10/2011	11:58:09 PM	Bubbler valve closed
8/10/2011	11:58:09 PM	Helium valve opened
8/10/2011	11:58:09 PM	Main Vac valve opened
8/10/2011	11:58:09 PM	Helium MFC set to  20.000000
8/10/2011	11:58:09 PM	H2 MFC set to  0.000000
8/10/2011	11:58:09 PM	BCl3 MFC set to  0.000000
8/10/2011	11:58:09 PM	PHl3 MFC set to  0.000000
8/10/2011	11:58:09 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:58:09 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:58:09 PM	Tube furnace set to 0
8/10/2011	11:58:39 PM	Helium valve closed
8/10/2011	11:58:39 PM	H2 valve closed
8/10/2011	11:58:39 PM	BCl3 valve closed
8/10/2011	11:58:39 PM	PH3 valve closed
8/10/2011	11:58:39 PM	SiCl4 pre valve closed
8/10/2011	11:58:39 PM	SiCl4 post valve closed
8/10/2011	11:58:39 PM	Bypass valve closed
8/10/2011	11:58:39 PM	Bubbler valve closed
8/10/2011	11:58:39 PM	Main Vac valve opened
8/10/2011	11:58:39 PM	Helium MFC set to  0.000000
8/10/2011	11:58:39 PM	H2 MFC set to  0.000000
8/10/2011	11:58:39 PM	BCl3 MFC set to  0.000000
8/10/2011	11:58:39 PM	PHl3 MFC set to  0.000000
8/10/2011	11:58:39 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:58:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:58:39 PM	Tube furnace set to 0
8/10/2011	11:59:09 PM	H2 valve closed
8/10/2011	11:59:09 PM	BCl3 valve closed
8/10/2011	11:59:09 PM	PH3 valve closed
8/10/2011	11:59:09 PM	SiCl4 pre valve closed
8/10/2011	11:59:09 PM	SiCl4 post valve closed
8/10/2011	11:59:09 PM	Bypass valve closed
8/10/2011	11:59:09 PM	Bubbler valve closed
8/10/2011	11:59:09 PM	Helium valve opened
8/10/2011	11:59:09 PM	Main Vac valve opened
8/10/2011	11:59:09 PM	Helium MFC set to  20.000000
8/10/2011	11:59:09 PM	H2 MFC set to  0.000000
8/10/2011	11:59:09 PM	BCl3 MFC set to  0.000000
8/10/2011	11:59:09 PM	PHl3 MFC set to  0.000000
8/10/2011	11:59:09 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:59:09 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:59:09 PM	Tube furnace set to 0
8/10/2011	11:59:39 PM	Helium valve closed
8/10/2011	11:59:39 PM	H2 valve closed
8/10/2011	11:59:39 PM	BCl3 valve closed
8/10/2011	11:59:39 PM	PH3 valve closed
8/10/2011	11:59:39 PM	SiCl4 pre valve closed
8/10/2011	11:59:39 PM	SiCl4 post valve closed
8/10/2011	11:59:39 PM	Bypass valve closed
8/10/2011	11:59:39 PM	Bubbler valve closed
8/10/2011	11:59:39 PM	Main Vac valve opened
8/10/2011	11:59:39 PM	Helium MFC set to  0.000000
8/10/2011	11:59:39 PM	H2 MFC set to  0.000000
8/10/2011	11:59:39 PM	BCl3 MFC set to  0.000000
8/10/2011	11:59:39 PM	PHl3 MFC set to  0.000000
8/10/2011	11:59:39 PM	SiCl4 MFC set to  0.000000
8/10/2011	11:59:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2011	11:59:40 PM	Tube furnace set to 0
